| Patent | Date |
|---|
System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
Grant 10,495,582 - Deng , et al. De | 2019-12-03 |
193nm laser and inspection system
Grant 10,439,355 - Chuang , et al. O | 2019-10-08 |
Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology
Grant 10,325,004 - Dziura , et al. | 2019-06-18 |
Passivation of nonlinear optical crystals
Grant 10,283,366 - Chuang , et al. | 2019-05-07 |
Semiconductor inspection and metrology system using laser pulse multiplier
Grant 10,193,293 - Chuang , et al. Ja | 2019-01-29 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier
App 20180233872 - Chuang; Yung-Ho ; et al. | 2018-08-16 |
CW DUV laser with improved stability
Grant 10,044,166 - Chuang , et al. August 7, 2 | 2018-08-07 |
193nm Laser And Inspection System
App 20180191126 - Chuang; Yung-Ho ; et al. | 2018-07-05 |
Semiconductor inspection and metrology system using laser pulse multiplier
Grant 9,972,959 - Chuang , et al. May 15, 2 | 2018-05-15 |
Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer
Grant 9,966,230 - Chuang , et al. May 8, 2 | 2018-05-08 |
Multi-Column Electron Beam Lithography Including Field Emitters on a Silicon Substrate with Boron Layer
App 20180108514 - Chuang; Yung-Ho ; et al. | 2018-04-19 |
193nm laser and inspection system
Grant 9,935,421 - Chuang , et al. April 3, 2 | 2018-04-03 |
System And Method For Reducing The Bandwidth Of A Laser And An Inspection System And Method Using A Laser
App 20170356854 - Deng; Yujun ; et al. | 2017-12-14 |
System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
Grant 9,804,101 - Deng , et al. October 31, 2 | 2017-10-31 |
Semiconductor inspection and metrology system using laser pulse multiplier
Grant 9,793,673 - Chuang , et al. October 17, 2 | 2017-10-17 |
Low noise, high stability, deep ultra-violet, continuous wave laser
Grant 9,660,409 - Chuang May 23, 2 | 2017-05-23 |
193 nm laser and an inspection system using a 193 nm laser
Grant 9,608,399 - Chuang , et al. March 28, 2 | 2017-03-28 |
CW DUV Laser With Improved Stability
App 20170070025 - Chuang; Yung-Ho ; et al. | 2017-03-09 |
193nm Laser And Inspection System
App 20170063026 - Chuang; Yung-Ho ; et al. | 2017-03-02 |
Passivation of Nonlinear Optical Crystals
App 20170025281 - Chuang; Yung-Ho ; et al. | 2017-01-26 |
193nm laser and inspection system
Grant 9,529,182 - Chuang , et al. December 27, 2 | 2016-12-27 |
CW DUV laser with improved stability
Grant 9,509,112 - Chuang , et al. November 29, 2 | 2016-11-29 |
Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
Grant 9,478,402 - Chuang , et al. October 25, 2 | 2016-10-25 |
Integrated multi-channel analog front end and digitizer for high speed imaging applications
Grant 9,462,206 - Brown , et al. October 4, 2 | 2016-10-04 |
Passivation of nonlinear optical crystals
Grant 9,459,215 - Chuang , et al. October 4, 2 | 2016-10-04 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier
App 20160285223 - Chuang; Yung-Ho ; et al. | 2016-09-29 |
Method and apparatus for high speed acquisition of moving images using pulsed illumination
Grant 9,426,400 - Brown , et al. August 23, 2 | 2016-08-23 |
Low Noise, High Stability, Deep Ultra-Violet, Continuous Wave Laser
App 20160197449 - Chuang; Yung-Ho | 2016-07-07 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers
Grant 9,377,414 - Chuang , et al. June 28, 2 | 2016-06-28 |
Passivation of Nonlinear Optical Crystals
App 20160169815 - Chuang; Yung-Ho ; et al. | 2016-06-16 |
Low-noise sensor and an inspection system using a low-noise sensor
Grant 9,347,890 - Brown , et al. May 24, 2 | 2016-05-24 |
