| Patent | Date |
|---|
Methods of forming integrated circuit capacitors having composite dielectric layers therein containing crystallization inhibiting regions
Grant 9,059,330 - Choi , et al. June 16, 2 | 2015-06-16 |
Method of forming semiconductor device having a capacitor
Grant 8,481,398 - Chung , et al. July 9, 2 | 2013-07-09 |
Methods Of Forming Integrated Circuit Capacitors Having Composite Dielectric Layers Therein Containing Crystallization Inhibiting Regions
App 20130130465 - Choi; Jae-hyoung ; et al. | 2013-05-23 |
Integrated circuit capacitors having composite dielectric layers therein containing crystallization inhibiting regions and methods of forming same
Grant 8,344,439 - Choi , et al. January 1, 2 | 2013-01-01 |
Integrated Circuit Capacitors Having Composite Dielectric Layers Therein Containing Crystallization Inhibiting Regions and Methods of Forming Same
App 20110278698 - Choi; Jay-hyoung ; et al. | 2011-11-17 |
Capacitors having composite dielectric layers containing crystallization inhibiting regions
Grant 7,973,352 - Choi , et al. July 5, 2 | 2011-07-05 |
Method Of Forming Semiconductor Device Having A Capacitor
App 20100240191 - Chung; Seung-Sik ; et al. | 2010-09-23 |
Semiconductor devices having a contact plug and fabrication methods thereof
Grant 7,781,819 - Kim , et al. August 24, 2 | 2010-08-24 |
Methods of Forming Strontium Ruthenate Thin Films and Methods of Manufacturing Capacitors Including the Same
App 20100209595 - Kwon; Oh-Seong ; et al. | 2010-08-19 |
Integrated Circuit Capacitors Having Composite Dielectric Layers Therein Containing Crystallization Inhibiting Regions and Methods of Forming Same
App 20100187655 - Choi; Jae-hyoung ; et al. | 2010-07-29 |
Integrated circuit capacitors having composite dielectric layers therein containing crystallization inhibiting regions
Grant 7,723,770 - Choi , et al. May 25, 2 | 2010-05-25 |
Metal-insulator-metal Capacitors With A Chemical Barrier Layer In A Lower Electrode
App 20100117194 - Chung; Eun-ae ; et al. | 2010-05-13 |
Methods of forming integrated circuit electrodes and capacitors by wrinkling a layer that includes a high percentage of impurities
Grant 7,700,454 - Kim , et al. April 20, 2 | 2010-04-20 |
Methods of fabricating metal-insulator-metal capacitors with a chemical barrier layer in a lower electrode
Grant 7,655,519 - Chung , et al. February 2, 2 | 2010-02-02 |
Dielectric Structure
App 20090130457 - Kim; Wan-Don ; et al. | 2009-05-21 |
Semiconductor Devices Having A Contact Plug And Fabrication Methods Thereof
App 20090072350 - Kim; Wan-don ; et al. | 2009-03-19 |
Semiconductor device and method of manufacturing the same
App 20090072349 - Tak; Yong-Suk ; et al. | 2009-03-19 |
Integrated circuit devices having pad contact plugs in the cell array and peripheral circuit regions of the integrated circuit substrate
Grant 7,495,292 - Oh , et al. February 24, 2 | 2009-02-24 |
Capacitor, method of forming the same, semiconductor device having the capacitor and method of manufacturing the same
Grant 7,482,242 - Park , et al. January 27, 2 | 2009-01-27 |
Methods and batch type atomic layer deposition apparatus for forming dielectric films and methods of manufacturing metal-insulator-metal capacitors including the dielectric films
Grant 7,442,604 - Choi , et al. October 28, 2 | 2008-10-28 |
Method of manufacturing a dielectric film in a capacitor
Grant 7,425,761 - Choi , et al. September 16, 2 | 2008-09-16 |
Semiconductor device capacitors with oxide-nitride layers and methods of fabricating such capacitors
Grant 7,422,943 - Lee , et al. September 9, 2 | 2008-09-09 |
Storage Capacitors For Semiconductor Devices
App 20080185624 - Kim; Rak-Hwan ; et al. | 2008-08-07 |
Methods of forming storage capacitors for semiconductor devices
Grant 7,364,967 - Kim , et al. April 29, 2 | 2008-04-29 |
Metal-insulator-metal capacitors including transition metal silicide films on doped polysilicon contact plugs
Grant 7,304,367 - Choi , et al. December 4, 2 | 2007-12-04 |
Capacitors and methods of fabricating the same
App 20070236863 - Lee; Jong-cheol ; et al. | 2007-10-11 |
Integrated circuit devices having pad contact plugs in the cell array and peripheral circuit regions of the integrated circuit substrate
App 20070145485 - Oh; Se-Hoon ; et al. | 2007-06-28 |
Method of manufacturing a dielectric film in a capacitor
App 20070099379 - Choi; Jae-hyoung ; et al. | 2007-05-03 |
