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Wet Etching Composition And Method App 20220275276 - Kim; YoungMin ;   et al. | 2022-09-01 |
Wet etching composition and method Grant 11,365,351 - Kim , et al. June 21, 2 | 2022-06-21 |
Ruthenium etching composition and method Grant 11,346,008 - Lippy , et al. May 31, 2 | 2022-05-31 |
Compositions And Methods For Selectively Etching Silicon Nitride Films App 20220033710 - BILODEAU; Steven M. ;   et al. | 2022-02-03 |
Method For Removing Hard Masks App 20220033709 - WU; Hsing-Chen ;   et al. | 2022-02-03 |
Compositions and methods for removing ceria particles from a surface Grant 11,164,738 - White , et al. November 2, 2 | 2021-11-02 |
Method And Composition For Etching Molybdenum App 20210324525 - DAS; Atanu K. ;   et al. | 2021-10-21 |
Silicon Nitride Etching Composition And Method App 20210296136 - BILODEAU; Steven Michael ;   et al. | 2021-09-23 |
Silicon nitride etching composition and method Grant 11,053,440 - Bilodeau , et al. July 6, 2 | 2021-07-06 |
Composition and process for selectively etching p-doped polysilicon relative to silicon nitride Grant 10,991,809 - Bilodeau , et al. April 27, 2 | 2021-04-27 |
Wet Etching Composition And Method App 20210108140 - KIM; YoungMin ;   et al. | 2021-04-15 |
Formulations to selectively etch silicon germanium relative to germanium Grant 10,957,547 - Bilodeau , et al. March 23, 2 | 2021-03-23 |
Compositions and methods for selectively etching titanium nitride Grant 10,920,141 - Chen , et al. February 16, 2 | 2021-02-16 |
Post-etch residue removal for advanced node beol processing Grant 10,790,187 - Cooper , et al. September 29, 2 | 2020-09-29 |
Ruthenium Etching Composition And Method App 20200190673 - LIPPY; Steven ;   et al. | 2020-06-18 |
Silicon Nitride Etching Composition And Method App 20200157423 - BILODEAU; Steven M. ;   et al. | 2020-05-21 |
Cleaning compositions for removing post etch residue Grant 10,577,567 - Payne , et al. | 2020-03-03 |
Formulations to selectively etch silicon and germanium Grant 10,475,658 - Bilodeau , et al. Nov | 2019-11-12 |
Compositions and methods for selectively etching titanium nitride Grant 10,472,567 - Chen , et al. Nov | 2019-11-12 |
Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility Grant 10,460,954 - Cooper , et al. Oc | 2019-10-29 |
Formulations for the removal of particles generated by cerium-containing solutions Grant 10,446,389 - Cooper , et al. Oc | 2019-10-15 |
Compositions and methods for selectively etching titanium nitride Grant 10,428,271 - Cooper , et al. October 1, 2 | 2019-10-01 |
Compositions and methods for selectively etching titanium nitride Grant 10,392,560 - Barnes , et al. A | 2019-08-27 |
Use of non-oxidizing strong acids for the removal of ion-implanted resist Grant 10,347,504 - Bilodeau , et al. July 9, 2 | 2019-07-09 |
Passivation of germanium surfaces Grant 10,290,505 - Bilodeau , et al. | 2019-05-14 |
Post-CMP removal using compositions and method of use Grant 10,176,979 - Liu , et al. J | 2019-01-08 |
Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility Grant 10,138,117 - Chen , et al. Nov | 2018-11-27 |
Composition and Process for Selectively Etching P-Doped Polysilicon Relative to Silicon Nitride App 20180337253 - Bilodeau; Steven ;   et al. | 2018-11-22 |
Use Of Non-oxidizing Strong Acids For The Removal Of Ion-implanted Resist App 20180240680 - Bilodeau; Steven ;   et al. | 2018-08-23 |
Passivation Of Germanium Surfaces App 20180240674 - Bilodeau; Steven ;   et al. | 2018-08-23 |
Post-etch Residue Removal For Advanced Node Beol Processing App 20180204764 - Cooper; Emanuel I. ;   et al. | 2018-07-19 |
Formulations To Selectively Etch Silicon Germanium Relative To Germanium App 20180197746 - Bilodeau; Steven ;   et al. | 2018-07-12 |
Dopant precursors for mono-layer doping Grant 9,929,014 - Cameron , et al. March 27, 2 | 2018-03-27 |
Composition and process for selectively etching metal nitrides Grant 9,831,088 - Chen , et al. November 28, 2 | 2017-11-28 |
Formulations For The Removal Of Particles Generated By Cerium-containing Solutions App 20170338104 - Cooper; Emanuel I. ;   et al. | 2017-11-23 |
Compositions for cleaning III-V semiconductor materials and methods of using same Grant 9,765,288 - Cooper , et al. September 19, 2 | 2017-09-19 |
