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Patent applications and USPTO patent grants for Chuang; Hwei-Lin.The latest application filed is for "method for forming silicon-containing film and method for decreasing number of particles".
Patent | Date |
---|---|
Method for forming silicon-containing film and method for decreasing number of particles Grant 7,329,591 - Liu , et al. February 12, 2 | 2008-02-12 |
Method for forming silicon-containing film and method for decreasing number of particles App 20070197007 - Liu; Che-Hung ;   et al. | 2007-08-23 |
Method of manufacturing deep trench capacitor Grant 6,680,237 - Chen , et al. January 20, 2 | 2004-01-20 |
Method of manufacturing deep trench capacitor App 20030017675 - Chen, Shih-Lung ;   et al. | 2003-01-23 |
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