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Patent applications and USPTO patent grants for Claessens; Bert Jan.The latest application filed is for "illumination system and lithographic apparatus".
Patent | Date |
---|---|
Illumination system and lithographic apparatus Grant 8,885,144 - Claessens , et al. November 11, 2 | 2014-11-11 |
Homogenizer Grant 8,508,716 - Claessens , et al. August 13, 2 | 2013-08-13 |
Lithographic apparatus and monitoring method Grant 8,432,529 - Claessens , et al. April 30, 2 | 2013-04-30 |
Illumination System And Lithographic Apparatus App 20110310372 - CLAESSENS; Bert Jan ;   et al. | 2011-12-22 |
Homogenizer App 20110122385 - CLAESSENS; Bert Jan ;   et al. | 2011-05-26 |
Lithographic Apparatus And Monitoring Method App 20110026001 - CLAESSENS; Bert Jan ;   et al. | 2011-02-03 |
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