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Workpiece Processing Apparatus with Thermal Processing Systems
App 20220187021 - Sohn; Manuel ; et al. | 2022-06-16 |
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
App 20220189747 - Desai; Dixit ; et al. | 2022-06-16 |
Arc Lamp With Forming Gas For Thermal Processing Systems
App 20220165561 - Yang; Michael X. ; et al. | 2022-05-26 |
Gas flow control for millisecond anneal system
Grant 11,255,606 - Pfahler , et al. February 22, 2 | 2022-02-22 |
Nitrogen Injection for ARC Lamps
App 20210307115 - Bremensdorfer; Rolf ; et al. | 2021-09-30 |
Control System For Adaptive Control Of A Thermal Processing System
App 20210132592 - Yang; Michael X. ; et al. | 2021-05-06 |
Nitrogen injection for ARC lamps
Grant 10,966,286 - Bremensdorfer , et al. March 30, 2 | 2021-03-30 |
Substrate Support in a Millisecond Anneal System
App 20200357671 - Cibere; Joseph | 2020-11-12 |
Substrate support in a millisecond anneal system
Grant 10,734,262 - Cibere | 2020-08-04 |
Substrate breakage detection in a thermal processing system
Grant 10,388,552 - Cibere A | 2019-08-20 |
Substrate Breakage Detection in a Thermal Processing System
App 20190221462 - Cibere; Joseph | 2019-07-18 |
Substrate breakage detection in a thermal processing system
Grant 10,242,894 - Cibere | 2019-03-26 |
Substrate Breakage Detection in a Thermal Processing System
App 20180190523 - Cibere; Joseph | 2018-07-05 |
Substrate breakage detection in a thermal processing system
Grant 9,941,144 - Cibere April 10, 2 | 2018-04-10 |
Substrate Support in a Millisecond Anneal System
App 20170194178 - Cibere; Joseph | 2017-07-06 |
Gas Flow Control for Millisecond Anneal System
App 20170191759 - Pfahler; Christian ; et al. | 2017-07-06 |
Substrate Breakage Detection in a Thermal Processing System
App 20170194177 - Cibere; Joseph | 2017-07-06 |
Nitrogen Injection for ARC Lamps
App 20170196046 - Bremensdorfer; Rolf ; et al. | 2017-07-06 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece
Grant 9,627,244 - Camm , et al. April 18, 2 | 2017-04-18 |
Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed
Grant 9,279,727 - Cibere , et al. March 8, 2 | 2016-03-08 |
Workpiece breakage prevention method and apparatus
Grant 9,070,590 - Camm , et al. June 30, 2 | 2015-06-30 |
Methods, Apparatus And Media For Determining A Shape Of An Irradiance Pulse To Which A Workpiece Is To Be Exposed
App 20130306871 - Cibere; Joseph ; et al. | 2013-11-21 |
Systems and methods for supporting a workpiece during heat-treating
Grant 8,454,356 - Camm , et al. June 4, 2 | 2013-06-04 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece
Grant 8,434,341 - Camm , et al. May 7, 2 | 2013-05-07 |
Methods And Systems For Supporting A Workpiece And For Heat-treating The Workpiece
App 20120118867 - Camm; David Malcolm ; et al. | 2012-05-17 |
Workpiece Breakage Prevention Method And Apparatus
App 20110177624 - Camm; David Malcolm ; et al. | 2011-07-21 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece
Grant 7,501,607 - Camm , et al. March 10, 2 | 2009-03-10 |
Systems And Methods For Supporting A Workpiece During Heat-treating
App 20080157452 - Camm; David Malcolm ; et al. | 2008-07-03 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece
App 20050133167 - Camm, David Malcolm ; et al. | 2005-06-23 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece
App 20040178553 - Camm, David Malcolm ; et al. | 2004-09-16 |
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