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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Lithographic apparatus and method Grant 10,591,828 - Laurent , et al. | 2020-03-17 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Lithographic Apparatus And Method App 20190171113 - LAURENT; Thibault Simon Mathieu ;   et al. | 2019-06-06 |
Lithographic apparatus and a device manufacturing method Grant 10,222,707 - Polet , et al. | 2019-03-05 |
Lithographic apparatus and method Grant 10,203,611 - Laurent , et al. Feb | 2019-02-12 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Lithographic Apparatus And Method App 20180074411 - Laurent; Thibault Simon Mathieu ;   et al. | 2018-03-15 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,904,177 - Thomas , et al. February 27, 2 | 2018-02-27 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
Lithographic apparatus and method Grant 9,823,589 - Laurent , et al. November 21, 2 | 2017-11-21 |
Lithographic Apparatus And Method App 20160202618 - LAURENT; Thibault Simon Mathieu ;   et al. | 2016-07-14 |
Lithographic Apparatus And A Device Manufacturing Method App 20160179015 - POLET; Theodorus Wilhelmus ;   et al. | 2016-06-23 |
Lithographic apparatus and method Grant 9,298,107 - Laurent , et al. March 29, 2 | 2016-03-29 |
Lithographic apparatus and a device manufacturing method Grant 9,274,436 - Polet , et al. March 1, 2 | 2016-03-01 |
Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method Grant 8,786,830 - De Metsenaere , et al. July 22, 2 | 2014-07-22 |
Lithographic Apparatus And A Device Manufacturing Method App 20130149649 - POLET; Theodorus Wilhelmus ;   et al. | 2013-06-13 |
Fluid handling device, an immersion lithographic apparatus and a device manufacturing method Grant 8,416,388 - Eummelen , et al. April 9, 2 | 2013-04-09 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130050665 - Thomas; Ivo Adam Johannes ;   et al. | 2013-02-28 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Lithographic Apparatus And Method App 20120013865 - LAURENT; Thibault Simon Mathieu ;   et al. | 2012-01-19 |
Immersion Lithographic Apparatus and a Device Manufacturing Method App 20100290013 - DE METSENAERE; Christophe ;   et al. | 2010-11-18 |
Fluid Handling Device, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20100259735 - Eummelen; Erik Henricus Egidius Catharina ;   et al. | 2010-10-14 |