Patent | Date |
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High Power Electrostatic Chuck With Features Preventing He Hole Light-up/arcing App 20220223387 - MATYUSHKIN; Alexander ;   et al. | 2022-07-14 |
Apparatus for spatial and temporal control of temperature on a substrate Grant 11,302,556 - Ricci , et al. April 12, 2 | 2022-04-12 |
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode Grant 10,804,129 - Kimball , et al. October 13, 2 | 2020-10-13 |
Power switching system for ESC with array of thermal control elements Grant 10,770,363 - Gaff , et al. Sep | 2020-09-08 |
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate App 20200251370 - Kind Code | 2020-08-06 |
Substrate support with thermal zones for semiconductor processing Grant 10,720,346 - Singh , et al. | 2020-07-21 |
Apparatus for spatial and temporal control of temperature on a substrate Grant 10,636,689 - Ricci , et al. | 2020-04-28 |
Substrate supports with multi-layer structure including independent operated heater zones Grant 10,236,193 - Singh , et al. | 2019-03-19 |
Power Switching System For Esc With Array Of Thermal Control Elements App 20180374763 - Gaff; Keith William ;   et al. | 2018-12-27 |
Electrostatic Chuck With Flexible Wafer Temperature Control App 20180286642 - MATYUSHKIN; Alexander ;   et al. | 2018-10-04 |
Electrostatic Chuck Assembly Incorporating A Gasket For Distributing Rf Power To A Ceramic Embedded Electrode App 20180277412 - KIMBALL; Christopher ;   et al. | 2018-09-27 |
Adjusting substrate temperature to improve CD uniformity Grant 10,056,225 - Gaff , et al. August 21, 2 | 2018-08-21 |
Power switching system for ESC with array of thermal control elements Grant 10,049,948 - Gaff , et al. August 14, 2 | 2018-08-14 |
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough Grant 10,002,782 - Kimball , et al. June 19, 2 | 2018-06-19 |
Substrate Supports With Multi-layer Structure Including Independent Operated Heater Zones App 20170229327 - Singh; Harmeet ;   et al. | 2017-08-10 |
Heating plate with heating zones for substrate processing and method of use thereof Grant 9,646,861 - Singh , et al. May 9, 2 | 2017-05-09 |
Substrate Support With Thermal Zones For Semiconductor Processing App 20160300741 - Singh; Harmeet ;   et al. | 2016-10-13 |
Heating plate with planar heater zones for semiconductor processing Grant 9,392,643 - Singh , et al. July 12, 2 | 2016-07-12 |
Electrode for use in measuring dielectric properties of parts Grant 9,322,795 - Kim , et al. April 26, 2 | 2016-04-26 |
Esc Assembly Including An Electrically Conductive Gasket For Uniform Rf Power Delivery Therethrough App 20160111314 - Kimball; Christopher ;   et al. | 2016-04-21 |
Plasma chamber top piece assembly Grant 9,318,349 - Sharpless , et al. April 19, 2 | 2016-04-19 |
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 9,093,483 - Augustino , et al. July 28, 2 | 2015-07-28 |
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate App 20140332161 - Ricci; Anthony J. ;   et al. | 2014-11-13 |
Heating plate with planar heater zones for semiconductor processing Grant 8,884,194 - Singh , et al. November 11, 2 | 2014-11-11 |
Apparatus for spatial and temporal control of temperature on a substrate Grant 8,821,639 - Ricci , et al. September 2, 2 | 2014-09-02 |
Showerhead Electrode Assembly With Gas Flow Modification For Extended Electrode Life App 20140187049 - Augustino; Jason ;   et al. | 2014-07-03 |
Power Switching System For Esc With Array Of Thermal Control Elements App 20140154819 - Gaff; Keith William ;   et al. | 2014-06-05 |
