Chung; Sung Il
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chung; Sung Il.The latest application filed is for "cylindrical magnetic levitation stage and lithography".
- Chung; Sung Il - Gyeongsangnam-do N/A KR
- Chung; Sung Il - Pohang-si N/A KR
- Chung; Sung Il - Gyeongbuk KR
| Patent | Date |
|---|---|
| Plasma immersion ion milling apparatus and method Grant 9,190,239 - Chung , et al. November 17, 2 | 2015-11-17 |
| Cylindrical magnetic levitation stage and lithography Grant 8,964,167 - Jeon , et al. February 24, 2 | 2015-02-24 |
| Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface Grant 8,591,711 - Chung , et al. November 26, 2 | 2013-11-26 |
| Cylindrical Magnetic Levitation Stage And Lithography App 20130120732 - Jeon; Jeong Woo ; et al. | 2013-05-16 |
| Cylindrical magnetic levitation stage Grant 8,354,908 - Jeon , et al. January 15, 2 | 2013-01-15 |
| Plasma Immersion Ion Milling Apparatus And Method App 20120222952 - Chung; Sung Il ; et al. | 2012-09-06 |
| Method and Chamber for Inductively Coupled Plasma Processing for Cylinderical Material With Three-Dimensional Surface App 20110253674 - Chung; Sung Il ; et al. | 2011-10-20 |
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