CHUNG; Seng-Hyun
Patent Applications and Registrations
Patent applications and USPTO patent grants for CHUNG; Seng-Hyun.The latest application filed is for "plasma processing method and substrate processing apparatus".
- CHUNG; Seng-Hyun - Hwaseong-si KR
- Chung; Seng Hyun - Gyeonggi-do N/A KR
- CHUNG; Seng-hyun - Suwon-si Gyeonggi-do
| Patent | Date |
|---|---|
| Plasma Processing Method And Substrate Processing Apparatus App 20140370715 - CHUNG; Seng-Hyun ; et al. | 2014-12-18 |
| Apparatus for plasma processing and method for plasma processing Grant 8,888,950 - Lee , et al. November 18, 2 | 2014-11-18 |
| Apparatus For Plasma Processing And Method For Plasma Processing App 20100059478 - Lee; Kyung Ho ; et al. | 2010-03-11 |
| Embossing Chuck Enabling Wafer To Be Easily Detached Therefrom App 20070109714 - CHUNG; Seng-hyun | 2007-05-17 |
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