loadpatents
Patent applications and USPTO patent grants for Cotlear; Roberto Cesar.The latest application filed is for "chamber lid with integrated heater".
Patent | Date |
---|---|
Conductive wafer lift pin o-ring gripper with resistor Grant 11,387,135 - Cotlear , et al. July 12, 2 | 2022-07-12 |
Chamber lid with integrated heater Grant 11,264,252 - Willwerth , et al. March 1, 2 | 2022-03-01 |
Chamber Lid With Integrated Heater App 20200118844 - WILLWERTH; Michael D. ;   et al. | 2020-04-16 |
Cooling element for an electrostatic chuck assembly Grant 10,490,435 - Willwerth , et al. Nov | 2019-11-26 |
Cooling Element For An Electrostatic Chuck Assembly App 20190244848 - Willwerth; Michael D. ;   et al. | 2019-08-08 |
Substrate lift pin actuator Grant 10,283,397 - Willwerth , et al. | 2019-05-07 |
Conductive Wafer Lift Pin O-ring Gripper With Resistor App 20170221750 - COTLEAR; Roberto Cesar ;   et al. | 2017-08-03 |
Substrate Lift Pin Actuator App 20170032997 - WILLWERTH; Michael D. ;   et al. | 2017-02-02 |
Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods Grant 9,155,184 - Ng , et al. October 6, 2 | 2015-10-06 |
Plasma Generation Source Employing Dielectric Conduit Assemblies Having Removable Interfaces And Related Assemblies And Methods App 20150137681 - NG; Siu Tang ;   et al. | 2015-05-21 |
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