| Patent | Date |
|---|
Continuous Degenerate Elliptical Retarder For Sensitive Particle Detection
App 20220268710 - Liu; Xuefeng ; et al. | 2022-08-25 |
Broadband ultraviolet illumination sources
Grant 11,424,117 - Chuang , et al. August 23, 2 | 2022-08-23 |
Light modulated electron source
Grant 11,417,492 - Garcia Berrios , et al. August 16, 2 | 2022-08-16 |
Back-illuminated Sensor With Boron Layer Deposited Using Plasma Atomic Layer Deposition
App 20220254829 - Yalamanchili; Sisir ; et al. | 2022-08-11 |
Strontium tetraborate as optical coating material
Grant 11,360,032 - Chuang , et al. June 14, 2 | 2022-06-14 |
Strontium Tetraborate As Optical Glass Material
App 20220136981 - Chuang; Yung-Ho Alex ; et al. | 2022-05-05 |
Frequency Conversion Using Stacked Strontium Tetraborate Plates
App 20220107544 - Chuang; Yung-Ho Alex ; et al. | 2022-04-07 |
Strontium tetraborate as optical glass material
Grant 11,255,797 - Chuang , et al. February 22, 2 | 2022-02-22 |
Frequency conversion using stacked strontium tetraborate plates
Grant 11,237,455 - Chuang , et al. February 1, 2 | 2022-02-01 |
Passivation of nonlinear optical crystals
Grant 11,227,770 - Chuang , et al. January 18, 2 | 2022-01-18 |
Frequency Conversion Using Stacked Strontium Tetraborate Plates
App 20210389643 - Chuang; Yung-Ho Alex ; et al. | 2021-12-16 |
Passivation of nonlinear optical crystals
Grant 11,180,866 - Chuang , et al. November 23, 2 | 2021-11-23 |
Back-illuminated Sensor And A Method Of Manufacturing A Sensor Using A Silicon On Insulator Wafer
App 20210320144 - Haddadi; Abbas ; et al. | 2021-10-14 |
Back-illuminated sensor and a method of manufacturing a sensor
Grant 11,114,491 - Chuang , et al. September 7, 2 | 2021-09-07 |
Back-illuminated sensor and a method of manufacturing a sensor
Grant 11,114,489 - Chuang , et al. September 7, 2 | 2021-09-07 |
Broadband Ultraviolet Illumination Sources
App 20210272791 - Chuang; Yung-Ho Alex ; et al. | 2021-09-02 |
Semiconductor Metrology And Inspection Based On An X-Ray Source With An Electron Emitter Array
App 20210239629 - Chuang; Yung-Ho Alex ; et al. | 2021-08-05 |
Photocathode including silicon substrate with boron layer
Grant 11,081,310 - Chuang , et al. August 3, 2 | 2021-08-03 |
Overlay metrology system and method
Grant 11,067,389 - Chuang , et al. July 20, 2 | 2021-07-20 |
Low-reflectivity Back-illuminated Image Sensor
App 20210164917 - Chuang; Yung-Ho Alex ; et al. | 2021-06-03 |
Broadband ultraviolet illumination sources
Grant 11,011,366 - Chuang , et al. May 18, 2 | 2021-05-18 |
Strontium Tetraborate As Optical Coating Material
App 20210131978 - Chuang; Yung-Ho Alex ; et al. | 2021-05-06 |
Light Modulated Electron Source
App 20210098222 - Garcia Berrios; Edgardo ; et al. | 2021-04-01 |
Electron gun and electron microscope
Grant 10,943,760 - Chuang , et al. March 9, 2 | 2021-03-09 |
Strontium tetraborate as optical coating material
Grant 10,921,261 - Chuang , et al. February 16, 2 | 2021-02-16 |
Strontium Tetraborate as Optical Glass Material
App 20210010948 - Chuang; Yung-Ho Alex ; et al. | 2021-01-14 |
Broadband Ultraviolet Illumination Sources
App 20200388481 - Chuang; Yung-Ho Alex ; et al. | 2020-12-10 |
Strontium Tetraborate As Optical Coating Material
App 20200355621 - Chuang; Yung-Ho Alex ; et al. | 2020-11-12 |
Multiple column per channel CCD sensor architecture for inspection and metrology
Grant 10,778,925 - Chuang , et al. Sept | 2020-09-15 |
Dual-column-parallel CCD sensor and inspection systems using a sensor
Grant 10,764,527 - Chuang , et al. Sep | 2020-09-01 |
Photocathode including field emitter array on a silicon substrate with boron layer
Grant 10,748,730 - Chuang , et al. A | 2020-08-18 |
Back-illuminated Sensor And A Method Of Manufacturing A Sensor
App 20200194476 - Chuang; Yung-Ho Alex ; et al. | 2020-06-18 |
Electron Gun And Electron Microscope
App 20200118783 - Chuang; Yung-Ho Alex ; et al. | 2020-04-16 |
Electron source
Grant 10,558,123 - Chuang , et al. Feb | 2020-02-11 |
