loadpatents
name:-0.057097196578979
name:-0.054819822311401
name:-0.0058829784393311
COMENDANT; Keith Patent Filings

COMENDANT; Keith

Patent Applications and Registrations

Patent applications and USPTO patent grants for COMENDANT; Keith.The latest application filed is for "high power electrostatic chuck with features preventing he hole light-up/arcing".

Company Profile
4.54.49
  • COMENDANT; Keith - Fremont CA
  • Comendant; Keith - Freemont CA
  • Comendant; Keith - Alameda CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
High Power Electrostatic Chuck With Features Preventing He Hole Light-up/arcing
App 20220223387 - MATYUSHKIN; Alexander ;   et al.
2022-07-14
Apparatus for spatial and temporal control of temperature on a substrate
Grant 11,302,556 - Ricci , et al. April 12, 2
2022-04-12
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
Grant 10,804,129 - Kimball , et al. October 13, 2
2020-10-13
Power switching system for ESC with array of thermal control elements
Grant 10,770,363 - Gaff , et al. Sep
2020-09-08
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate
App 20200251370 - Kind Code
2020-08-06
Substrate support with thermal zones for semiconductor processing
Grant 10,720,346 - Singh , et al.
2020-07-21
Apparatus for spatial and temporal control of temperature on a substrate
Grant 10,636,689 - Ricci , et al.
2020-04-28
Substrate supports with multi-layer structure including independent operated heater zones
Grant 10,236,193 - Singh , et al.
2019-03-19
Power Switching System For Esc With Array Of Thermal Control Elements
App 20180374763 - Gaff; Keith William ;   et al.
2018-12-27
Electrostatic Chuck With Flexible Wafer Temperature Control
App 20180286642 - MATYUSHKIN; Alexander ;   et al.
2018-10-04
Electrostatic Chuck Assembly Incorporating A Gasket For Distributing Rf Power To A Ceramic Embedded Electrode
App 20180277412 - KIMBALL; Christopher ;   et al.
2018-09-27
Adjusting substrate temperature to improve CD uniformity
Grant 10,056,225 - Gaff , et al. August 21, 2
2018-08-21
Power switching system for ESC with array of thermal control elements
Grant 10,049,948 - Gaff , et al. August 14, 2
2018-08-14
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
Grant 10,002,782 - Kimball , et al. June 19, 2
2018-06-19
Substrate Supports With Multi-layer Structure Including Independent Operated Heater Zones
App 20170229327 - Singh; Harmeet ;   et al.
2017-08-10
Heating plate with heating zones for substrate processing and method of use thereof
Grant 9,646,861 - Singh , et al. May 9, 2
2017-05-09
Substrate Support With Thermal Zones For Semiconductor Processing
App 20160300741 - Singh; Harmeet ;   et al.
2016-10-13
Heating plate with planar heater zones for semiconductor processing
Grant 9,392,643 - Singh , et al. July 12, 2
2016-07-12
Electrode for use in measuring dielectric properties of parts
Grant 9,322,795 - Kim , et al. April 26, 2
2016-04-26
Esc Assembly Including An Electrically Conductive Gasket For Uniform Rf Power Delivery Therethrough
App 20160111314 - Kimball; Christopher ;   et al.
2016-04-21
Plasma chamber top piece assembly
Grant 9,318,349 - Sharpless , et al. April 19, 2
2016-04-19
Showerhead electrode assembly with gas flow modification for extended electrode life
Grant 9,093,483 - Augustino , et al. July 28, 2
2015-07-28
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate
App 20140332161 - Ricci; Anthony J. ;   et al.
2014-11-13
Heating plate with planar heater zones for semiconductor processing
Grant 8,884,194 - Singh , et al. November 11, 2
2014-11-11
Apparatus for spatial and temporal control of temperature on a substrate
Grant 8,821,639 - Ricci , et al. September 2, 2
2014-09-02
