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Patent applications and USPTO patent grants for CLEAN FACTOMATION, INC..The latest application filed is for "wafer purging-type shelf assembly and buffer module having the same".
Patent | Date |
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Wafer purging-type shelf assembly and buffer module having the same Grant 11,380,567 - Yoon , et al. July 5, 2 | 2022-07-05 |
Equipment front end module Grant 10,796,937 - Yoon , et al. October 6, 2 | 2020-10-06 |
Equipment Front End Module App 20200105561 - YOON; June Phil ;   et al. | 2020-04-02 |
Wafer Purging-type Shelf Assembly And Buffer Module Having The Same App 20200105562 - YOON; June Phil ;   et al. | 2020-04-02 |
Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same Grant 9,550,219 - Lee , et al. January 24, 2 | 2017-01-24 |
Apparatus Of Inhalation Type For Stocking Wafer At Ceiling And Inhaling Type Wafer Stocking System Having The Same App 20160184873 - Lee; Ho Geun ;   et al. | 2016-06-30 |
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