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Patent applications and USPTO patent grants for Cotler; Tina J..The latest application filed is for "etching of silicon dioxide selectively to silicon nitride and polysilicon".
Patent | Date |
---|---|
Etching of silicon dioxide selectively to silicon nitride and polysilicon Grant 5,505,816 - Barnes , et al. April 9, 1 | 1996-04-09 |
Fluid delivery apparatus and method having an infrared feedline sensor Grant 5,492,718 - O'Neill , et al. February 20, 1 | 1996-02-20 |
Reaction chamber interelectrode gap monitoring by capacitance measurement Grant 5,382,911 - Cotler , et al. January 17, 1 | 1995-01-17 |
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