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Linear Electromagnetic Machine System
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Linear electromagnetic machine system with bearing housings having pressurized gas
Grant 10,985,641 - Lawler , et al. April 20, 2 | 2021-04-20 |
Integrated Linear Generator System
App 20200195093 - Svrcek; Matt ; et al. | 2020-06-18 |
Linear Electromagnetic Machine System
App 20200036273 - Lawler; John ; et al. | 2020-01-30 |
Mechanism for maintaining a clearance gap
Grant 10,215,229 - Svrcek , et al. Feb | 2019-02-26 |
Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same
Grant 9,529,353 - Yang , et al. December 27, 2 | 2016-12-27 |
Method for determining a commutation offset and for determining a compensation map for a stage
Grant 9,465,305 - Yang , et al. October 11, 2 | 2016-10-11 |
Method for determing a commutation offset and for determining a compensation map for a stage
Grant 9,013,134 - Yang , et al. April 21, 2 | 2015-04-21 |
Control systems and methods for compensating for effects of a stage motor
Grant 8,853,988 - Binnard , et al. October 7, 2 | 2014-10-07 |
Thermally conductive coil and methods and systems
Grant 8,847,721 - Cooper , et al. September 30, 2 | 2014-09-30 |
Mechanism For Maintaining A Clearance Gap
App 20140260951 - Svrcek; Matt ; et al. | 2014-09-18 |
Three Axis Linear Actuator
App 20140132087 - Coakley; Scott ; et al. | 2014-05-15 |
Compensating temperature effects in magnetic actuators
Grant 8,705,222 - Coakley , et al. April 22, 2 | 2014-04-22 |
Apparatus and methods for determining an initially unknown commutation position of a member moved by a planar motor
Grant 8,692,504 - Coakley , et al. April 8, 2 | 2014-04-08 |
Parallel Linkage and Actuator Motor Coil Designs for Tube Carrier
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Hybrid Cooling And Thermal Shield For Electromagnetic Actuators
App 20130164687 - Binnard; Michael B. ; et al. | 2013-06-27 |
C-core Actuator For Moving A Stage
App 20130135603 - Binnard; Michael ; et al. | 2013-05-30 |
Three axis linear actuator
Grant 8,432,072 - Coakley , et al. April 30, 2 | 2013-04-30 |
Method For Determing A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120127447 - Yang; Pai-Hsueh ; et al. | 2012-05-24 |
Method For Determining A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120113405 - Yang; Pai-Hsueh ; et al. | 2012-05-10 |
Apparatus And Methods For Determining An Initially Unknown Commutation Position Of A Member Moved By A Planar Motor
App 20120074890 - Coakley; Scott ; et al. | 2012-03-29 |
Methods For Limiting Counter-mass Trim-motor Force And Stage Assemblies Incorporating Same
App 20120069316 - Yang; Pai-Hsueh ; et al. | 2012-03-22 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
Grant 8,140,288 - Yang , et al. March 20, 2 | 2012-03-20 |
Microchannel-cooled Coils Of Electromagnetic Actuators Exhibiting Reduced Eddy-current Drag
App 20120062866 - Binnard; Michael B. ; et al. | 2012-03-15 |
Thermally Conductive Coil and Methods and Systems
App 20110109419 - Cooper; Alexander ; et al. | 2011-05-12 |
Compensating Temperature Effects in Magnetic Actuators
App 20100284119 - Coakley; Scott ; et al. | 2010-11-11 |
Control Systems and Methods for Compensating for Effects of a Stage Motor
App 20100237819 - Binnard; Michael B. ; et al. | 2010-09-23 |
Three Degree Of Movement Mover And Method For Controlling A Three Degree Of Movement Mover
App 20100167556 - Totsu; Masahiro ; et al. | 2010-07-01 |
Shield Layer Plus Refrigerated Backside Cooling For Planar Motors
App 20100156198 - Cooper; Alexander ; et al. | 2010-06-24 |
Three Axis Linear Actuator
App 20090263747 - Coakley; Scott ; et al. | 2009-10-22 |
Lithography apparatus with flexibly supported optical system
App 20090033895 - Binnard; Michael B. ; et al. | 2009-02-05 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
App 20080275661 - Yang; Pai-Hsueh ; et al. | 2008-11-06 |
Identifying and compensating force-ripple and side-forces produced by linear actuators
App 20080067968 - Binnard; Michael B. ; et al. | 2008-03-20 |
Hexapod kinematic mountings for optical elements, and optical systems comprising same
App 20070284502 - Hsin; Yi-Ping ; et al. | 2007-12-13 |
Six Degree-of-Freedom Stage Apparatus
App 20070267995 - Binnard; Michael B. ; et al. | 2007-11-22 |
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