| Patent | Date |
|---|
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20220297186 - Buller; Benyamin ; et al. | 2022-09-22 |
Method And Apparatus Of Low Temperature Plasma Enhanced Chemical Vapor Deposition Of Graphene
App 20220254641 - Chua; Thai Cheng ; et al. | 2022-08-11 |
Modular microwave plasma source
Grant 11,404,248 - Kraus , et al. August 2, 2 | 2022-08-02 |
Remote modular high-frequency source
Grant 11,393,661 - Nguyen , et al. July 19, 2 | 2022-07-19 |
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
Grant 11,217,443 - Vats , et al. January 4, 2 | 2022-01-04 |
Clean Unit For Chamber Exhaust Cleaning
App 20210391156 - Chan; Kelvin ; et al. | 2021-12-16 |
Modular High-frequency Source
App 20210327685 - Chua; Thai Cheng ; et al. | 2021-10-21 |
Modular Microwave Source With Embedded Ground Surface
App 20210313153 - AuBuchon; Joseph F. ; et al. | 2021-10-07 |
Substrate Support With Multiple Embedded Electrodes
App 20210313213 - KRAUS; Philip Allan ; et al. | 2021-10-07 |
Modular Microwave Source With Local Lorentz Force
App 20210287882 - Kraus; Philip Allan ; et al. | 2021-09-16 |
Phased array modular high-frequency source
Grant 11,114,282 - Kraus , et al. September 7, 2 | 2021-09-07 |
Modular high-frequency source
Grant 11,081,317 - Chua , et al. August 3, 2 | 2021-08-03 |
Modular microwave source with embedded ground surface
Grant 11,049,694 - AuBuchon , et al. June 29, 2 | 2021-06-29 |
Modular High-frequency Source With Integrated Gas Distribution
App 20210183621 - Nguyen; Hanh ; et al. | 2021-06-17 |
Substrate Support With Multiple Embedded Electrodes
App 20210183681 - KRAUS; Philip Allan ; et al. | 2021-06-17 |
Modular microwave source with local Lorentz force
Grant 11,037,764 - Kraus , et al. June 15, 2 | 2021-06-15 |
Modular Microwave Source With Embedded Ground Surface
App 20210098236 - AuBuchon; Joseph F. ; et al. | 2021-04-01 |
Monolithic Modular Microwave Source With Integrated Temperature Control
App 20210100076 - Carducci; James ; et al. | 2021-04-01 |
Monolithic Modular High-frequency Plasma Source
App 20210098230 - Chua; Thai Cheng ; et al. | 2021-04-01 |
Monolithic Modular Microwave Source With Integrated Process Gas Distribution
App 20210098231 - Carducci; James ; et al. | 2021-04-01 |
Modular high-frequency source with integrated gas distribution
Grant 10,943,768 - Nguyen , et al. March 9, 2 | 2021-03-09 |
Substrate support with multiple embedded electrodes
Grant 10,937,678 - Kraus , et al. March 2, 2 | 2021-03-02 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources
App 20200402769 - Chua; Thai Cheng ; et al. | 2020-12-24 |
Modular Microwave Plasma Source
App 20200381217 - Kraus; Philip Allan ; et al. | 2020-12-03 |
Thermal Break For High-frequency Antennae
App 20200343065 - Chua; Thai Cheng ; et al. | 2020-10-29 |
Phased Array Modular High-frequency Source
App 20200303167 - Kraus; Philip Allan ; et al. | 2020-09-24 |
System for coupling a voltage to spatially segmented portions of the wafer with variable voltage
Grant 10,763,150 - Lindley , et al. Sep | 2020-09-01 |
Modular microwave plasma source
Grant 10,748,745 - Kraus , et al. A | 2020-08-18 |
Phased array modular high-frequency source
Grant 10,720,311 - Kraus , et al. | 2020-07-21 |
System for coupling a voltage to portions of a substrate
Grant 10,714,372 - Chua , et al. | 2020-07-14 |
Symmetric and irregular shaped plasmas using modular microwave sources