193nm laser and inspection system
Grant 9,318,869 - Chuang , et al. April 19, 2 | 2016-04-19 |
Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology
Grant 9,310,296 - Dziura , et al. April 12, 2 | 2016-04-12 |
Low noise, high stability, deep ultra-violet, continuous wave laser
Grant 9,293,882 - Chuang March 22, 2 | 2016-03-22 |
193nm Laser And An Inspection System Using A 193nm Laser
App 20160056606 - Chuang; Yung-Ho ; et al. | 2016-02-25 |
Passivation of nonlinear optical crystals
Grant 9,250,178 - Chuang , et al. February 2, 2 | 2016-02-02 |
System And Method For Reducing The Bandwidth Of A Laser And An Inspection System and Method Using A Laser
App 20150268176 - Deng; Yujun ; et al. | 2015-09-24 |
TDI sensor modules with localized driving and signal processing circuitry for high speed inspection
Grant 9,077,862 - Brown , et al. July 7, 2 | 2015-07-07 |
Low-Noise Sensor And An Inspection System Using A Low-Noise Sensor
App 20150177159 - Brown; David L. ; et al. | 2015-06-25 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
Grant 9,059,560 - Dribinski , et al. June 16, 2 | 2015-06-16 |
193NM Laser And Inspection System
App 20150155680 - Chuang; Yung-Ho ; et al. | 2015-06-04 |
Low Noise, High Stability, Deep Ultra-Violet, Continuous Wave Laser
App 20150071316 - Chuang; Yung-Ho | 2015-03-12 |
193NM laser and inspection system
Grant 8,929,406 - Chuang , et al. January 6, 2 | 2015-01-06 |
CW DUV Laser With Improved Stability
App 20140362880 - Chuang; Yung-Ho ; et al. | 2014-12-11 |
Photomultiplier Tube, Image Sensor, And an Inspection System Using A PMT Or Image Sensor
App 20140291493 - Chuang; Yung-Ho ; et al. | 2014-10-02 |
Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications
App 20140240562 - Brown; David L. ; et al. | 2014-08-28 |
193nm Laser And Inspection System
App 20140226140 - Chuang; Yung-Ho ; et al. | 2014-08-14 |
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers
App 20140217299 - Chuang; Yung-Ho ; et al. | 2014-08-07 |
193NM Laser And Inspection System
App 20140204963 - Chuang; Yung-Ho ; et al. | 2014-07-24 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population
App 20140198818 - Dribinski; Vladimir ; et al. | 2014-07-17 |
Method And Apparatus For High Speed Acquisition Of Moving Images Using Pulsed Illumination
App 20140158864 - Brown; David L. ; et al. | 2014-06-12 |
Interposer based imaging sensor for high-speed image acquisition and inspection systems
Grant 8,748,828 - Brown , et al. June 10, 2 | 2014-06-10 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers
Grant 8,692,986 - Chuang , et al. April 8, 2 | 2014-04-08 |
Catadioptric imaging system for broad band microscopy
Grant 8,675,276 - Shafer , et al. March 18, 2 | 2014-03-18 |
TDI Sensor Modules With Localized Driving And Signal Processing Circuitry For High Speed Inspection
App 20140043463 - Brown; David L. ; et al. | 2014-02-13 |
Cell for light source
Grant 8,643,840 - Gross , et al. February 4, 2 | 2014-02-04 |
TDI sensor modules with localized driving and signal processing circuitry for high speed inspection
Grant 8,624,971 - Brown , et al. January 7, 2 | 2014-01-07 |
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers
App 20140001370 - Chuang; Yung-Ho ; et al. | 2014-01-02 |
Solid-State Laser And Inspection System Using 193nm Laser
App 20130313440 - Chuang; Yung-Ho ; et al. | 2013-11-28 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers
Grant 8,553,217 - Chuang , et al. October 8, 2 | 2013-10-08 |
Interposer Based Imaging Sensor For High-speed Image Acquisition And Inspection Systems
