Patent | Date |
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Apparatus and method for detecting damage to tool in machine Grant 9,760,083 - Chung , et al. September 12, 2 | 2017-09-12 |
Apparatus and method for managing machine tool information for heterogeneous numerical control devices Grant 9,684,299 - Chung , et al. June 20, 2 | 2017-06-20 |
Tool path part program modification system of NC machine tool Grant 9,507,340 - Chung , et al. November 29, 2 | 2016-11-29 |
Method of fabricating semiconductor device Grant 8,962,455 - Choi , et al. February 24, 2 | 2015-02-24 |
Apparatus And Method For Managing Machine Tool Information For Heterogeneous Numerical Control Devices App 20140371898 - Chung; Dae Hyuk ;   et al. | 2014-12-18 |
Memory device Grant 8,723,297 - Son , et al. May 13, 2 | 2014-05-13 |
Method Of Fabricating Semiconductor Device App 20130341710 - CHOI; Sang-Hyun ;   et al. | 2013-12-26 |
Apparatus and method for removing a photoresist structure from a substrate Grant 8,551,288 - Kim , et al. October 8, 2 | 2013-10-08 |
Tool Path Part Program Modification System Of Nc Machine Tool App 20130253694 - Chung; Dae Hyuk ;   et al. | 2013-09-26 |
Apparatus And Method For Detecting Damage To Tool In Machine App 20130253670 - Chung; Dae Hyuk ;   et al. | 2013-09-26 |
Memory Device App 20120025283 - Son; Yoon-Ho ;   et al. | 2012-02-02 |
Slurry composition for a chemical mechanical polishing process and method of manufacturing a semiconductor device using the slurry composition App 20100301263 - Seong; Choong-Kee ;   et al. | 2010-12-02 |
Slurry composition for a chemical mechanical polishing process and method of manufacturing a semiconductor device using the slurry composition Grant 7,799,687 - Seong , et al. September 21, 2 | 2010-09-21 |
Wiring structure of a semiconductor device and method of forming the same Grant 7,573,132 - Chung , et al. August 11, 2 | 2009-08-11 |
Method of treating and removing a photoresist pattern and method of manufacturing a semiconductor device using the same Grant 7,527,921 - Chung , et al. May 5, 2 | 2009-05-05 |
Method of Non-Linear Process Planning and Internet-Based Step-Nc System Using the Same App 20080281463 - Suh; Suk hwan ;   et al. | 2008-11-13 |
Apparatus and method for removing a photoresist structure from a substrate App 20080264566 - Kim; In-Gi ;   et al. | 2008-10-30 |
Apparatus and method for removing a photoresist structure from a substrate Grant 7,405,164 - Kim , et al. July 29, 2 | 2008-07-29 |
Apparatus and method of etching a semiconductor substrate App 20080096393 - Kim; In-Gi ;   et al. | 2008-04-24 |
Slurry composition for a chemical mechanical polishing process and method of manufacturing a semiconductor device using the slurry composition App 20080085602 - Seong; Choong-Kee ;   et al. | 2008-04-10 |
Wiring structure of a semiconductor device and method of forming the same App 20070020975 - Chung; Dae-Hyuk ;   et al. | 2007-01-25 |
Apparatus and method for removing a photoresist structure from a substrate App 20070020943 - Kim; In-Gi ;   et al. | 2007-01-25 |
Method of treating and removing a photoresist pattern and method of manufacturing a semiconductor device using the same App 20060292491 - Chung; Dae-Hyuk ;   et al. | 2006-12-28 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same Grant 6,946,431 - Yeo , et al. September 20, 2 | 2005-09-20 |
Cleaning solution and method of cleaning a semiconductor device using the same App 20050139233 - Lee, Kwang-Wook ;   et al. | 2005-06-30 |
Cleaning solution and method of cleaning a semiconductor device using the same Grant 6,875,706 - Lee , et al. April 5, 2 | 2005-04-05 |
Method of cleaning a substrate App 20040163668 - Chung, Dae-Hyuk ;   et al. | 2004-08-26 |
Cleaning solution and method of cleaning a semiconductor device using the same App 20040115909 - Lee, Kwang-Wook ;   et al. | 2004-06-17 |
Methods of manufacturing semiconductor devices having chamfered silicide layers therein Grant 6,740,550 - Choi , et al. May 25, 2 | 2004-05-25 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integratedd circuit devices using the same App 20040097389 - Yeo, In-Joon ;   et al. | 2004-05-20 |
Method of forming a self-aligned contact pad for use in a semiconductor device Grant 6,706,633 - Chung , et al. March 16, 2 | 2004-03-16 |
Semiconductor device having chamfered silicide layer and method for manufacturing the same App 20020175381 - Choi, Chang-won ;   et al. | 2002-11-28 |
Method of forming a self-aligned contact pad for use in a semiconductor device App 20020155687 - Chung, Dae-Hyuk ;   et al. | 2002-10-24 |
Semiconductor device having chamfered silicide layer and method for manufacturing the same Grant 6,437,411 - Choi , et al. August 20, 2 | 2002-08-20 |
Method for manufacturing cylindrical storage electrode of semiconductor device Grant 6,406,967 - Chung , et al. June 18, 2 | 2002-06-18 |
Method Of Manufacturing A Cylindrical Storage Node In A Semiconductor Device App 20020052089 - Choi, Sung-Gil ;   et al. | 2002-05-02 |
Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same Grant 6,369,008 - Ha , et al. April 9, 2 | 2002-04-09 |