Patent | Date |
---|
Vertical memory device Grant 10,749,042 - Kim , et al. A | 2020-08-18 |
Vertical Memory Device App 20190259881 - Kim; Hyuk ;   et al. | 2019-08-22 |
Vertical memory device Grant 10,319,864 - Kim , et al. | 2019-06-11 |
Vertical Memory Device App 20180374961 - KIM; Hyuk ;   et al. | 2018-12-27 |
Semiconductor chips and methods of manufacturing the same Grant 9,978,756 - Kim , et al. May 22, 2 | 2018-05-22 |
Vertical memory devices and methods of manufacturing the same Grant 9,865,540 - Kim , et al. January 9, 2 | 2018-01-09 |
Semiconductor Chips And Methods Of Manufacturing The Same App 20170330887 - Kim; Hyuk ;   et al. | 2017-11-16 |
Semiconductor devices Grant 9,806,204 - Ahn , et al. October 31, 2 | 2017-10-31 |
Vertical Memory Devices And Methods Of Manufacturing The Same App 20170117222 - KIM; Hyuk ;   et al. | 2017-04-27 |
Non-volatile memory device and method of manufacturing the same Grant 9,502,427 - Shin , et al. November 22, 2 | 2016-11-22 |
Non-volatile Memory Device And Method Of Manufacturing The Same App 20160260726 - SHIN; Jae-Jin ;   et al. | 2016-09-08 |
Semiconductor Devices App 20150054054 - AHN; Sung-Soo ;   et al. | 2015-02-26 |
Semiconductor devices and methods of manufacturing the semiconductor devices Grant 8,883,588 - Ahn , et al. November 11, 2 | 2014-11-11 |
Method of fabricating semiconductor device Grant 8,765,572 - Choi , et al. July 1, 2 | 2014-07-01 |
Semiconductor device and method of double photolithography process for forming patterns of the semiconductor device Grant 8,541,306 - Yang , et al. September 24, 2 | 2013-09-24 |
Semiconductor Devices And Methods Of Manufacturing The Semiconductor Devices App 20130134496 - AHN; Sung-Soo ;   et al. | 2013-05-30 |
Semiconductor device having fine pattern wiring lines integrally formed with contact plug and method of manufacturing same Grant 8,361,904 - Lee , et al. January 29, 2 | 2013-01-29 |
Integrated circuit devices including a multi-layer structure with a contact extending therethrough Grant 8,258,610 - Cho , et al. September 4, 2 | 2012-09-04 |
Semiconductor Device And Method Of Double Photolithography Process For Forming Patterns Of The Semiconductor Device App 20120049377 - Yang; Song-Yi ;   et al. | 2012-03-01 |
Method Of Fabricating Semiconductor Device App 20110318914 - Choi; Yong-lack ;   et al. | 2011-12-29 |
Integrated Circuit Devices Including A Multi-layer Structure With A Contact Extending Therethrough App 20110127595 - Cho; Hong ;   et al. | 2011-06-02 |
Semiconductor Device Having Fine Pattern Wiring Lines Integrally Formed With Contact Plug And Method Of Manufacturing Same App 20110081778 - LEE; Dong-seok ;   et al. | 2011-04-07 |
Methods of forming integrated circuit devices including a multi-layer structure with a contact extending therethrough Grant 7,897,512 - Cho , et al. March 1, 2 | 2011-03-01 |
Phase change memory cell and method and system for forming the same Grant 7,776,644 - Cho , et al. August 17, 2 | 2010-08-17 |
Method of patterning a matrix into a substrate via multiple, line-and-space, sacrificial, hard mask layers Grant 7,618,899 - Chung , et al. November 17, 2 | 2009-11-17 |
Method of manufacturing a carbon nano-tube transistor Grant 7,585,718 - Cho , et al. September 8, 2 | 2009-09-08 |
Method of manufacturing nonvolatile semiconductor memory device Grant 7,560,386 - Cha , et al. July 14, 2 | 2009-07-14 |
Methods of fabricating a semiconductor device Grant 7,540,970 - Koh , et al. June 2, 2 | 2009-06-02 |
Methods of fabricating nonvolatile memory devices Grant 7,510,934 - Chung , et al. March 31, 2 | 2009-03-31 |
Method of removing oxide layer and semiconductor manufacturing apparatus for removing oxide layer Grant 7,488,688 - Chung , et al. February 10, 2 | 2009-02-10 |
Integrated Circuit Devices Including A Multi-layer Structure With A Contact Extending Therethrough And Methods Of Forming The Same App 20090026526 - Cho; Hong ;   et al. | 2009-01-29 |
Nonvolatile Memory Device And Method Of Fabricating The Same App 20090008701 - KIM; Dong-Hyun ;   et al. | 2009-01-08 |
Method of manufacturing a semiconductor memory device Grant 7,402,488 - Cho , et al. July 22, 2 | 2008-07-22 |
