| Patent | Date |
|---|
Three-way piezoelectrically-actuated microvalve device and method of fabrication
Grant 11,326,717 - Huff May 10, 2 | 2022-05-10 |
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride
Grant 11,075,086 - Ozgur , et al. July 27, 2 | 2021-07-27 |
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride
Grant 11,049,725 - Ozgur , et al. June 29, 2 | 2021-06-29 |
Three-way microvalve device and method of fabrication
Grant 11,035,496 - Huff June 15, 2 | 2021-06-15 |
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices
Grant 10,910,185 - Ozgur , et al. February 2, 2 | 2021-02-02 |
Three-way Microvalve Device And Method Of Fabrication
App 20200025311 - HUFF; Michael A. | 2020-01-23 |
Method For The Fabrication Of Electron Field Emission Devices Including Carbon Nanotube Electron Field Emission Devices
App 20190355538 - OZGUR; Mehmet ; et al. | 2019-11-21 |
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices
Grant 10,403,463 - Ozgur , et al. Sep | 2019-09-03 |
Three-way microvalve device and method of fabrication
Grant 10,323,772 - Huff | 2019-06-18 |
Method For The Fabrication Of Electron Field Emission Devices Including Carbon Nanotube Electron Field Emission Devices
App 20180197711 - Ozgur; Mehmet ; et al. | 2018-07-12 |
Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices
Grant 9,852,870 - Ozgur , et al. December 26, 2 | 2017-12-26 |
Method for fabricating and manufacturing micro--and nano-fabricated devices and systems securely
Grant 9,646,878 - Huff May 9, 2 | 2017-05-09 |
Three-Way Microvalve device and method of fabrication
App 20170097108 - Huff; Michael A. | 2017-04-06 |
Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials
Grant 9,576,773 - Huff , et al. February 21, 2 | 2017-02-21 |
Self-aligned dynamic pattern generator device and method of fabrication
Grant 9,536,706 - Huff , et al. January 3, 2 | 2017-01-03 |
Self-aligned Dynamic Pattern Generator Device And Method Of Fabrication
App 20160233054 - HUFF; Michael A. ; et al. | 2016-08-11 |
Self-aligned dynamic pattern generator device and method of fabrication
Grant 9,312,103 - Huff , et al. April 12, 2 | 2016-04-12 |
METHOD FOR FABRICATING AND MANUFACTURING MICRO- and NANO-FABRICATED DEVICES AND SYSTEMS SECURELY
App 20150371890 - Huff; Michael A. | 2015-12-24 |
Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states
Grant 9,053,929 - Huff , et al. June 9, 2 | 2015-06-09 |
Variable capacitor tuned using laser micromachining
Grant 9,019,686 - Huff , et al. April 28, 2 | 2015-04-28 |
Versatile communication system and method of implementation using heterogeneous integration
Grant 8,983,414 - Ozgur , et al. March 17, 2 | 2015-03-17 |
Method For Etching Deep, High-aspect Ratio Features Into Glass, Fused Silica, And Quartz Materials
App 20150034592 - Huff; Michael A. ; et al. | 2015-02-05 |
Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems
Grant 8,895,338 - Huff November 25, 2 | 2014-11-25 |
Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices
Grant 8,852,378 - Huff , et al. October 7, 2 | 2014-10-07 |
Self-aligned Dynamic Pattern Generator Device And Method Of Fabrication
App 20140268076 - HUFF; Michael A. ; et al. | 2014-09-18 |
System and method for precision fabrication of micro- and nano-devices and structures
Grant 8,790,534 - Huff July 29, 2 | 2014-07-29 |
Means for improved implementation of laser diodes and laser diode arrays
Grant 8,660,157 - Huff , et al. February 25, 2 | 2014-02-25 |
Accessing distributed services in a network
Grant 8,423,670 - Reilly April 16, 2 | 2013-04-16 |
Variable Capacitor Tuned Using Laser Micromachining
App 20130008875 - HUFF; Michael A. ; et al. | 2013-01-10 |
Low-temperature wafer bonding of semiconductors to metals
Grant 8,304,324 - Huff November 6, 2 | 2012-11-06 |
Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects
Grant 8,270,081 - Huff September 18, 2 | 2012-09-18 |
System And Method For Precision Fabrication Of Micro- And Nano-devices And Structures
App 20110309553 - HUFF; Michael A. | 2011-12-22 |
Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects
Grant 8,007,695 - Huff August 30, 2 | 2011-08-30 |
Fabrication of transducer structures
Grant 7,994,463 - Flusberg , et al. August 9, 2 | 2011-08-09 |
Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects
App 20100118407 - Huff; Michael A. | 2010-05-13 |
Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices
App 20100108254 - Huff; Michael A. ; et al. | 2010-05-06 |
Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects
App 20090283927 - Huff; Michael A. | 2009-11-19 |
Low-temperature wafer bonding of semiconductor substrates to metal substrates