Compositions And Methods For Selectively Etching Titanium Nitride App 20170260449 - BARNES; Jeffrey A. ;   et al. | 2017-09-14 |
Aqueous And Semi-aqueous Cleaners For The Removal Of Post-etch Residues With Tungsten And Cobalt Compatibility App 20170200601 - SONG; Lingyan ;   et al. | 2017-07-13 |
Anti-reflective Coating Cleaning And Post-etch Residue Removal Composition Having Metal, Dielectric And Nitride Compatibility App 20170200619 - COOPER; Emanuel I. ;   et al. | 2017-07-13 |
Compositions and methods for the selective removal of silicon nitride Grant 9,691,629 - Cooper , et al. June 27, 2 | 2017-06-27 |
Composition and process for stripping photoresist from a surface including titanium nitride Grant 9,678,430 - Cooper , et al. June 13, 2 | 2017-06-13 |
Compositions and methods for selectively etching titanium nitride Grant 9,546,321 - Barnes , et al. January 17, 2 | 2017-01-17 |
Sulfolane mixtures as ambient aprotic polar solvents Grant 9,520,617 - Cooper December 13, 2 | 2016-12-13 |
Formulations To Selectively Etch Silicon And Germanium App 20160343576 - BILODEAU; Steven ;   et al. | 2016-11-24 |
Use Of Non-oxidizing Strong Acids For The Removal Of Ion-implanted Resist App 20160322232 - BILODEAU; Steven ;   et al. | 2016-11-03 |
Dopant Precursors For Mono-layer Doping App 20160276155 - Cameron; Thomas M. ;   et al. | 2016-09-22 |
Composition for and method of suppressing titanium nitride corrosion Grant 9,416,338 - Cooper , et al. August 16, 2 | 2016-08-16 |
Compositions And Methods For Selectively Etching Titanium Nitride App 20160130500 - CHEN; Li-Min ;   et al. | 2016-05-12 |
Compositions And Methods For The Selective Removal Of Silicon Nitride App 20160035580 - COOPER; Emanuel I. ;   et al. | 2016-02-04 |
Compositions And Methods For Selectively Etching Titanium Nitride App 20160032186 - CHEN; Li-Min ;   et al. | 2016-02-04 |
Post-cmp Removal Using Compositions And Method Of Use App 20160020087 - LIU; Jun ;   et al. | 2016-01-21 |
Compositions For Cleaning Iii-v Semiconductor Materials And Methods Of Using Same App 20150344825 - COOPER; Emanuel I. ;   et al. | 2015-12-03 |
Compositions and methods for the selective removal of silicon nitride Grant 9,158,203 - Cooper , et al. October 13, 2 | 2015-10-13 |
Composition And Process For Stripping Photoresist From A Surface Including Titanium Nitride App 20150168843 - Cooper; Emanuel I. ;   et al. | 2015-06-18 |
Formulations For Wet Etching Nipt During Silicide Fabrication App 20150162213 - Chen; Tianniu ;   et al. | 2015-06-11 |
Compositions And Methods For Selectively Etching Titanium Nitride App 20150027978 - Barnes; Jeffrey A. ;   et al. | 2015-01-29 |
Compositions And Methods For The Selective Removal Of Silicon Nitride App 20140326633 - COOPER; Emanuel I. ;   et al. | 2014-11-06 |
Formulations For The Removal Of Particles Generated By Cerium-containing Solutions App 20140318584 - Cooper; Emanuel I. ;   et al. | 2014-10-30 |
Sulfolane Mixtures As Ambient Aprotic Polar Solvents App 20140319423 - COOPER; Emanuel I. | 2014-10-30 |
Compositions and methods for the selective removal of silicon nitride Grant 8,778,210 - Cooper , et al. July 15, 2 | 2014-07-15 |
Composition And Process For Selectively Etching Metal Nitrides App 20140038420 - Chen; Tianniu ;   et al. | 2014-02-06 |
Aqueous cerium-containing solution having an extended bath lifetime for removing mask material Grant 08618036 - | 2013-12-31 |
Aqueous cerium-containing solution having an extended bath lifetime for removing mask material Grant 8,618,036 - Afzali-Ardakani , et al. December 31, 2 | 2013-12-31 |
Composition For And Method Of Suppressing Titanium Nitride Corrosion App 20130303420 - Cooper; Emanuel I. ;   et al. | 2013-11-14 |
Method For Preventing The Collapse Of High Aspect Ratio Structures During Drying App 20130280123 - Chen; Tianniu ;   et al. | 2013-10-24 |
Aqueous Cerium-containing Solution Having An Extended Bath Lifetime For Removing Mask Material App 20130123159 - Afzali-Ardakani; Ali ;   et al. | 2013-05-16 |
Silicon Removal From Surfaces And Method Of Forming High K Metal Gate Structures Using Same App 20120135590 - Hendrix; Bryan C. ;   et al. | 2012-05-31 |
