Cooperberg; David
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cooperberg; David.The latest application filed is for "edge gas injection for critical dimension uniformity improvement".
- Cooperberg; David - Mount Kisco NY
- Cooperberg; David - Mt. Kisco NY
- Cooperberg; David - Fremont CA
| Patent | Date |
|---|---|
| Edge gas injection for critical dimension uniformity improvement Grant 7,932,181 - Singh , et al. April 26, 2 | 2011-04-26 |
| Plasma processor coil Grant 7,571,697 - Benjamin , et al. August 11, 2 | 2009-08-11 |
| Edge gas injection for critical dimension uniformity improvement App 20070293043 - Singh; Harmeet ; et al. | 2007-12-20 |
| Method and apparatus to calibrate a semi-empirical process simulator Grant RE39,534 - Cooperberg , et al. March 27, 2 | 2007-03-27 |
| Enhanced process and profile simulator algorithms Grant 7,139,632 - Cooperberg , et al. November 21, 2 | 2006-11-21 |
| Enhanced process and profile simulator algorithms App 20050278057 - Cooperberg, David ; et al. | 2005-12-15 |
| Enhanced process and profile simulator algorithms Grant 6,804,572 - Cooperberg , et al. October 12, 2 | 2004-10-12 |
| Applications of a semi-empirical, physically based, profile simulator Grant 6,577,915 - Cooperberg , et al. June 10, 2 | 2003-06-10 |
| Plasma processor coil App 20030067273 - Benjamin, Neil ; et al. | 2003-04-10 |
| Techniques for improving etch rate uniformity Grant 6,344,105 - Daugherty , et al. February 5, 2 | 2002-02-05 |
| Method and apparatus to calibrate a semi-empirical process simulator Grant 6,301,510 - Cooperberg , et al. October 9, 2 | 2001-10-09 |
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