Patent | Date |
---|
Fluid handling structure for lithographic apparatus Grant 11,454,892 - Van Den Eijnden , et al. September 27, 2 | 2022-09-27 |
Lithographic apparatus and an object positioning system Grant RE49,142 - Koevoets , et al. July 19, 2 | 2022-07-19 |
Pressure Control Valve, A Fluid Handling Structure For Lithographic Apparatus And A Lithographic Apparatus App 20220075264 - JANSSENS; Stef Marten Johan ;   et al. | 2022-03-10 |
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus Grant 11,199,771 - Janssens , et al. December 14, 2 | 2021-12-14 |
Fluid Handling Structure For Lithographic Apparatus App 20210263424 - VAN DEN EIJNDEN; Pepijn ;   et al. | 2021-08-26 |
Fluid handling structure for lithographic apparatus Grant 11,029,607 - Van Den Eijnden , et al. June 8, 2 | 2021-06-08 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 10,620,544 - Cortie , et al. | 2020-04-14 |
A Pressure Control Valve, A Fluid Handling Structure For Lithographic Apparatus And A Lithographic Apparatus App 20200041895 - JANSSENS; Stef Marten Johan ;   et al. | 2020-02-06 |
Object holder and lithographic apparatus Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 10,209,624 - Cortie , et al. Feb | 2019-02-19 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 10,133,190 - Cortie , et al. November 20, 2 | 2018-11-20 |
Object Holder And Lithographic Apparatus App 20180267412 - LAURENT; Thibault Simon Mathieu ;   et al. | 2018-09-20 |
Lithographic apparatus and method of manufacturing a lithographic apparatus Grant 10,018,926 - Cortie , et al. July 10, 2 | 2018-07-10 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,971,255 - Cortie , et al. May 15, 2 | 2018-05-15 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20180101102 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2018-04-12 |
Lithographic apparatus and an object positioning system Grant 9,939,738 - Koevoets , et al. April 10, 2 | 2018-04-10 |
Object holder and lithographic apparatus Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Lithographic Apparatus And Method Of Manufacturing A Lithographic Apparatus App 20180067398 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2018-03-08 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 9,846,372 - Cortie , et al. December 19, 2 | 2017-12-19 |
Object Holder And Lithographic Apparatus App 20170315454 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-11-02 |
Object holder and lithographic apparatus Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
A Lithographic Apparatus And An Object Positioning System App 20170212429 - KOEVOETS; Adrianus Hendrik ;   et al. | 2017-07-27 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20170176875 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2017-06-22 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 9,625,828 - Riepen , et al. April 18, 2 | 2017-04-18 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,588,437 - Cortie , et al. March 7, 2 | 2017-03-07 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,563,132 - Bessems , et al. February 7, 2 | 2017-02-07 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20160377989 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2016-12-29 |
Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method Grant 9,442,390 - Cortie , et al. September 13, 2 | 2016-09-13 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20160154321 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2016-06-02 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20160103398 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2016-04-14 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,291,914 - Bessems , et al. March 22, 2 | 2016-03-22 |
Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply Grant 9,256,136 - Cortie , et al. February 9, 2 | 2016-02-09 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,235,138 - Cortie , et al. January 12, 2 | 2016-01-12 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20150309421 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2015-10-29 |
Object Holder And Lithographic Apparatus App 20150131064 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-05-14 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20150055103 - BESSEMS; David ;   et al. | 2015-02-26 |
Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid Grant 8,953,141 - Leenders , et al. February 10, 2 | 2015-02-10 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus Grant 8,902,400 - Lafarre , et al. December 2, 2 | 2014-12-02 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,836,912 - Bessems , et al. September 16, 2 | 2014-09-16 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,780,324 - Cortie , et al. July 15, 2 | 2014-07-15 |
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply Grant 8,614,784 - Riepen , et al. December 24, 2 | 2013-12-24 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130033692 - BESSEMS; David ;   et al. | 2013-02-07 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130016332 - Cortie; Rogier Hendrikus Magdalena ;   et al. | 2013-01-17 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130016333 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2013-01-17 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20120120376 - Bessems; David ;   et al. | 2012-05-17 |
Fluid Handling Structure, Module For An Immersion Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120069309 - WILLEMS; Paul ;   et al. | 2012-03-22 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110277859 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2011-11-17 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110261332 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2011-10-27 |
Lithographic Apparatus And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110216292 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2011-09-08 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110194084 - RIEPEN; Michel ;   et al. | 2011-08-11 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110090472 - RIEPEN; Michel ;   et al. | 2011-04-21 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090161089 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2009-06-25 |
Electrowetting display device App 20070075941 - Zhou; Guofu ;   et al. | 2007-04-05 |
Temperature compensation method for bi-stable display using drive sub-pulses App 20070052648 - Zhou; Guofu ;   et al. | 2007-03-08 |
Reset pulse driving for reducing flicker in an electrophoretic display having intermediate optical states App 20070035510 - Zhou; Guofu ;   et al. | 2007-02-15 |
Electrophoretic display device App 20060262081 - Zhou; Guofu ;   et al. | 2006-11-23 |
Touch sensitive display App 20060214918 - Destura; Galileo June Adeva ;   et al. | 2006-09-28 |
Electrophoretic display panel and driving method therefor App 20060071902 - Zhou; Guofu ;   et al. | 2006-04-06 |