App 20130176552 - Brown; David L. ; et al. | 2013-07-11 |
Hydrogen Passivation Of Nonlinear Optical Crystals
App 20130088706 - Chuang; Yung-Ho ; et al. | 2013-04-11 |
Solid-State Laser And Inspection System Using 193nm Laser
App 20130077086 - Chuang; Yung-Ho ; et al. | 2013-03-28 |
Method Of Optimizing An Optical Parametric Model For Structural Analysis Using Optical Critical Dimension (ocd) Metrology
App 20120323356 - Dziura; Thaddeus G. ; et al. | 2012-12-20 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier
App 20120314286 - Chuang; Yung-Ho ; et al. | 2012-12-13 |
Cell For Light Source
App 20110205529 - Gross; Kenneth P. ; et al. | 2011-08-25 |
Split field inspection system using small catadioptric objectives
Grant 7,957,066 - Armstrong , et al. June 7, 2 | 2011-06-07 |
Apparatus for continuous clocking of TDI sensors
Grant 7,952,633 - Brown , et al. May 31, 2 | 2011-05-31 |
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers
App 20110116077 - Chuang; Yung-Ho ; et al. | 2011-05-19 |
Fiber amplifier based light source for semiconductor inspection
Grant 7,924,892 - Chuang , et al. April 12, 2 | 2011-04-12 |
Inspection system using back side illuminated linear sensor
App 20110073982 - Armstrong; J. Joseph ; et al. | 2011-03-31 |
Small ultra-high NA catadioptric objective using aspheric surfaces
Grant 7,869,121 - Shafer , et al. January 11, 2 | 2011-01-11 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system
Grant 7,817,260 - Chuang , et al. October 19, 2 | 2010-10-19 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
Grant 7,773,296 - Shafer , et al. August 10, 2 | 2010-08-10 |
TDI Sensor Modules With Localized Driving And Signal Processing Circuitry For High Speed Inspection
App 20100188655 - Brown; David L. ; et al. | 2010-07-29 |
Excimer laser inspection system
Grant 7,728,968 - Tsai , et al. June 1, 2 | 2010-06-01 |
High performance catadioptric imaging system
Grant 7,679,842 - Shafer , et al. March 16, 2 | 2010-03-16 |
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
Grant 7,672,043 - Armstrong , et al. March 2, 2 | 2010-03-02 |
Small ultra-high NA catadioptric objective
Grant 7,646,533 - Chuang , et al. January 12, 2 | 2010-01-12 |
Inspection system using small catadioptric objective
Grant 7,639,419 - Chuang , et al. December 29, 2 | 2009-12-29 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy
Grant 7,633,675 - Armstrong , et al. December 15, 2 | 2009-12-15 |
Non-critical phase matching in CLBO to generate sub-213nm wavelengths
Grant 7,627,007 - Armstrong , et al. December 1, 2 | 2009-12-01 |
Reducing variations in energy reflected from a sample due to thin film interference
Grant 7,609,373 - Chuang , et al. October 27, 2 | 2009-10-27 |
Continuous clocking of TDI sensors
Grant 7,609,309 - Brown , et al. October 27, 2 | 2009-10-27 |
Split field inspection system using small catadioptric objectives
App 20090180176 - Armstrong; J. Joseph ; et al. | 2009-07-16 |
Method and apparatus for simultaneous high-speed acquisition of multiple images
Grant 7,528,943 - Brown , et al. May 5, 2 | 2009-05-05 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
Grant 7,518,789 - Shafer , et al. April 14, 2 | 2009-04-14 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
App 20090080065 - Shafer; David R. ; et al. | 2009-03-26 |
Broad band DUV, VUV long-working distance catadioptric imaging system
Grant 7,502,177 - Shafer , et al. March 10, 2 | 2009-03-10 |
Broad band objective having improved lateral color performance
Grant 7,474,461 - Chuang , et al. January 6, 2 | 2009-01-06 |
System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel
Grant 7,465,913 - Chuang , et al. December 16, 2 | 2008-12-16 |
High NA system for multiple mode imaging
Grant 7,457,034 - Chuang , et al. November 25, 2 | 2008-11-25 |
Peak power and speckle contrast reduction for a single layer pulse
Grant 7,449,673 - Chuang , et al. November 11, 2 | 2008-11-11 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy
App 20080247035 - Armstrong; J. Joseph ; et al. | 2008-10-09 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system
App 20080225282 - Chuang; Yung-Ho ; et al. | 2008-09-18 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
Grant 7,423,805 - Shafer , et al. September 9, 2 | 2008-09-09 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system
Grant 7,345,825 - Chuang , et al. March 18, 2 | 2008-03-18 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy
Grant 7,307,783 - Armstrong , et al. December 11, 2 | 2007-12-11 |
Broad band objective having improved lateral color performance
App 20070258154 - Chuang; Yung-Ho ; et al. | 2007-11-08 |
Broad band DUV, VUV long-working distance catadioptric imaging system
App 20070171547 - Shafer; David R. ; et al. | 2007-07-26 |
Broad band objective having improved lateral color performance
Grant 7,245,438 - Chuang , et al. July 17, 2 | 2007-07-17 |
Peak power and speckle contrast reduction for a single layer pulse
App 20070153393 - Chuang; Yung-Ho ; et al. | 2007-07-05 |
Method and apparatus for simultaneous high-speed acquisition of multiple images
App 20070146693 - Brown; David L. ; et al. | 2007-06-28 |
Excimer laser inspection system
App 20070121107 - Tsai; Bin-Ming Benjamin ; et al. | 2007-05-31 |
Apparatus for continuous clocking of TDI sensors
App 20070064135 - Brown; David Lee ; et al. | 2007-03-22 |
Peak power and speckle contrast reduction for a single layer pulse
Grant 7,187,500 - Chuang , et al. March 6, 2 | 2007-03-06 |
High performance catadioptric imaging system
Grant 7,180,658 - Shafer , et al. February 20, 2 | 2007-02-20 |
High performance catadioptric imaging system
App 20070024961 - Shafer; David R. ; et al. | 2007-02-01 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system
App 20070002465 - Chuang; Yung-Ho ; et al. | 2007-01-04 |
High NA system for multiple mode imaging
App 20060279837 - Chuang; Yung-ho ; et al. | 2006-12-14 |
Reducing variations in energy reflected from a sample due to thin film interference
App 20060268265 - Chuang; Yung-Ho ; et al. | 2006-11-30 |
System and method for sensing using adjustable modulation transfer function (MTF)
App 20060266926 - Chuang; Yung-Ho ; et al. | 2006-11-30 |
Broad band objective having improved lateral color performance
App 20060262418 - Chuang; Yung-Ho ; et al. | 2006-11-23 |
Excimer laser inspection system
Grant 7,136,159 - Tsai , et al. November 14, 2 | 2006-11-14 |
Broad band DUV, VUV long-working distance catadioptric imaging system
Grant 7,136,234 - Shafer , et al. November 14, 2 | 2006-11-14 |
Small ultra-high NA catadioptric objective using aspheric surfaces
App 20060238856 - Shafer; David R. ; et al. | 2006-10-26 |
System and method for sensing using adjustable modulation transfer function (MTF)
Grant 7,126,100 - Chuang , et al. October 24, 2 | 2006-10-24 |
Small ultra-high NA catadioptric objective
App 20060158720 - Chuang; Yung-Ho ; et al. | 2006-07-20 |
Continuous clocking of TDI sensors
App 20060103725 - Brown; David Lee ; et al. | 2006-05-18 |
High NA system for multiple mode imaging
Grant 7,035,001 - Chuang , et al. April 25, 2 | 2006-04-25 |
Fiber amplifier based light source for semiconductor inspection
App 20060045163 - Chuang; Yung-Ho ; et al. | 2006-03-02 |