Methods of forming integrated circuits devices having pad contact plugs in the cell array and peripheral circuit regions of the integrated circuit substrate
Grant 7,205,219 - Oh , et al. April 17, 2 | 2007-04-17 |
Capacitor, method of forming the same, semiconductor device having the capacitor and method of manufacturing the same
App 20070066015 - Park; Hong-Bum ; et al. | 2007-03-22 |
Semiconductor device capacitors with oxide-nitride layers and methods of fabricating such capacitors
App 20070040203 - Lee; Jong-cheol ; et al. | 2007-02-22 |
Methods of forming a semiconductor device including a metal silicide layer between a conductive plug and a bottom electrode of a capacitor
Grant 7,179,739 - Choi , et al. February 20, 2 | 2007-02-20 |
Method Of Fabricating Metal-insulator-metal Capacitor
App 20070026625 - CHUNG; Jung-Hee ; et al. | 2007-02-01 |
Methods Of Forming Integrated Circuit Electrodes And Capacitors By Wrinkling A Layer That Includes A High Percentage Of Impurities
App 20060263977 - Kim; Wan-don ; et al. | 2006-11-23 |
Methods and batch type atomic layer deposition apparatus for forming dielectric films and methods of manufacturing metal-insulator-metal capacitors including the dielectric films
App 20060216947 - Choi; Jae-Hyoung ; et al. | 2006-09-28 |
Method of forming a thin layer and method of manufacturing a flash memory device and a capacitor using the same
App 20060172484 - Chung; Suk-Jin ; et al. | 2006-08-03 |
Methods for forming ruthenium films with beta-diketone containing ruthenium complexes and method for manufacturing metal-insulator-metal capacitor using the same
App 20060148193 - Lee; Kwang-hee ; et al. | 2006-07-06 |
Metal-insulator-metal capacitors with a chemical barrier layer in a lower electrode and methods of fabricating the same
App 20060113578 - Chung; Eun-ae ; et al. | 2006-06-01 |
Methods for forming ruthenium films with .beta.-diketone containing ruthenium complexes and method for manufacturing metal-insulator-metal capacitor using the same
Grant 7,049,232 - Lee , et al. May 23, 2 | 2006-05-23 |
Storage capacitors for semiconductor devices and methods of forming the same
App 20060099760 - Kim; Rak-Hwan ; et al. | 2006-05-11 |
Method of manufacturing capacitor by performing multi-stepped wet treatment on surface of electrode
Grant 7,008,837 - Won , et al. March 7, 2 | 2006-03-07 |
Integrated circuit capacitors having composite dielectric layers therein containing crystallization inhibiting regions and methods of forming same
App 20060046380 - Choi; Jae-hyoung ; et al. | 2006-03-02 |
Methods of fabricating MIM capacitor employing metal nitride layer as lower electrode
App 20060046378 - Choi; Jae-Hyoung ; et al. | 2006-03-02 |
Methods of forming MIM type capacitor structures using low temperature plasma processing
Grant 6,995,071 - Oh , et al. February 7, 2 | 2006-02-07 |
Integrated circuit devices having barrier layers between upper electrodes and dielectric layers and methods of fabricating the same
App 20050059206 - Chung, Jung-hee ; et al. | 2005-03-17 |
Metal-insulator-metal capacitors including transition metal silicide films on doped polysilicon contact plugs and methods of forming the same
App 20050023640 - Choi, Jae-hyoung ; et al. | 2005-02-03 |
Methods of forming capacitors including reducing exposed electrodes in semiconductor devices
Grant 6,849,517 - Chung , et al. February 1, 2 | 2005-02-01 |
Methods of forming a semiconductor device including a metal silicide layer between a conductive plug and a bottom electrode of a capacitor
App 20050020066 - Choi, Jeong-Sik ; et al. | 2005-01-27 |
Methods of forming MIM type capacitor structures using low temperature plasma processing
App 20040248361 - Oh, Se-hoon ; et al. | 2004-12-09 |
Integrated circuit devices having pad contact plugs in the cell array and peripheral circuit regions of the integrated circuit substrate and methods of forming the same
App 20040219744 - Oh, Se-Hoon ; et al. | 2004-11-04 |
Method of manufacturing capacitor by performing multi-stepped wet treatment on surface of electrode
App 20040171212 - Won, Seok-jun ; et al. | 2004-09-02 |
Methods for forming ruthenium films with beta-diketone containing ruthenium complexes and method for manufacturing metal-insulator-metal capacitor using the same
App 20040166671 - Lee, Kwang-hee ; et al. | 2004-08-26 |
Methods of forming capacitors including reducing exposed electrodes in semiconductor devices
App 20040018678 - Chung, Jung-Hee ; et al. | 2004-01-29 |
| 