Method for kinetically controlled etching of copper Grant 7,976,723 - Rath , et al. July 12, 2 | 2011-07-12 |
Non-selective Oxide Etch Wet Clean Composition And Method Of Use App 20110117751 - Sonthalia; Prerna ;   et al. | 2011-05-19 |
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow Grant 7,868,410 - Vereecken , et al. January 11, 2 | 2011-01-11 |
Compositions And Methods For The Selective Removal Of Silicon Nitride App 20100176082 - Cooper; Emanuel I. ;   et al. | 2010-07-15 |
Liquid Cleaner For The Removal Of Post-etch Residues App 20100163788 - Visintin; Pamela ;   et al. | 2010-07-01 |
COMPOSITION AND PROCESS FOR THE SELECTIVE REMOVE OF TiSiN App 20100065530 - Walker; Elizabeth ;   et al. | 2010-03-18 |
Method And Composition For Electro-chemical-mechanical Polishing App 20100051474 - Andricacos; Panayotis C. ;   et al. | 2010-03-04 |
Method for isotropic etching of copper Grant 7,537,709 - Cooper , et al. May 26, 2 | 2009-05-26 |
Method For Kinetically Controlled Etching Of Copper App 20080286701 - Rath; David L. ;   et al. | 2008-11-20 |
Gate Stack Engineering By Electrochemical Processing Utilizing Through-gate-dielectric Current Flow App 20080142894 - Vereecken; Philippe M. ;   et al. | 2008-06-19 |
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow Grant 7,368,045 - Vereecken , et al. May 6, 2 | 2008-05-06 |
Immersion plating and plated structures Grant 7,276,296 - Cooper , et al. October 2, 2 | 2007-10-02 |
Electroplated CoWP composite structures as copper barrier layers Grant 7,217,655 - Cabral, Jr. , et al. May 15, 2 | 2007-05-15 |
Counter-electrode for electrodeposition and electroetching of resistive substrates App 20060283709 - Andricacos; Panayotis C. ;   et al. | 2006-12-21 |
Field effect transistor with electroplated metal gate Grant 7,112,851 - Saenger , et al. September 26, 2 | 2006-09-26 |
Method for isotropic etching of copper App 20060183056 - Cooper; Emanuel I. ;   et al. | 2006-08-17 |
Method and composition for electro-chemical-mechanical polishing App 20060163083 - Andricacos; Panayotis C. ;   et al. | 2006-07-27 |
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow App 20060166474 - Vereecken; Philippe M. ;   et al. | 2006-07-27 |
Immersion plating and plated structures Grant 7,037,559 - Cooper , et al. May 2, 2 | 2006-05-02 |
Field effect transistor with electroplated metal gate App 20060081885 - Saenger; Katherine L. ;   et al. | 2006-04-20 |
Barrier for interconnect and method Grant 6,992,389 - Andricacos , et al. January 31, 2 | 2006-01-31 |
Field effect transistor with electroplated metal gate Grant 6,967,131 - Saenger , et al. November 22, 2 | 2005-11-22 |
Barrier For Interconnect And Method App 20050245070 - Andricacos, Panayotis C. ;   et al. | 2005-11-03 |
Immersion plating and plated structures App 20050238906 - Cooper, Emanuel I. ;   et al. | 2005-10-27 |
Electroplated CoWP composite structures as copper barrier layers App 20050127518 - Cabral, Cyril JR. ;   et al. | 2005-06-16 |
Electroplated CoWP composite structures as copper barrier layers App 20050104216 - Cabral, Cyril JR. ;   et al. | 2005-05-19 |
Field effect transistor with electroplated metal gate App 20050095852 - Saenger, Katherine L. ;   et al. | 2005-05-05 |
Method for isotropic etching of copper App 20050056616 - Cooper, Emanuel I. ;   et al. | 2005-03-17 |
Inhibition Of Tin Oxide Formation In Lead Free Interconnect Formation App 20050026450 - Cooper, Emanuel I. ;   et al. | 2005-02-03 |
Immersion plating and plated structures App 20040219384 - Cooper, Emanuel I. ;   et al. | 2004-11-04 |
Lead free conductive composites for electrical interconnections Grant 6,197,222 - Saraf , et al. March 6, 2 | 2001-03-06 |
Method for cleaning semiconductor devices Grant 5,962,384 - Cooper , et al. October 5, 1 | 1999-10-05 |
Sealed DASD having humidity control and method of making same Grant 5,392,177 - Chainer , et al. February 21, 1 | 1995-02-21 |
Process for producing ceramic circuit structures having conductive vias Grant 5,337,475 - Aoude , et al. August 16, 1 | 1994-08-16 |
Via paste compositions and use thereof to form conductive vias in circuitized ceramic substrates Grant 5,283,104 - Aoude , et al. February 1, 1 | 1994-02-01 |