Grant 10,707,058 - Chua , et al. | 2020-07-07 |
Sequential Deposition And High Frequency Plasma Treatment Of Deposited Film On Patterned And Un-patterned Substrates
App 20200176241 - Vats; Vinayak Veer ; et al. | 2020-06-04 |
Substrate Support With Multiple Embedded Electrodes
App 20200118861 - KRAUS; Philip Allan ; et al. | 2020-04-16 |
Phased Array Modular High-frequency Source
App 20200066490 - Kraus; Philip Allan ; et al. | 2020-02-27 |
Apparatuses, systems and methods for three-dimensional printing
Grant 10,507,549 - Buller , et al. Dec | 2019-12-17 |
Substrate support with multiple embedded electrodes
Grant 10,510,575 - Kraus , et al. Dec | 2019-12-17 |
Phased array modular high-frequency source
Grant 10,504,699 - Kraus , et al. Dec | 2019-12-10 |
Apparatuses, systems and methods for three-dimensional printing
Grant 10,493,564 - Buller , et al. De | 2019-12-03 |
Modular High-frequency Source With Integrated Gas Distribution
App 20190326090 - NGUYEN; Hahn ; et al. | 2019-10-24 |
Remote Modular High-frequency Source
App 20190326098 - NGUYEN; Hanh ; et al. | 2019-10-24 |
Modular High-frequency Source
App 20190326095 - CHUA; Thai Cheng ; et al. | 2019-10-24 |
Phased Array Modular High-frequency Source
App 20190326096 - KRAUS; PHILIP ALLAN ; et al. | 2019-10-24 |
Method Of Forming Silicon Nitride Films Using Microwave Plasma
App 20190259598 - CHEN; Hanhong ; et al. | 2019-08-22 |
Substrate Support With Multiple Embedded Electrodes
App 20190088520 - KRAUS; Philip Allan ; et al. | 2019-03-21 |
System For Coupling A Voltage To Portions Of A Substrate
App 20190088521 - CHUA; Thai Cheng ; et al. | 2019-03-21 |
System For Coupling A Voltage To Spatially Segmented Portions Of The Wafer With Variable Voltage
App 20190088522 - LINDLEY; Roger Alan ; et al. | 2019-03-21 |
Modular Microwave Source With Local Lorentz Force
App 20180323043 - Kraus; Philip Allan ; et al. | 2018-11-08 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources
App 20180294143 - Chua; Thai Cheng ; et al. | 2018-10-11 |
Three-dimensional Printing
App 20180117845 - BULLER; Benyamin ; et al. | 2018-05-03 |
Modular Microwave Plasma Source
App 20180053634 - KRAUS; Philip Allan ; et al. | 2018-02-22 |
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20170334024 - BULLER; Benyamin ; et al. | 2017-11-23 |
Apparatuses, systems and methods for three-dimensional printing
Grant 9,821,411 - Buller , et al. November 21, 2 | 2017-11-21 |
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20160297006 - Buller; Benyamin ; et al. | 2016-10-13 |
Apparatuses, systems and methods for three-dimensional printing
Grant 9,399,256 - Buller , et al. July 26, 2 | 2016-07-26 |
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20150367416 - Buller; Benyamin ; et al. | 2015-12-24 |
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20150367446 - Buller; Benyamin ; et al. | 2015-12-24 |
Apparatuses, Systems And Methods For Three-dimensional Printing
App 20150367415 - Buller; Benyamin ; et al. | 2015-12-24 |
Electrochromic device with improved transparent conductor and method for forming the same
Grant 9,081,245 - Le , et al. July 14, 2 | 2015-07-14 |
Method and apparatus for atomic hydrogen surface treatment during GaN epitaxy
Grant 8,975,166 - Chua , et al. March 10, 2 | 2015-03-10 |
Material with tunable index of refraction
Grant 8,900,897 - Kraus , et al. December 2, 2 | 2014-12-02 |