Back-Illuminated Sensor And A Method Of Manufacturing A Sensor
App 20190386054 - Chuang; Yung-Ho Alex ; et al. | 2019-12-19 |
Scanning electron microscope and methods of inspecting and reviewing samples
Grant 10,466,212 - Brown , et al. No | 2019-11-05 |
Dark-field inspection using a low-noise sensor
Grant 10,462,391 - Chuang , et al. Oc | 2019-10-29 |
Back-illuminated sensor with boron layer
Grant 10,446,696 - Chern , et al. Oc | 2019-10-15 |
Multiple Column Per Channel CCD Sensor Architecture For Inspection And Metrology
App 20190313044 - Chuang; Yung-Ho Alex ; et al. | 2019-10-10 |
183 nm CW laser and inspection system
Grant 10,429,719 - Chuang , et al. O | 2019-10-01 |
Overlay Metrology System and Method
App 20190285407 - Chuang; Yung-Ho Alex ; et al. | 2019-09-19 |
Dual-Column-Parallel CCD Sensor And Inspection Systems Using A Sensor
App 20190253652 - Chuang; Yung-Ho Alex ; et al. | 2019-08-15 |
Passivation of Nonlinear Optical Crystals
App 20190198330 - Chuang; Yung-Ho Alex ; et al. | 2019-06-27 |
Dual-column-parallel CCD sensor and inspection systems using a sensor
Grant 10,313,622 - Chuang , et al. | 2019-06-04 |
Back-illuminated Sensor With Boron Layer
App 20190131465 - Chern; Jehn-Huar ; et al. | 2019-05-02 |
Anti-reflection layer for back-illuminated sensor
Grant 10,269,842 - Muramatsu , et al. | 2019-04-23 |
183 nm CW Laser and Inspection System
App 20190107766 - Chuang; Yung-Ho Alex ; et al. | 2019-04-11 |
Photocathode Including Silicon Substrate With Boron Layer
App 20190066962 - Chuang; Yung-Ho Alex ; et al. | 2019-02-28 |
In-Situ Passivation for Nonlinear Optical Crystals
App 20190056637 - Paranjape; Mandar ; et al. | 2019-02-21 |
Electron Source
App 20190049851 - Chuang; Yung-Ho Alex ; et al. | 2019-02-14 |
183NM laser and inspection system
Grant 10,199,149 - Chuang , et al. Fe | 2019-02-05 |
Photocathode including silicon substrate with boron layer
Grant 10,199,197 - Chuang , et al. Fe | 2019-02-05 |
Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
Grant 10,197,501 - Chuang , et al. Fe | 2019-02-05 |
Sensor with electrically controllable aperture for inspection and metrology systems
Grant 10,194,108 - Chuang , et al. Ja | 2019-01-29 |
183 nm CW laser and inspection system
Grant 10,175,555 - Chuang , et al. J | 2019-01-08 |
Electron source
Grant 10,133,181 - Chuang , et al. November 20, 2 | 2018-11-20 |
Back-illuminated sensor with boron layer
Grant 10,121,914 - Chern , et al. November 6, 2 | 2018-11-06 |
Inspection and Metrology Using Broadband Infrared Radiation
App 20180224711 - Chuang; Yung-Ho Alex ; et al. | 2018-08-09 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
Grant 10,044,164 - Chuang , et al. August 7, 2 | 2018-08-07 |
High brightness laser-sustained plasma broadband source
Grant 10,032,619 - Chuang , et al. July 24, 2 | 2018-07-24 |
183 nm CW Laser And Inspection System
App 20180188633 - Chuang; Yung-Ho Alex ; et al. | 2018-07-05 |
High Brightness Laser-Sustained Plasma Broadband Source
App 20180114687 - Chuang; Yung-Ho Alex ; et al. | 2018-04-26 |
Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems
App 20180070040 - Chuang; Yung-Ho Alex ; et al. | 2018-03-08 |
Back-Illuminated Sensor With Boron Layer
App 20180047857 - Chern; Jehn-Huar ; et al. | 2018-02-15 |
TDI sensor in a darkfield system
Grant 9,891,177 - Vazhaeparambil , et al. February 13, 2 | 2018-02-13 |
High brightness laser-sustained plasma broadband source
Grant 9,865,447 - Chuang , et al. January 9, 2 | 2018-01-09 |
Sensor with electrically controllable aperture for inspection and metrology systems
Grant 9,860,466 - Chuang , et al. January 2, 2 | 2018-01-02 |
Anti-Reflection Layer For Back-Illuminated Sensor
App 20170338257 - Muramatsu; Masaharu ; et al. | 2017-11-23 |
Scanning Electron Microscope And Methods Of Inspecting And Reviewing Samples
App 20170329025 - Brown; David L. ; et al. | 2017-11-16 |
Back-illuminated sensor with boron layer
Grant 9,818,887 - Chern , et al. November 14, 2 | 2017-11-14 |
183NM Laser And Inspection System
