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name:-0.012400150299072
name:-0.02046012878418
name:-0.0005650520324707
Compen; Rene Theodorus Petrus Patent Filings

Compen; Rene Theodorus Petrus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Compen; Rene Theodorus Petrus.The latest application filed is for "substrate table, lithographic apparatus and device manufacturing method".

Company Profile
0.24.18
  • Compen; Rene Theodorus Petrus - Valkenswaard N/A NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate table, lithographic apparatus and device manufacturing method
Grant 9,329,497 - Albert , et al. May 3, 2
2016-05-03
Lithographic apparatus and device manufacturing method
Grant 9,019,476 - Compen , et al. April 28, 2
2015-04-28
Clamping device and object loading method
Grant 9,013,682 - Compen , et al. April 21, 2
2015-04-21
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
Grant 8,902,399 - Compen , et al. December 2, 2
2014-12-02
Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system
Grant 8,810,777 - Cadee , et al. August 19, 2
2014-08-19
Lithographic apparatus, substrate table, and method for enhancing substrate release properties
Grant 8,792,085 - Puyt , et al. July 29, 2
2014-07-29
Substrate Table, Lithographic Apparatus and Device Manufacturing Method
App 20130301028 - Albert; Bensely ;   et al.
2013-11-14
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate
Grant 8,384,882 - Compen , et al. February 26, 2
2013-02-26
Lithographic apparatus and device manufacturing method
Grant 8,269,949 - Vermeulen , et al. September 18, 2
2012-09-18
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
Grant 8,154,709 - Alberti , et al. April 10, 2
2012-04-10
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
Grant 8,149,387 - Alberti , et al. April 3, 2
2012-04-03
Method of transferring a substrate, transfer system and lithographic projection apparatus
Grant 8,086,348 - Alberti , et al. December 27, 2
2011-12-27
Method of transferring a substrate, transfer system and lithographic projection apparatus
Grant 8,064,045 - Alberti , et al. November 22, 2
2011-11-22
Lithographic Apparatus And Device Manufacturing Method
App 20110222045 - COMPEN; Rene Theodorus Petrus ;   et al.
2011-09-15
Lithographic apparatus and device manufacturing method
Grant 7,978,308 - Compen , et al. July 12, 2
2011-07-12
Position Calibration Of Alignment Heads In A Multi-head Alignment System
App 20110013165 - KANEKO; Takeshi ;   et al.
2011-01-20
Lithographic Apparatus, Substrate Table, and Method for Enhancing Substrate Release Properties
App 20100296073 - PUYT; Michiel ;   et al.
2010-11-25
Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus
App 20100265488 - Alberti; Jozef Augustinus Maria ;   et al.
2010-10-21
Lithographic apparatus, substrate table, and method for enhancing substrate release properties
Grant 7,791,708 - Puyt , et al. September 7, 2
2010-09-07
Lithographic Apparatus, A Method For Removing Material Of One Or More Protrusions On A Support Surface, And An Article Support System
App 20100214549 - Cadee; Theodorus Petrus Maria ;   et al.
2010-08-26
Calibration Method And Lithographic Apparatus For Calibrating An Optimum Take Over Height Of A Substrate
App 20100110408 - COMPEN; Rene Theodorus Petrus ;   et al.
2010-05-06
Lithographic Apparatus And Device Manufacturing Method
App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ;   et al.
2010-04-08
Lithographic apparatus
Grant 7,639,345 - Ottens , et al. December 29, 2
2009-12-29
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus
App 20090153816 - ALBERTI; Jozef Augustinus Maria ;   et al.
2009-06-18
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus
App 20090155026 - ALBERTI; Jozef Augustinus Maria ;   et al.
2009-06-18
Lithographic Apparatus and Device Manufacturing Method
App 20090086187 - COMPEN; Rene Theodorus Petrus ;   et al.
2009-04-02
Lithographic apparatus and device manufacturing method
App 20080316461 - Compen; Rene Theodorus Petrus
2008-12-25
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
App 20080218712 - Compen; Rene Theodorus Petrus ;   et al.
2008-09-11
Lithographic apparatus, substrate table, and method for enhancing substrate release properties
App 20080158538 - Puyt; Michiel ;   et al.
2008-07-03
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
Grant 7,385,670 - Compen , et al. June 10, 2
2008-06-10
Lithographic apparatus
App 20070085987 - Ottens; Joost Jeroen ;   et al.
2007-04-19
Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus
Grant 7,050,147 - Compen May 23, 2
2006-05-23
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
App 20060072085 - Compen; Rene Theodorus Petrus ;   et al.
2006-04-06
Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus
App 20060006340 - Compen; Rene Theodorus Petrus
2006-01-12

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