| Patent | Date |
|---|
Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride As A Source Material To Generate An Aluminum Ion Beam
App 20220139664 - Colvin; Neil K. ; et al. | 2022-05-05 |
Etching Aluminum Nitride Or Aluminum Oxide To Generate An Aluminum Ion Beam
App 20220139662 - Colvin; Neil K. ; et al. | 2022-05-05 |
Hydrogen generator for an ion implanter
Grant 11,276,543 - Colvin , et al. March 15, 2 | 2022-03-15 |
Hydrogen bleed gas for an ion source housing
Grant 11,062,873 - Colvin , et al. July 13, 2 | 2021-07-13 |
Hydrogen Generator For An Ion Implanter
App 20210090841 - Colvin; Neil K. ; et al. | 2021-03-25 |
System And Method For Extending A Lifetime Of An Ion Source For Molecular Carbon Implants
App 20200388468 - Sporleder; David ; et al. | 2020-12-10 |
Hydrogen generator for an ion implanter
Grant 10,847,339 - Colvin , et al. November 24, 2 | 2020-11-24 |
Lanthanated tungsten ion source and beamline components
Grant 10,535,498 - Colvin , et al. Ja | 2020-01-14 |
Hydrogen Bleed Gas For An Ion Source Housing
App 20190348252 - Colvin; Neil K. ; et al. | 2019-11-14 |
Hydrogen Generator For An Ion Implanter
App 20190228943 - Colvin; Neil K. ; et al. | 2019-07-25 |
Ion source repeller shield comprising a labyrinth seal
Grant 10,361,069 - Colvin , et al. | 2019-07-23 |
In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source
Grant 10,170,286 - Colvin , et al. J | 2019-01-01 |
Lanthanated Tungsten Ion Source And Beamline Componets
App 20180358202 - Colvin; Neil K. ; et al. | 2018-12-13 |
Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products
Grant 10,087,520 - Kamenitsa , et al. October 2, 2 | 2018-10-02 |
Implementation of co-gases for germanium and boron ion implants
Grant 9,984,855 - Colvin , et al. May 29, 2 | 2018-05-29 |
Ion source liner having a lip for ion implantation systems
Grant 9,978,555 - Colvin , et al. May 22, 2 | 2018-05-22 |
Ion source cathode shield
Grant 9,941,087 - Colvin , et al. April 10, 2 | 2018-04-10 |
In-situ Cleaning Using Hydrogen Peroxide As Co-gas To Primary Dopant Or Purge Gas For Minimizing Carbon Deposits In An Ion Source
App 20180096828 - Colvin; Neil K. ; et al. | 2018-04-05 |
Multi-piece electrode aperture
Grant 9,870,893 - Colvin , et al. January 16, 2 | 2018-01-16 |
Implantation Using Solid Aluminum Iodide (ali3) For Producing Atomic Aluminum Ions And In Situ Cleaning Of Aluminum Iodide And Associated By-products
App 20170362699 - Kamenitsa; Dennis Elliott ; et al. | 2017-12-21 |
Lanthanated Tungsten Ion Source And Beamline Components
App 20170330725 - COLVIN; NEIL K. ; et al. | 2017-11-16 |
Hydrogen COGas for carbon implant
Grant 9,805,912 - Colvin , et al. October 31, 2 | 2017-10-31 |
Ion Source Repeller Shield
App 20170287579 - Colvin; Neil K. ; et al. | 2017-10-05 |
Ion Source Cathode Shield
App 20170207054 - Colvin; Neil K. ; et al. | 2017-07-20 |
Multi-piece Electrode Aperture
App 20170207057 - Colvin; Neil K. ; et al. | 2017-07-20 |
Ion Source Liner Having A Lip For Ion Implantation Systems
App 20170133193 - Colvin; Neil K. ; et al. | 2017-05-11 |
Extraction electrode assembly voltage modulation in an ion implantation system
Grant 9,006,690 - Colvin , et al. April 14, 2 | 2015-04-14 |
Extraction Electrode Assembly Voltage Modulation In An Ion Implantation System
App 20140326901 - COLVIN; NEIL K. ; et al. | 2014-11-06 |
Flourine and HF Resistant Seals for an Ion Source
App 20140319994 - Colvin; Neil K. ; et al. | 2014-10-30 |
Automatic control system for selection and optimization of co-gas flow levels
Grant 8,779,395 - Colvin , et al. July 15, 2 | 2014-07-15 |
In-vacuum beam defining aperture cleaning for particle reduction
Grant 8,604,418 - Colvin , et al. December 10, 2 | 2013-12-10 |
Automatic Control System for Selection and Optimization of Co-Gas Flow Levels
App 20130140473 - Colvin; Neil K. ; et al. | 2013-06-06 |
Adjustable louvered plasma electron flood enclosure
Grant 8,242,469 - Colvin August 14, 2 | 2012-08-14 |
Implementation of CO-Gases for Germanium and Boron Ion Implants
App 20120119113 - Colvin; Neil K. ; et al. | 2012-05-17 |
Hydrogen COGas For Carbon Implant
App 20120118232 - Colvin; Neil K. ; et al. | 2012-05-17 |
In-Vacuum Beam Defining Aperture Cleaning for Particle Reduction
App 20110240889 - Colvin; Neil K. ; et al. | 2011-10-06 |
Adjustable Louvered Plasma Electron Flood Enclosure
App 20110012033 - Colvin; Neil K. | 2011-01-20 |
Sensor for ion implanter
Grant 7,683,348 - Lee , et al. March 23, 2 | 2010-03-23 |
Ion source arc chamber seal
Grant 7,655,930 - Huang , et al. February 2, 2 | 2010-02-02 |
Ion Source Arc Chamber Seal
App 20080230713 - Huang; Yongzhang ; et al. | 2008-09-25 |
Sensor for Ion Implanter
App 20080087846 - Lee; W. Davis ; et al. | 2008-04-17 |
| 