App 20170323716 - Chuang; Yung-Ho Alex ; et al. | 2017-11-09 |
Dual-Column-Parallel CCD Sensor And Inspection Systems Using A Sensor
App 20170295334 - Chuang; Yung-Ho Alex ; et al. | 2017-10-12 |
High Brightness Laser-Sustained Plasma Broadband Source
App 20170278694 - Chuang; Yung-Ho Alex ; et al. | 2017-09-28 |
Scanning electron microscope and methods of inspecting and reviewing samples
Grant 9,767,986 - Brown , et al. September 19, 2 | 2017-09-19 |
Semiconductor inspection and metrology system using laser pulse multiplier
Grant 9,768,577 - Chuang , et al. September 19, 2 | 2017-09-19 |
183NM laser and inspection system
Grant 9,748,729 - Chuang , et al. August 29, 2 | 2017-08-29 |
Anti-reflection layer for back-illuminated sensor
Grant 9,748,294 - Muramatsu , et al. August 29, 2 | 2017-08-29 |
Inspection System Using 193nm Laser
App 20170229829 - Chuang; Yung-Ho Alex ; et al. | 2017-08-10 |
Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
Grant 9,620,341 - Chuang , et al. April 11, 2 | 2017-04-11 |
Image sensor, an inspection system and a method of inspecting an article
Grant 9,620,547 - Chuang , et al. April 11, 2 | 2017-04-11 |
Photocathode including silicon substrate with boron layer
Grant 9,601,299 - Chuang , et al. March 21, 2 | 2017-03-21 |
Photocathode Including Silicon Substrate With Boron Layer
App 20170069455 - CHUANG; YUNG-HO ALEX ; et al. | 2017-03-09 |
Dark-Field Inspection Using A Low-Noise Sensor
App 20170048467 - Chuang; Yung-Ho Alex ; et al. | 2017-02-16 |
Electron Source
App 20170047207 - Chuang; Yung-Ho Alex ; et al. | 2017-02-16 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
Grant 9,525,265 - Chuang , et al. December 20, 2 | 2016-12-20 |
Inspection System Using 193nm Laser
App 20160365693 - Chuang; Yung-Ho Alex ; et al. | 2016-12-15 |
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/or Prisms
App 20160359292 - Chuang; Yung-Ho Alex ; et al. | 2016-12-08 |
Photocathode Including Field Emitter Array On A Silicon Substrate With Boron Layer
App 20160343532 - Chuang; Yung-Ho Alex ; et al. | 2016-11-24 |
Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems
App 20160334342 - Chuang; Yung-Ho Alex ; et al. | 2016-11-17 |
Multi-spot illumination for improved detection sensitivity
Grant 9,494,531 - Chuang , et al. November 15, 2 | 2016-11-15 |
Back-illuminated sensor with boron layer
Grant 9,496,425 - Chern , et al. November 15, 2 | 2016-11-15 |
Image Sensor, An Inspection System And A Method Of Inspecting An Article
App 20160315114 - Chuang; Yung-Ho Alex ; et al. | 2016-10-27 |
Photomultiplier Tube, Image Sensor, And An Inspection System Using A PMT Or Image Sensor
App 20160300701 - Chuang; Yung-Ho Alex ; et al. | 2016-10-13 |
Back-Illuminated Sensor With Boron Layer
App 20160290932 - Chern; Jehn-Huar ; et al. | 2016-10-06 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
Grant 9,461,435 - Dribinski , et al. October 4, 2 | 2016-10-04 |
Method and system for determining one or more optical characteristics of structure of a semiconductor wafer
Grant 9,448,184 - Liu , et al. September 20, 2 | 2016-09-20 |
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
Grant 9,419,407 - Deng , et al. August 16, 2 | 2016-08-16 |
Image sensor, an inspection system and a method of inspecting an article
Grant 9,410,901 - Chuang , et al. August 9, 2 | 2016-08-09 |
Multi-stage ramp-up annealing for frequency-conversion crystals
Grant 9,413,134 - Dribinski , et al. August 9, 2 | 2016-08-09 |
183NM Laser And Inspection System
App 20160099540 - Chuang; Yung-Ho Alex ; et al. | 2016-04-07 |
TDI Sensor in a Darkfield System
App 20160097727 - Vazhaeparambil; Jijen ; et al. | 2016-04-07 |
Laser Assembly And Inspection System Using Monolithic Bandwidth Narrowing Apparatus
App 20160094011 - Deng; Yujun ; et al. | 2016-03-31 |
Interposer based imaging sensor for high-speed image acquisition and inspection systems
Grant 9,299,738 - Brown , et al. March 29, 2 | 2016-03-29 |