Method Of Manufacturing A Transistor App 20080138991 - Cho; Hong ;   et al. | 2008-06-12 |
Method of fabricating flash memory device including control gate extensions Grant 7,384,843 - Kim , et al. June 10, 2 | 2008-06-10 |
Method of forming a fine pattern App 20080076071 - Lim; Seok-Hyun ;   et al. | 2008-03-27 |
Method Of Fabricating A Semiconductor Integrated Circuit Device App 20080057733 - CHUNG; Seung-Pil ;   et al. | 2008-03-06 |
Semiconductor Device Having Fine Pattern Wiring Lines Integrally Formed With Contact Plug And Method Of Manufacturing Same App 20080048340 - LEE; Dong-seok ;   et al. | 2008-02-28 |
Phase change memory cell and method and system for forming the same App 20080026586 - Cho; Hong ;   et al. | 2008-01-31 |
Method of fabricating a flash memory device Grant 7,303,957 - Chi , et al. December 4, 2 | 2007-12-04 |
Methods of fabricating nonvolatile memory devices App 20070231989 - Chung; Seung-Pil ;   et al. | 2007-10-04 |
Method of manufacturing nonvolatile semiconductor memory device App 20070218619 - Cha; Ji-hoon ;   et al. | 2007-09-20 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage Grant 7,258,811 - Chu , et al. August 21, 2 | 2007-08-21 |
Nonvolatile memory devices Grant 7,242,054 - Chung , et al. July 10, 2 | 2007-07-10 |
Method of fabricating a flash memory device App 20070059876 - Chi; Kyeong-koo ;   et al. | 2007-03-15 |
Methods of fabricating a semiconductor device App 20070020565 - Koh; Cha-Won ;   et al. | 2007-01-25 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same App 20060284277 - Chung; Seung-pil ;   et al. | 2006-12-21 |
Semiconductor etching apparatus and method of etching semiconductor devices using same App 20060205190 - Chi; Kyeong-koo ;   et al. | 2006-09-14 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same Grant 7,098,135 - Chung , et al. August 29, 2 | 2006-08-29 |
Method of fabricating flash memory device including control gate extensions App 20060128099 - Kim; Dong-Chan ;   et al. | 2006-06-15 |
Nonvolatile memory devices and methods of fabricating the same App 20060027856 - Chung; Seung-Pil ;   et al. | 2006-02-09 |
Method of manufacturing a semiconductor memory device App 20050287738 - Cho, Sung-il ;   et al. | 2005-12-29 |
Method of removing oxide layer and semiconductor manufacturing apparatus for removing oxide layer App 20050087893 - Chung, Seung-pil ;   et al. | 2005-04-28 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage App 20040223286 - Chu, Chang-woong ;   et al. | 2004-11-11 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage Grant 6,793,767 - Chu , et al. September 21, 2 | 2004-09-21 |
Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module Grant 6,767,834 - Chung , et al. July 27, 2 | 2004-07-27 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same App 20040137743 - Chung, Seung-Pil ;   et al. | 2004-07-15 |
Semiconductor etching apparatus and method of etching semiconductor devices using same App 20030116277 - Chi, Kyeong-Koo ;   et al. | 2003-06-26 |
Method of manufacturing a semiconductor device having contact pads Grant 6,562,651 - Chung , et al. May 13, 2 | 2003-05-13 |
Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system Grant 6,534,921 - Seo , et al. March 18, 2 | 2003-03-18 |
Method of removing contaminants from integrated circuit substrates using cleaning solutions Grant 6,513,538 - Chung , et al. February 4, 2 | 2003-02-04 |
Method of manufacturing a semiconductor device having contact pads App 20020090837 - Chung, Seung-Pil ;   et al. | 2002-07-11 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage App 20020078891 - Chu, Chang-Woong ;   et al. | 2002-06-27 |
Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module App 20020064944 - Chung, Seung-pil ;   et al. | 2002-05-30 |
Method of removing contaminants from integrated circuit substrates using cleaning solutions App 20020028585 - Chung, Seung-Pil ;   et al. | 2002-03-07 |
Semiconductor etching apparatus and method of etching semiconductor devices using same App 20020025681 - Chi, Kyeong-Koo ;   et al. | 2002-02-28 |
Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process App 20010021565 - Chung, Seung-pil ;   et al. | 2001-09-13 |