Patent | Date |
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Debris-removal groove for CMP polishing pad Grant 10,875,146 - Cook , et al. December 29, 2 | 2020-12-29 |
Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films Grant 10,037,889 - Kozhukh , et al. July 31, 2 | 2018-07-31 |
Debris-removal Groove For Cmp Polishing Pad App 20170274496 - Cook; Lee Melbourne ;   et al. | 2017-09-28 |
Method for chemical mechanical polishing substrates containing ruthenium and copper Grant 9,299,585 - Wang , et al. March 29, 2 | 2016-03-29 |
Method For Chemical Mechanical Polishing Substrates Containing Ruthenium And Copper App 20160027663 - Wang; Hongyu ;   et al. | 2016-01-28 |
Chemical mechanical polishing composition for polishing silicon wafers and related methods Grant 9,150,759 - Itai , et al. October 6, 2 | 2015-10-06 |
Chemical Mechanical Polishing Composition For Polishing Silicon Wafers And Related Methods App 20150093900 - Itai; Yasuyuki ;   et al. | 2015-04-02 |
Stable, concentratable silicon wafer polishing composition and related methods Grant 8,801,959 - Penta , et al. August 12, 2 | 2014-08-12 |
Silicon wafer polishing composition and related methods Grant 8,795,548 - Penta , et al. August 5, 2 | 2014-08-05 |
Polishing pads and methods relating thereto Grant 6,869,350 - Roberts , et al. March 22, 2 | 2005-03-22 |
Polishing pads for chemical mechanical planarization Grant 6,860,802 - Vishwanathan , et al. March 1, 2 | 2005-03-01 |
Polishing pad for electrochemical mechanical polishing Grant 6,848,977 - Cook , et al. February 1, 2 | 2005-02-01 |
Polishing pads for chemical mechanical planarization App 20050020082 - Vishwanathan, Arun ;   et al. | 2005-01-27 |
Polishing pads and methods relating thereto Grant 6,843,712 - Roberts , et al. January 18, 2 | 2005-01-18 |
Hydrolytically stable grooved polishing pads for chemical mechanical planarization Grant 6,749,485 - James , et al. June 15, 2 | 2004-06-15 |
Polishing pads and methods relating thereto Grant 6,739,962 - Roberts , et al. May 25, 2 | 2004-05-25 |
Grooved polishing pads for chemical mechanical planarization Grant 6,736,709 - James , et al. May 18, 2 | 2004-05-18 |
Polishing pads and methods relating thereto App 20040048562 - Roberts, John V.H. ;   et al. | 2004-03-11 |
Polishing pads and methods relating thereto App 20040048564 - Roberts, John V.H. ;   et al. | 2004-03-11 |
Polishing pads and methods relating thereto Grant 6,682,402 - Roberts , et al. January 27, 2 | 2004-01-27 |
Polishing pads and methods relating thereto Grant 6,648,733 - Roberts , et al. November 18, 2 | 2003-11-18 |
Polishing pads for chemical mechanical planarization Grant 6,582,283 - James , et al. June 24, 2 | 2003-06-24 |
Polishing pads for chemical mechanical planarization App 20030027500 - James, David B. ;   et al. | 2003-02-06 |
Polishing pads and methods relating thereto Grant 6,500,053 - James , et al. December 31, 2 | 2002-12-31 |
Method relating to a polishing system having a multi-phase polishing layer Grant 6,488,570 - James , et al. December 3, 2 | 2002-12-03 |
Polishing pads and methods relating thereto App 20020155801 - Roberts, John V.H. ;   et al. | 2002-10-24 |
Polishing pads for chemical mechanical planarization Grant 6,454,634 - James , et al. September 24, 2 | 2002-09-24 |
Electropolishing and chemical mechanical planarization App 20020104764 - Banerjee, Gautam ;   et al. | 2002-08-08 |
Polishing pads and methods relating thereto App 20020098782 - James, David B. ;   et al. | 2002-07-25 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers App 20020098702 - Cook, Lee Melbourne ;   et al. | 2002-07-25 |
Polishing pads and methods relating thereto App 20020077036 - Roberts, John V. H. ;   et al. | 2002-06-20 |
Chemical mechanical polishing of dielectric materials App 20020058462 - Oliver, Michael R. ;   et al. | 2002-05-16 |
System for ordering and manufacturing a tangible device App 20010032111 - Jensen, Elmer W. JR. ;   et al. | 2001-10-18 |
Polishing pads and methods relating thereto App 20010024940 - Cook, Lee Melbourne ;   et al. | 2001-09-27 |
Polishing pads and methods relating thereto Grant 6,293,852 - Roberts , et al. September 25, 2 | 2001-09-25 |
Polishing pads and methods relating thereto Grant 6,287,185 - Roberts , et al. September 11, 2 | 2001-09-11 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers Grant 6,245,679 - Cook , et al. June 12, 2 | 2001-06-12 |
Polishing pads and methods relating thereto Grant 6,231,434 - Cook , et al. May 15, 2 | 2001-05-15 |
Polishing pads and methods relating thereto Grant 6,217,434 - Roberts , et al. April 17, 2 | 2001-04-17 |
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers Grant 6,210,525 - James , et al. April 3, 2 | 2001-04-03 |
Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s) Grant 6,210,254 - Cook , et al. April 3, 2 | 2001-04-03 |
Method of making polishing pads Grant 6,106,754 - Cook , et al. August 22, 2 | 2000-08-22 |
Polishing slurry compositions capable of providing multi-modal particle packing and methods relating thereto Grant 6,093,649 - Roberts , et al. July 25, 2 | 2000-07-25 |
Composition for polishing a composite of silica and silicon nitride Grant 6,042,741 - Hosali , et al. March 28, 2 | 2000-03-28 |
Polymeric polishing pad having photolithographically induced surface patterns(s) and methods relating thereto Grant 6,036,579 - Cook , et al. March 14, 2 | 2000-03-14 |
Polishing pads and methods relating thereto Grant 6,022,268 - Roberts , et al. February 8, 2 | 2000-02-08 |
Polishing pad and methods relating thereto Grant 6,022,264 - Cook , et al. February 8, 2 | 2000-02-08 |
Mosaic polishing pads and methods relating thereto Grant 6,019,666 - Roberts , et al. February 1, 2 | 2000-02-01 |
Methods for using polishing pads Grant 6,017,265 - Cook , et al. January 25, 2 | 2000-01-25 |
Method for polishing a composite comprising an insulator, a metal, and titanium Grant 6,001,269 - Sethuraman , et al. December 14, 1 | 1999-12-14 |
Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers Grant 5,932,486 - Cook , et al. August 3, 1 | 1999-08-03 |
Polishing silicon wafers with improved polishing slurries Grant 5,860,848 - Loncki , et al. January 19, 1 | 1999-01-19 |
Compositions and methods for polishing silica, silicates, and silicon nitride Grant 5,769,689 - Cossaboon , et al. June 23, 1 | 1998-06-23 |
Composition and method for polishing a composite comprising titanium Grant 5,770,103 - Wang , et al. June 23, 1 | 1998-06-23 |
Composition and method for polishing a composite of silica and silicon nitride Grant 5,738,800 - Hosali , et al. April 14, 1 | 1998-04-14 |
Polishing slurries comprising two abrasive components and methods for their use Grant 5,693,239 - Wang , et al. December 2, 1 | 1997-12-02 |