Scanning Electron Microscope And Methods Of Inspecting And Reviewing Samples
App 20160064184 - Brown; David L. ; et al. | 2016-03-03 |
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/Or Prisms
App 20150372446 - Chuang; Yung-Ho Alex ; et al. | 2015-12-24 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier
App 20150364895 - Chuang; Yung-Ho Alex ; et al. | 2015-12-17 |
Multi-Stage Ramp-Up Annealing For Frequency-Conversion Crystals
App 20150299893 - Dribinski; Vladimir ; et al. | 2015-10-22 |
Semiconductor inspection and metrology system using laser pulse multiplier
Grant 9,151,940 - Chuang , et al. October 6, 2 | 2015-10-06 |
Image Sensor, An Inspection System And A Method Of Inspecting An Article
App 20150260659 - Chuang; Yung-Ho Alex ; et al. | 2015-09-17 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population
App 20150222079 - Dribinski; Vladimir ; et al. | 2015-08-06 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
Grant 9,097,683 - Dribinski , et al. August 4, 2 | 2015-08-04 |
Anti-Reflection Layer For Back-Illuminated Sensor
App 20150200216 - Muramatsu; Masaharu ; et al. | 2015-07-16 |
Illuminating a specimen for metrology or inspection
Grant 9,080,991 - Chuang , et al. July 14, 2 | 2015-07-14 |
Metrology systems and methods
Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
Grant 9,080,990 - Chuang , et al. July 14, 2 | 2015-07-14 |
Multi-Spot Illumination For Improved Detection Sensitivity
App 20150041666 - Chuang; Yung-Ho Alex ; et al. | 2015-02-12 |
Metrology Systems and Methods
App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal
App 20150022805 - Dribinski; Vladimir ; et al. | 2015-01-22 |
Metrology systems and methods
Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
Grant 8,873,596 - Dribinski , et al. October 28, 2 | 2014-10-28 |
Passivation of Nonlinear Optical Crystals
App 20140305367 - Chuang; Yung-Ho Alex ; et al. | 2014-10-16 |
Process aware metrology
Grant 8,832,611 - Liu , et al. September 9, 2 | 2014-09-09 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier
App 20140153596 - Chuang; Yung-Ho Alex ; et al. | 2014-06-05 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
Grant 8,711,896 - Dribinski , et al. April 29, 2 | 2014-04-29 |
Method and system for determining one or more optical characteristics of structure of a semiconductor wafer
Grant 8,675,188 - Liu , et al. March 18, 2 | 2014-03-18 |
Photocathode Including Silicon Substrate With Boron Layer
App 20140034816 - Chuang; Yung-Ho Alex ; et al. | 2014-02-06 |
Process Aware Metrology
App 20130282340 - Liu; Xuefeng ; et al. | 2013-10-24 |
Back-Illuminated Sensor With Boron Layer
App 20130264481 - Chern; Jehn-Huar ; et al. | 2013-10-10 |
Metrology Systems and Methods
App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
Method and System for Determining One or More Optical Characteristics of Structure of a Semiconductor Wafer
App 20130215420 - Liu; Xuefeng ; et al. | 2013-08-22 |
Process aware metrology
Grant 8,468,471 - Liu , et al. June 18, 2 | 2013-06-18 |
Electron-Bombarded Charge-Coupled Device And Inspection Systems Using EBCCD Detectors
App 20130148112 - Chuang; Yung-Ho Alex ; et al. | 2013-06-13 |
Metrology systems and methods
Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Process Aware Metrology
App 20130080984 - Liu; Xuefeng ; et al. | 2013-03-28 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal
App 20130021602 - Dribinski; Vladimir ; et al. | 2013-01-24 |
Illumination Subsystems Of A Metrology System, Metrology Systems, And Methods For Illuminating A Specimen For Metrology Measurements
App 20110279819 - Chuang; Yung-Ho (Alex) ; et al. | 2011-11-17 |
Illuminating A Specimen For Metrology Or Inspection
App 20110228263 - Chuang; Yung-Ho (Alex) ; et al. | 2011-09-22 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population
App 20110164648 - Dribinski; Vladimir ; et al. | 2011-07-07 |
Metrology Systems And Methods
App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
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