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Patent applications and USPTO patent grants for CHUANG; KAI-LIN.The latest application filed is for "nozzle having real time inspection functions".
Patent | Date |
---|---|
Nozzle Having Real Time Inspection Functions App 20220293443 - CHUANG; KAI-LIN ;   et al. | 2022-09-15 |
Nozzle having real time inspection functions Grant 11,355,370 - Chuang , et al. June 7, 2 | 2022-06-07 |
Method of processing semiconductor substrate Grant 11,107,671 - Hsu , et al. August 31, 2 | 2021-08-31 |
Nozzle Having Real Time Inspection Functions App 20200118852 - CHUANG; KAI-LIN ;   et al. | 2020-04-16 |
Nozzle having real time inspection functions Grant 10,504,758 - Chuang , et al. Dec | 2019-12-10 |
Method Of Processing Semiconductor Substrate App 20190252181 - HSU; Wei-Chih ;   et al. | 2019-08-15 |
Apparatus of processing semiconductor substrate Grant 10,269,557 - Hsu , et al. | 2019-04-23 |
Apparatus Of Processing Semiconductor Substrate App 20170110315 - HSU; Wei-Chih ;   et al. | 2017-04-20 |
Method for forming patterns Grant 9,316,901 - Chen , et al. April 19, 2 | 2016-04-19 |
Photomask and fabrication method thereof Grant 9,304,389 - Liou , et al. April 5, 2 | 2016-04-05 |
Method for forming photo-mask and OPC method Grant 9,274,416 - Huang , et al. March 1, 2 | 2016-03-01 |
Nozzle Having Real Time Inspection Functions App 20150231657 - Chuang; Kai-Lin ;   et al. | 2015-08-20 |
Photomask And Fabrication Method Thereof App 20150118602 - Liou; En-Chiuan ;   et al. | 2015-04-30 |
Method For Forming Photo-Mask And OPC Method App 20150072272 - Huang; Chun-Hsien ;   et al. | 2015-03-12 |
Calculation method for generating layout pattern in photomask Grant 8,954,919 - Liou , et al. February 10, 2 | 2015-02-10 |
Method For Forming Patterns App 20140220482 - Chen; Hsin-Yu ;   et al. | 2014-08-07 |
Method for forming photomasks Grant 8,748,066 - Chen , et al. June 10, 2 | 2014-06-10 |
Alignment accuracy mark Grant 8,729,716 - Chuang , et al. May 20, 2 | 2014-05-20 |
Method For Forming Photomasks App 20140093814 - Chen; Hsin-Yu ;   et al. | 2014-04-03 |
Alignment Accuracy Mark App 20130106000 - Chuang; Kai-Lin ;   et al. | 2013-05-02 |
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