Showerhead Electrode Assembly With Gas Flow Modification For Extended Electrode Life
App 20140187049 - Augustino; Jason ;   et al.
2014-07-03
Power Switching System For Esc With Array Of Thermal Control Elements
App 20140154819 - Gaff; Keith William ;   et al.
2014-06-05
Method for spatial and temporal control of temperature on a substrate
Grant 8,735,298 - Ricci , et al. May 27, 2
2014-05-27
Upper electrode backing member with particle reducing features
Grant 8,709,202 - De La Llera , et al. April 29, 2
2014-04-29
Adjusting Substrate Temperature To Improve Cd Uniformity
App 20140110060 - Gaff; Keith William ;   et al.
2014-04-24
Showerhead electrode assembly with gas flow modification for extended electrode life
Grant 8,702,866 - Augustino , et al. April 22, 2
2014-04-22
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140096909 - Singh; Harmeet ;   et al.
2014-04-10
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140047705 - Singh; Harmeet ;   et al.
2014-02-20
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140045337 - Singh; Harmeet ;   et al.
2014-02-13
Adjusting substrate temperature to improve CD uniformity
Grant 8,642,480 - Gaff , et al. February 4, 2
2014-02-04
Heating plate with planar heating zones for semiconductor processing
Grant 8,637,794 - Singh , et al. January 28, 2
2014-01-28
Heating plate with diode planar heater zones for semiconductor processing
Grant 8,624,168 - Gaff , et al. January 7, 2
2014-01-07
Plasma Chamber Top Piece Assembly
App 20130306239 - Sharpless; Leonard J. ;   et al.
2013-11-21
Thermal plate with planar thermal zones for semiconductor processing
Grant 8,587,113 - Gaff , et al. November 19, 2
2013-11-19
Thermal Plate With Planar Thermal Zones For Semiconductor Processing
App 20130269368 - GAFF; Keith William ;   et al.
2013-10-17
Plasma chamber top piece assembly
Grant 8,540,843 - Sharpless , et al. September 24, 2
2013-09-24
Electrode for Use in Measuring Dielectric Properties of Parts
App 20130241581 - Kim; Jaehyun ;   et al.
2013-09-19
Electrode for use in measuring dielectric properties of parts
Grant 8,519,724 - Kim , et al. August 27, 2
2013-08-27
Plasma arrestor insert
Grant 8,503,151 - Comendant August 6, 2
2013-08-06
Thermal plate with planar thermal zones for semiconductor processing
Grant 8,461,674 - Gaff , et al. June 11, 2
2013-06-11
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate
App 20130072024 - Ricci; Anthony J. ;   et al.
2013-03-21
Thermal Plate With Planar Thermal Zones For Semiconductor Processing
App 20130072035 - Gaff; Keith William ;   et al.
2013-03-21
Heating Plate With Diode Planar Heater Zones For Semiconductor Processing
App 20130068750 - Gaff; Keith William ;   et al.
2013-03-21
Apparatus for measuring dielectric properties of parts
Grant 8,269,510 - Kim , et al. September 18, 2
2012-09-18
Plasma Chamber Top Piece Assembly
App 20120043022 - Sharpless; Leonard J. ;   et al.
2012-02-23
Apparatus For Spatial And Temporal Control Of Temperature On A Substrate
App 20120018411 - Ricci; Anthony J. ;   et al.
2012-01-26
Quartz guard ring centering features
Grant 8,084,705 - Larson , et al. December 27, 2
2011-12-27
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
Grant 8,051,556 - Ricci , et al. November 8, 2
2011-11-08
Apparatus for spatial and temporal control of temperature on a substrate
Grant 8,038,796 - Ricci , et al. October 18, 2
2011-10-18
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
Grant 7,998,296 - Ricci , et al. August 16, 2
2011-08-16
Methods for measuring dielectric properties of parts
Grant 7,973,539 - Kim , et al. July 5, 2
2011-07-05
Methods For Measuring Dielectric Properties Of Parts
App 20110140715 - Kim; Jaehyun ;   et al.
