loadpatents
Patent applications and USPTO patent grants for CHUNG; Chin Wook.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
---|---|
Substrate Processing Apparatus And Substrate Processing Method App 20220246407 - CHUNG; Chin Wook ;   et al. | 2022-08-04 |
Substrate Treating Apparatus App 20210074514 - CHUNG; Chin-Wook ;   et al. | 2021-03-11 |
Transmitter for transmitting wireless power Grant 9,837,825 - Chung , et al. December 5, 2 | 2017-12-05 |
Method and apparatus of diagnosing plasma in plasma space Grant 9,754,770 - Jeon , et al. September 5, 2 | 2017-09-05 |
Spray pump Grant 9,566,596 - Kim , et al. February 14, 2 | 2017-02-14 |
Plasma equipment Grant 9,437,399 - Chung , et al. September 6, 2 | 2016-09-06 |
Plasma Equipment App 20150097480 - Chung; Chin-Wook ;   et al. | 2015-04-09 |
Transmitter For Transmitting Wireless Power And Wireless Power Transmitting System Having The Same App 20150069851 - Chung; Chin-Wook ;   et al. | 2015-03-12 |
Method And Apparatus Of Diagnosing Plasma In Plasma Space App 20140253092 - JEON; Kyung-Yub ;   et al. | 2014-09-11 |
Spray Pump App 20140217124 - Kim; Seong-Ho ;   et al. | 2014-08-07 |
Plasma Chamber And Apparatus For Treating Substrate App 20140190635 - LEE; Jong Sik ;   et al. | 2014-07-10 |
Substrate processing apparatus Grant 8,343,309 - Jeon , et al. January 1, 2 | 2013-01-01 |
Apparatus for generating remote plasma Grant 8,207,470 - Jeon , et al. June 26, 2 | 2012-06-26 |
Process Monitoring Apparatus And Method App 20100282711 - Chung; Chin-Wook ;   et al. | 2010-11-11 |
Apparatus For Generating Remote Plasma App 20100096367 - JEON; Hyeong-Tag ;   et al. | 2010-04-22 |
Plasma diagnostic apparatus and method Grant 7,696,758 - Chung , et al. April 13, 2 | 2010-04-13 |
Plasma Diagnostic Apparatus And Method App 20080265903 - Chung; Chin-Wook ;   et al. | 2008-10-30 |
Substrate Processing Apparatus App 20080017317 - JEON; Sang Jean ;   et al. | 2008-01-24 |
Apparatus for generating remote plasma App 20070193515 - Jeon; Hyeong-Tag ;   et al. | 2007-08-23 |
Plasma processing apparatus and control method thereof App 20060061287 - Jeon; Sang Jean ;   et al. | 2006-03-23 |
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