Method for spatial and temporal control of temperature on a substrate Grant 8,735,298 - Ricci , et al. May 27, 2 | 2014-05-27 |
Upper electrode backing member with particle reducing features Grant 8,709,202 - De La Llera , et al. April 29, 2 | 2014-04-29 |
Adjusting Substrate Temperature To Improve Cd Uniformity App 20140110060 - Gaff; Keith William ;   et al. | 2014-04-24 |
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 8,702,866 - Augustino , et al. April 22, 2 | 2014-04-22 |
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140096909 - Singh; Harmeet ;   et al. | 2014-04-10 |
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140047705 - Singh; Harmeet ;   et al. | 2014-02-20 |
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140045337 - Singh; Harmeet ;   et al. | 2014-02-13 |
Adjusting substrate temperature to improve CD uniformity Grant 8,642,480 - Gaff , et al. February 4, 2 | 2014-02-04 |
Heating plate with planar heating zones for semiconductor processing Grant 8,637,794 - Singh , et al. January 28, 2 | 2014-01-28 |
Heating plate with diode planar heater zones for semiconductor processing Grant 8,624,168 - Gaff , et al. January 7, 2 | 2014-01-07 |
Plasma Chamber Top Piece Assembly App 20130306239 - Sharpless; Leonard J. ;   et al. | 2013-11-21 |
Thermal plate with planar thermal zones for semiconductor processing Grant 8,587,113 - Gaff , et al. November 19, 2 | 2013-11-19 |
Thermal Plate With Planar Thermal Zones For Semiconductor Processing App 20130269368 - GAFF; Keith William ;   et al. | 2013-10-17 |
Plasma chamber top piece assembly Grant 8,540,843 - Sharpless , et al. September 24, 2 | 2013-09-24 |
Electrode for Use in Measuring Dielectric Properties of Parts App 20130241581 - Kim; Jaehyun ;   et al. | 2013-09-19 |
Electrode for use in measuring dielectric properties of parts Grant 8,519,724 - Kim , et al. August 27, 2 | 2013-08-27 |
Plasma arrestor insert Grant 8,503,151 - Comendant August 6, 2 | 2013-08-06 |
Thermal plate with planar thermal zones for semiconductor processing Grant 8,461,674 - Gaff , et al. June 11, 2 | 2013-06-11 |
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate App 20130072024 - Ricci; Anthony J. ;   et al. | 2013-03-21 |
Thermal Plate With Planar Thermal Zones For Semiconductor Processing App 20130072035 - Gaff; Keith William ;   et al. | 2013-03-21 |
Heating Plate With Diode Planar Heater Zones For Semiconductor Processing App 20130068750 - Gaff; Keith William ;   et al. | 2013-03-21 |
Apparatus for measuring dielectric properties of parts Grant 8,269,510 - Kim , et al. September 18, 2 | 2012-09-18 |
Plasma Chamber Top Piece Assembly App 20120043022 - Sharpless; Leonard J. ;   et al. | 2012-02-23 |
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate App 20120018411 - Ricci; Anthony J. ;   et al. | 2012-01-26 |
Quartz guard ring centering features Grant 8,084,705 - Larson , et al. December 27, 2 | 2011-12-27 |
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate Grant 8,051,556 - Ricci , et al. November 8, 2 | 2011-11-08 |
Apparatus for spatial and temporal control of temperature on a substrate Grant 8,038,796 - Ricci , et al. October 18, 2 | 2011-10-18 |
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system Grant 7,998,296 - Ricci , et al. August 16, 2 | 2011-08-16 |
Methods for measuring dielectric properties of parts Grant 7,973,539 - Kim , et al. July 5, 2 | 2011-07-05 |
Methods For Measuring Dielectric Properties Of Parts App 20110140715 - Kim; Jaehyun ;   et al. | 2011-06-16 |
Adjusting Substrate Temperature To Improve Cd Uniformity App 20110143462 - Gaff; Keith William ;   et al. | 2011-06-16 |
