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Substrate table, lithographic apparatus and device manufacturing method Grant 9,329,497 - Albert , et al. May 3, 2 | 2016-05-03 |
Lithographic apparatus and device manufacturing method Grant 9,019,476 - Compen , et al. April 28, 2 | 2015-04-28 |
Clamping device and object loading method Grant 9,013,682 - Compen , et al. April 21, 2 | 2015-04-21 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus Grant 8,902,399 - Compen , et al. December 2, 2 | 2014-12-02 |
Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system Grant 8,810,777 - Cadee , et al. August 19, 2 | 2014-08-19 |
Lithographic apparatus, substrate table, and method for enhancing substrate release properties Grant 8,792,085 - Puyt , et al. July 29, 2 | 2014-07-29 |
Substrate Table, Lithographic Apparatus and Device Manufacturing Method App 20130301028 - Albert; Bensely ;   et al. | 2013-11-14 |
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate Grant 8,384,882 - Compen , et al. February 26, 2 | 2013-02-26 |
Lithographic apparatus and device manufacturing method Grant 8,269,949 - Vermeulen , et al. September 18, 2 | 2012-09-18 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus Grant 8,154,709 - Alberti , et al. April 10, 2 | 2012-04-10 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus Grant 8,149,387 - Alberti , et al. April 3, 2 | 2012-04-03 |
Method of transferring a substrate, transfer system and lithographic projection apparatus Grant 8,086,348 - Alberti , et al. December 27, 2 | 2011-12-27 |
Method of transferring a substrate, transfer system and lithographic projection apparatus Grant 8,064,045 - Alberti , et al. November 22, 2 | 2011-11-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110222045 - COMPEN; Rene Theodorus Petrus ;   et al. | 2011-09-15 |
Lithographic apparatus and device manufacturing method Grant 7,978,308 - Compen , et al. July 12, 2 | 2011-07-12 |
Position Calibration Of Alignment Heads In A Multi-head Alignment System App 20110013165 - KANEKO; Takeshi ;   et al. | 2011-01-20 |
Lithographic Apparatus, Substrate Table, and Method for Enhancing Substrate Release Properties App 20100296073 - PUYT; Michiel ;   et al. | 2010-11-25 |
Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus App 20100265488 - Alberti; Jozef Augustinus Maria ;   et al. | 2010-10-21 |
Lithographic apparatus, substrate table, and method for enhancing substrate release properties Grant 7,791,708 - Puyt , et al. September 7, 2 | 2010-09-07 |
Lithographic Apparatus, A Method For Removing Material Of One Or More Protrusions On A Support Surface, And An Article Support System App 20100214549 - Cadee; Theodorus Petrus Maria ;   et al. | 2010-08-26 |
Calibration Method And Lithographic Apparatus For Calibrating An Optimum Take Over Height Of A Substrate App 20100110408 - COMPEN; Rene Theodorus Petrus ;   et al. | 2010-05-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ;   et al. | 2010-04-08 |
Lithographic apparatus Grant 7,639,345 - Ottens , et al. December 29, 2 | 2009-12-29 |
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus App 20090153816 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-06-18 |
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus App 20090155026 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-06-18 |
Lithographic Apparatus and Device Manufacturing Method App 20090086187 - COMPEN; Rene Theodorus Petrus ;   et al. | 2009-04-02 |
Lithographic apparatus and device manufacturing method App 20080316461 - Compen; Rene Theodorus Petrus | 2008-12-25 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus App 20080218712 - Compen; Rene Theodorus Petrus ;   et al. | 2008-09-11 |
Lithographic apparatus, substrate table, and method for enhancing substrate release properties App 20080158538 - Puyt; Michiel ;   et al. | 2008-07-03 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus Grant 7,385,670 - Compen , et al. June 10, 2 | 2008-06-10 |
Lithographic apparatus App 20070085987 - Ottens; Joost Jeroen ;   et al. | 2007-04-19 |
Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus Grant 7,050,147 - Compen May 23, 2 | 2006-05-23 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus App 20060072085 - Compen; Rene Theodorus Petrus ;   et al. | 2006-04-06 |
Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus App 20060006340 - Compen; Rene Theodorus Petrus | 2006-01-12 |