Chung; Feng-Chi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chung; Feng-Chi.The latest application filed is for "virtual metrology system and method".

Company Profile

4.3.7

Chung; Feng-Chi - Miaoli County TW
Chung; Feng-Chi - Zhunan Township TW
Chung; Feng-Chi - Hsinchu County TW
Chung, Feng-Chi - Miao-Li KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Virtual metrology system and method Grant 10,935,969 - Chung , et al. March 2, 2	2021-03-02
Method of monitoring processing system for processing substrate Grant 10,606,253 - Shih , et al.	2020-03-31
Virtual Metrology System And Method App 20190187674 - Chung; Feng-Chi ; et al.	2019-06-20
Virtual metrology system and method Grant 10,261,504 - Chung , et al.	2019-04-16
Method Of Monitoring Processing System For Processing Substrate App 20180224817 - Shih; Lian-Hua ; et al.	2018-08-09
Method of virtual metrology using combined models App 20160274570 - Shih; Lian-Hua ; et al.	2016-09-22
Virtual Metrology System And Method App 20160041548 - Chung; Feng-Chi ; et al.	2016-02-11
Method of fault detection and classification (FDC) for improved tool control capabilities App 20160031056 - Chung; Feng-Chi ; et al.	2016-02-04
System and method for status settings of semiconductor equipment with multi chambers App 20020095754 - Yao, Jack ; et al.	2002-07-25
System and method for status settings of semiconductor equipment with multi chambers App 20020098600 - Yao, Jack ; et al.	2002-07-25

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