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E-beam inspection apparatus and method of using the same on various integrated circuit chips Grant 9,793,090 - De , et al. October 17, 2 | 2017-10-17 |
E-beam inspection apparatus and method of using the same on various integrated circuit chips Grant 9,496,119 - De , et al. November 15, 2 | 2016-11-15 |
E-beam Inspection Apparatus And Method Of Using The Same On Various Integrated Circuit Chips App 20160118217 - De; Indranil ;   et al. | 2016-04-28 |
Opportunistic Placement Of Ic Test Strucutres And/or E-beam Target Pads In Areas Otherwise Used For Filler Cells, Tap Cells, Decap Cells, Scribe Lines, And/or Dummy Fill, As Well As Product Ic Chips Containing Same App 20150270181 - De; Indranil ;   et al. | 2015-09-24 |
System and method for product yield prediction Grant 7,673,262 - Stine , et al. March 2, 2 | 2010-03-02 |
System And Method For Product Yield Prediction App 20080282210 - Stine; Brian E. ;   et al. | 2008-11-13 |
Back end of line clone test vehicle Grant 7,395,518 - Ciplickas , et al. July 1, 2 | 2008-07-01 |
System and method for product yield prediction Grant 7,373,625 - Stine , et al. May 13, 2 | 2008-05-13 |
System and method for product yield prediction Grant 7,356,800 - Stine , et al. April 8, 2 | 2008-04-08 |
Test structures and models for estimating the yield impact of dishing and/or voids Grant 7,348,594 - Ciplickas , et al. March 25, 2 | 2008-03-25 |
System and method for product yield prediction App 20070118242 - Stine; Brian E. ;   et al. | 2007-05-24 |
Test structures for estimating dishing and erosion effects in copper damascene technology Grant 7,197,726 - Ciplickas , et al. March 27, 2 | 2007-03-27 |
System and method for product yield prediction Grant 7,174,521 - Stine , et al. February 6, 2 | 2007-02-06 |
Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure Grant 7,154,115 - Stine , et al. December 26, 2 | 2006-12-26 |
System and method for product yield prediction App 20060277506 - Stine; Brian E. ;   et al. | 2006-12-07 |
Extraction method of defect density and size distributions Grant 7,024,642 - Hess , et al. April 4, 2 | 2006-04-04 |
System and method for product yield prediction App 20050158888 - Stine, Brian E. ;   et al. | 2005-07-21 |
System and method for product yield prediction Grant 6,901,564 - Stine , et al. May 31, 2 | 2005-05-31 |
Back end of line clone test vehicle App 20050086617 - Ciplickas, Dennis J. ;   et al. | 2005-04-21 |
Test structures and models for estimating the yield impact of dishing and/or voids App 20050074908 - Ciplickas, Dennis J. ;   et al. | 2005-04-07 |
System and method for product yield prediction using a logic characterization vehicle Grant 6,834,375 - Stine , et al. December 21, 2 | 2004-12-21 |
Test structures for estimating dishing and erosion effects in copper damascene technology App 20040232910 - Ciplickas, Dennis J ;   et al. | 2004-11-25 |
Extraction method of defect density and size distributions App 20040094762 - Hess, Christopher ;   et al. | 2004-05-20 |
System and method for product yield prediction App 20030145292 - Stine, Brian E. ;   et al. | 2003-07-31 |