2011-06-16
Adjusting Substrate Temperature To Improve Cd Uniformity
App 20110143462 - Gaff; Keith William ;   et al.
2011-06-16
Electrostatic chuck support assembly
Grant 7,939,784 - Steger , et al. May 10, 2
2011-05-10
Heating Plate With Planar Heating Zones For Semiconductor Processing
App 20110092072 - Singh; Harmeet ;   et al.
2011-04-21
Quartz Guard Ring Centering Features
App 20110083318 - Larson; Dean J. ;   et al.
2011-04-14
Upper Electrode Backing Member With Particle Reducing Features
App 20110086513 - De La Llera; Anthony ;   et al.
2011-04-14
Plasma Arrestor Insert
App 20110075313 - Comendant; Keith
2011-03-31
Methods for measuring dielectric properties of parts
Grant 7,911,213 - Kim , et al. March 22, 2
2011-03-22
Quartz guard ring centering features
Grant 7,875,824 - Larson , et al. January 25, 2
2011-01-25
Upper electrode backing member with particle reducing features
Grant 7,854,820 - De La Llera , et al. December 21, 2
2010-12-21
Apparatus for an optimized plasma chamber top piece
Grant 7,780,791 - Sharpless , et al. August 24, 2
2010-08-24
Methods for characterizing dielectric properties of parts
Grant 7,777,500 - Kim , et al. August 17, 2
2010-08-17
Substrate temperature control by using liquid controlled multizone substrate support
App 20100116788 - Singh; Harmeet ;   et al.
2010-05-13
Methods for Measuring Dielectric Properties of Parts
App 20100079152 - Kim; Jaehyun ;   et al.
2010-04-01
Temperature probes having a thermally isolated tip
Grant 7,651,269 - Comendant January 26, 2
2010-01-26
Electrostatic Chuck Support Assembly
App 20090161286 - STEGER; ROBERT ;   et al.
2009-06-25
Methods for Characterizing Dielectric Properties of Parts
App 20090091335 - Kim; Jaehyun ;   et al.
2009-04-09
Electrode for Use in Measuring Dielectric Properties of Parts
App 20090091341 - Kim; Jaehyun ;   et al.
2009-04-09
Apparatus for Measuring Dielectric Properties of Parts
App 20090091340 - Kim; Jaehyun ;   et al.
2009-04-09
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
App 20090078360 - Ricci; Anthony J. ;   et al.
2009-03-26
Method of tuning thermal conductivity of electrostatic chuck support assembly
Grant 7,501,605 - Steger , et al. March 10, 2
2009-03-10
Temperature probes having a thermally isolated tip
App 20090022205 - Comendant; Keith
2009-01-22
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
App 20080314508 - Ricci; Tony ;   et al.
2008-12-25
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
Grant 7,431,788 - Ricci , et al. October 7, 2
2008-10-07
Showerhead electrode assembly with gas flow modification for extended electrode life
App 20080141941 - Augustino; Jason ;   et al.
2008-06-19
Quartz guard ring centering features
App 20080099120 - Larson; Dean J. ;   et al.
2008-05-01
Upper electrode backing member with particle reducing features
App 20080090417 - De La Llera; Anthony ;   et al.
2008-04-17
Method of tuning thermal conductivity of electrostatic chuck support assembly
App 20080083736 - Steger; Robert ;   et al.
2008-04-10
Faraday Shield Disposed Within An Inductively Coupled Plasma Etching apparatus
App 20070181257 - Comendant; Keith ;   et al.
2007-08-09
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
App 20070131350 - Ricci; Anthony ;   et al.
2007-06-14
Faraday shield disposed within an inductively coupled plasma etching apparatus
Grant 7,223,321 - Comendant , et al. May 29, 2
2007-05-29
Apparatus for spatial and temporal control of temperature on a substrate
App 20060144516 - Ricci; Anthony J. ;   et al.
2006-07-06
Apparatus for an optimized plasma chamber top piece
App 20060000413 - Sharpless; Leonard J. ;   et al.
2006-01-05

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