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
App 20050259318 - Armstrong, J. Joseph ; et al. | 2005-11-24 |
Broad spectrum ultraviolet inspection systems employing catadioptric imaging
Grant 6,956,694 - Shafer , et al. October 18, 2 | 2005-10-18 |
Broad band DUV, VUV long-working distance catadioptric imaging system
App 20050153559 - Shafer, David R. ; et al. | 2005-07-14 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy
App 20050152027 - Armstrong, J. Joseph ; et al. | 2005-07-14 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
App 20050111081 - Shafer, David R. ; et al. | 2005-05-26 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
App 20050057796 - Shafer, David R. ; et al. | 2005-03-17 |
Broad band DUV, VUV long-working distance catadioptric imaging system
Grant 6,842,298 - Shafer , et al. January 11, 2 | 2005-01-11 |
Catadioptric imaging system for broad band microscopy
App 20040240047 - Shafer, David R. ; et al. | 2004-12-02 |
Inspection system using small catadioptric objective
App 20040218262 - Chuang, Yung-Ho ; et al. | 2004-11-04 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
Grant 6,801,358 - Shafer , et al. October 5, 2 | 2004-10-05 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
Grant 6,801,357 - Shafer , et al. October 5, 2 | 2004-10-05 |
High performance catadioptric imaging system
App 20040165257 - Shafer, David R. ; et al. | 2004-08-26 |
Peak power and speckle contrast reduction for a single layer pulse
App 20040165621 - Chuang, Yung-Ho ; et al. | 2004-08-26 |
Excimer laser inspection system
App 20040095573 - Tsai, Bin-Ming Benjamin ; et al. | 2004-05-20 |
Peak power and speckle contrast reduction for a single laser pulse
Grant 6,693,930 - Chuang , et al. February 17, 2 | 2004-02-17 |
High NA system for multiple mode imaging
App 20030197923 - Chuang, Yung-Ho ; et al. | 2003-10-23 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
App 20030076583 - Shafer, David R. ; et al. | 2003-04-24 |
Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
Grant 6,512,631 - Shafer , et al. January 28, 2 | 2003-01-28 |
High NA system for multiple mode imaging
App 20030002147 - Chuang, Yung-Ho ; et al. | 2003-01-02 |
Broad spectrum ultraviolet catadioptric imaging system
App 20020085271 - Shafer, David R. ; et al. | 2002-07-04 |
Broad Band Deep Ultraviolet/vacuum Ultraviolet Catadioptric Imaging System
App 20010040722 - SHAFER, DAVID R. ; et al. | 2001-11-15 |
Broad spectrum ultraviolet inspection methods employing catadioptric imaging
Grant 6,313,467 - Shafer , et al. November 6, 2 | 2001-11-06 |
System and method for analyzing topological features on a surface
Grant 6,137,570 - Chuang , et al. October 24, 2 | 2000-10-24 |
Broad spectrum ultraviolet inspection methods employing catadioptric imaging
Grant 6,133,576 - Shafer , et al. October 17, 2 | 2000-10-17 |
High NA system for multiple mode imaging
Grant 6,064,517 - Chuang , et al. May 16, 2 | 2000-05-16 |
Ultra-broadband UV microscope imaging system with wide range zoom capability
Grant 5,999,310 - Shafer , et al. December 7, 1 | 1999-12-07 |
Broad spectrum ultraviolet catadioptric imaging system
Grant 5,956,174 - Shafer , et al. September 21, 1 | 1999-09-21 |
Broad spectrum ultraviolet catadioptric imaging system
Grant 5,717,518 - Shafer , et al. February 10, 1 | 1998-02-10 |
System for generating pluralities of optical pulses with predetermined frequencies in a temporally and spatially overlapped relationship
Grant 5,095,487 - Meyerhofer , et al. March 10, 1 | 1992-03-10 |
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