Electrostatic chuck support assembly Grant 7,939,784 - Steger , et al. May 10, 2 | 2011-05-10 |
Heating Plate With Planar Heating Zones For Semiconductor Processing App 20110092072 - Singh; Harmeet ;   et al. | 2011-04-21 |
Quartz Guard Ring Centering Features App 20110083318 - Larson; Dean J. ;   et al. | 2011-04-14 |
Upper Electrode Backing Member With Particle Reducing Features App 20110086513 - De La Llera; Anthony ;   et al. | 2011-04-14 |
Plasma Arrestor Insert App 20110075313 - Comendant; Keith | 2011-03-31 |
Methods for measuring dielectric properties of parts Grant 7,911,213 - Kim , et al. March 22, 2 | 2011-03-22 |
Quartz guard ring centering features Grant 7,875,824 - Larson , et al. January 25, 2 | 2011-01-25 |
Upper electrode backing member with particle reducing features Grant 7,854,820 - De La Llera , et al. December 21, 2 | 2010-12-21 |
Apparatus for an optimized plasma chamber top piece Grant 7,780,791 - Sharpless , et al. August 24, 2 | 2010-08-24 |
Methods for characterizing dielectric properties of parts Grant 7,777,500 - Kim , et al. August 17, 2 | 2010-08-17 |
Substrate temperature control by using liquid controlled multizone substrate support App 20100116788 - Singh; Harmeet ;   et al. | 2010-05-13 |
Methods for Measuring Dielectric Properties of Parts App 20100079152 - Kim; Jaehyun ;   et al. | 2010-04-01 |
Temperature probes having a thermally isolated tip Grant 7,651,269 - Comendant January 26, 2 | 2010-01-26 |
Electrostatic Chuck Support Assembly App 20090161286 - STEGER; ROBERT ;   et al. | 2009-06-25 |
Methods for Characterizing Dielectric Properties of Parts App 20090091335 - Kim; Jaehyun ;   et al. | 2009-04-09 |
Electrode for Use in Measuring Dielectric Properties of Parts App 20090091341 - Kim; Jaehyun ;   et al. | 2009-04-09 |
Apparatus for Measuring Dielectric Properties of Parts App 20090091340 - Kim; Jaehyun ;   et al. | 2009-04-09 |
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate App 20090078360 - Ricci; Anthony J. ;   et al. | 2009-03-26 |
Method of tuning thermal conductivity of electrostatic chuck support assembly Grant 7,501,605 - Steger , et al. March 10, 2 | 2009-03-10 |
Temperature probes having a thermally isolated tip App 20090022205 - Comendant; Keith | 2009-01-22 |
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system App 20080314508 - Ricci; Tony ;   et al. | 2008-12-25 |
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system Grant 7,431,788 - Ricci , et al. October 7, 2 | 2008-10-07 |
Showerhead electrode assembly with gas flow modification for extended electrode life App 20080141941 - Augustino; Jason ;   et al. | 2008-06-19 |
Quartz guard ring centering features App 20080099120 - Larson; Dean J. ;   et al. | 2008-05-01 |
Upper electrode backing member with particle reducing features App 20080090417 - De La Llera; Anthony ;   et al. | 2008-04-17 |
Method of tuning thermal conductivity of electrostatic chuck support assembly App 20080083736 - Steger; Robert ;   et al. | 2008-04-10 |
Faraday Shield Disposed Within An Inductively Coupled Plasma Etching apparatus App 20070181257 - Comendant; Keith ;   et al. | 2007-08-09 |
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system App 20070131350 - Ricci; Anthony ;   et al. | 2007-06-14 |
Faraday shield disposed within an inductively coupled plasma etching apparatus Grant 7,223,321 - Comendant , et al. May 29, 2 | 2007-05-29 |
Apparatus for spatial and temporal control of temperature on a substrate App 20060144516 - Ricci; Anthony J. ;   et al. | 2006-07-06 |
Apparatus for an optimized plasma chamber top piece App 20060000413 - Sharpless; Leonard J. ;   et al. | 2006-01-05 |