App 20090286382 - Huff; Michael A. | 2009-11-19 |
Method of fabricating an acoustic transducer
Grant 7,536,769 - Pedersen May 26, 2 | 2009-05-26 |
Variable capacitor tuned using laser micromachining
App 20090002914 - Huff; Michael A. ; et al. | 2009-01-01 |
Miniature condenser microphone and fabrication method therefor
Grant 7,400,737 - Pedersen July 15, 2 | 2008-07-15 |
Miniature condenser microphone and fabrication method therefor
Grant 7,362,873 - Pedersen April 22, 2 | 2008-04-22 |
Miniature acoustic detector based on electron surface tunneling
Grant 7,280,436 - Pedersen October 9, 2 | 2007-10-09 |
Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure
Grant 7,188,530 - Pedersen , et al. March 13, 2 | 2007-03-13 |
System and method for establishing and monitoring the relative location of group members
Grant 7,181,228 - Boesch February 20, 2 | 2007-02-20 |
Miniature condenser microphone and fabrication method therefor
App 20070003082 - Pedersen; Michael | 2007-01-04 |
Miniature condenser microphone and fabrication method therefor
App 20060215858 - Pedersen; Michael | 2006-09-28 |
Miniature condenser microphone and fabrication method therefor
App 20060210106 - Pedersen; Michael | 2006-09-21 |
Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method
Grant 7,052,926 - Huff May 30, 2 | 2006-05-30 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
Grant 7,045,440 - Huff , et al. May 16, 2 | 2006-05-16 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
Grant 7,024,936 - Pedersen , et al. April 11, 2 | 2006-04-11 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
Grant 7,017,419 - Pedersen , et al. March 28, 2 | 2006-03-28 |
Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
Grant 7,012,327 - Huff , et al. March 14, 2 | 2006-03-14 |
Circuit for direct digital delta-sigma conversion of variable electrical capacitance
Grant 6,975,258 - Pedersen December 13, 2 | 2005-12-13 |
Method of making an integrated electromechanical switch and tunable capacitor
Grant 6,969,630 - Ozgur November 29, 2 | 2005-11-29 |
Miniature acoustic detector based on electron surface tunneling
App 20050249041 - Pedersen, Michael | 2005-11-10 |
Method Of Fabricating Radio Frequency Microelectromechanical Systems (mems) Devices On Low-temperature Co-fired Ceramic (ltcc) Substrates
App 20050167047 - Huff, Michael A. ; et al. | 2005-08-04 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
App 20050161753 - Huff, Michael A. ; et al. | 2005-07-28 |
Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method
App 20050136565 - Huff, Michael A. | 2005-06-23 |
MEMS-based variable capacitor
Grant 6,909,589 - Huff June 21, 2 | 2005-06-21 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
App 20050103112 - Pedersen, Michael ; et al. | 2005-05-19 |
Optical cross-connect switch
Grant 6,870,985 - Noonan March 22, 2 | 2005-03-22 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
App 20050028601 - Pedersen, Michael ; et al. | 2005-02-10 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
App 20040262645 - Huff, Michael A. ; et al. | 2004-12-30 |
Electro-optic phase-only spatial light modulator
Grant 6,819,463 - Noonan November 16, 2 | 2004-11-16 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
Grant 6,815,739 - Huff , et al. November 9, 2 | 2004-11-09 |
Integrated electromechanical switch and tunable capacitor and method of making the same
Grant 6,800,912 - Ozgur October 5, 2 | 2004-10-05 |
Circuit for direct digital delta-sigma conversion of variable electrical capacitance
App 20040178938 - Pedersen, Michael | 2004-09-16 |
MEMS-based variable capacitor
App 20040150939 - Huff, Michael A. | 2004-08-05 |
Method of making an integrated electromechanical switch and tunable capacitor
App 20040097066 - Ozgur, Mehmet | 2004-05-20 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
App 20040057589 - Pedersen, Michael ; et al. | 2004-03-25 |
Electro-optic phase-only spatial light modulator
App 20040008397 - Noonan, William A. | 2004-01-15 |
Optical cross-connect switch
App 20040005113 - Noonan, William A. | 2004-01-08 |
System for distributed task execution
Grant 6,574,628 - Kahn , et al. June 3, 2 | 2003-06-03 |
Unconstrained pointing interface for natural human interaction with a display-based computer system
Grant 6,404,416 - Kahn , et al. June 11, 2 | 2002-06-11 |
System for uniquely and persistently identifying, managing, and tracking digital objects
Grant 6,135,646 - Kahn , et al. October 24, 2 | 2000-10-24 |
Unconstrained pointing interface for natural human interaction with a display-based computer system
Grant 5,793,361 - Kahn , et al. August 11, 1 | 1998-08-11 |
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