Material With Tunable Index Of Refraction
App 20140191262 - Kraus; Philip ; et al. | 2014-07-10 |
Chemical Vapor Deposition System
App 20140127887 - Kraus; Philip ; et al. | 2014-05-08 |
Chemical Vapor Deposition System
App 20140124788 - Kraus; Philip ; et al. | 2014-05-08 |
Electrochromic Device with Improved Transparent Conductor and Method for Forming the Same
App 20140092462 - Le; Minh Huu ; et al. | 2014-04-03 |
Electrochromic device with improved transparent conductor and method for forming the same
Grant 8,665,511 - Le , et al. March 4, 2 | 2014-03-04 |
Chemical vapor deposition system with in situ, spatially separated plasma
App 20140014965 - Kraus; Philip A. ; et al. | 2014-01-16 |
GaN Epitaxy With Migration Enhancement and Surface Energy Modification
App 20130313566 - Kraus; Philip A. ; et al. | 2013-11-28 |
GaN epitaxy with migration enhancement and surface energy modification
Grant 8,524,581 - Kraus , et al. September 3, 2 | 2013-09-03 |
GaN Epitaxy With Migration Enhancement and Surface Energy Modification
App 20130171805 - Kraus; Philip A. ; et al. | 2013-07-04 |
Electrochromic Device With Improved Transparent Conductor And Method For Forming The Same
App 20130163064 - Le; Hien Minh Huu ; et al. | 2013-06-27 |
METHOD AND APPARATUS FOR ATOMIC HYDROGEN SURFACE TREATMENT DURING GaN EPITAXY
App 20130130481 - Chua; Thai Cheng ; et al. | 2013-05-23 |
Methods and Systems for Forming Thin Films
App 20130118404 - Kraus; Philip A. ; et al. | 2013-05-16 |
Methods and systems for forming thin films
Grant 8,377,803 - Kraus , et al. February 19, 2 | 2013-02-19 |
Methods and systems for forming thin films
Grant 8,318,590 - Kraus , et al. November 27, 2 | 2012-11-27 |
Methods And Systems For Forming Thin Films
App 20120208357 - Kraus; Philip A. ; et al. | 2012-08-16 |
Methods And Systems For Forming Thin Films
App 20120208352 - Kraus; Philip A. ; et al. | 2012-08-16 |
Methods and systems for forming thin films
Grant 8,143,147 - Kraus , et al. March 27, 2 | 2012-03-27 |
Multiple nitrogen plasma treatments for thin SiON dielectrics
Grant 7,964,514 - Chua June 21, 2 | 2011-06-21 |
Method for fabricating a gate dielectric of a field effect transistor
Grant 7,888,217 - Chua , et al. February 15, 2 | 2011-02-15 |
Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus
Grant 7,837,838 - Chua , et al. November 23, 2 | 2010-11-23 |
Method for fabricating a gate dielectric of a field effect transistor
Grant 7,727,828 - Chua , et al. June 1, 2 | 2010-06-01 |
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
Grant 7,678,710 - Chua , et al. March 16, 2 | 2010-03-16 |
Methods for low temperature oxidation of a semiconductor device
Grant 7,645,709 - Chua , et al. January 12, 2 | 2010-01-12 |
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
Grant 7,645,710 - Olsen , et al. January 12, 2 | 2010-01-12 |
Plasma ignition and complete faraday shielding of capacitive coupling for an inductively-coupled plasma
Grant 7,605,008 - Chua , et al. October 20, 2 | 2009-10-20 |
Method for fabricating an integrated gate dielectric layer for field effect transistors
Grant 7,601,648 - Chua , et al. October 13, 2 | 2009-10-13 |
Method of forming a silicon oxynitride layer
Grant 7,569,502 - Olsen , et al. August 4, 2 | 2009-08-04 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
Grant 7,514,373 - Kraus , et al. April 7, 2 | 2009-04-07 |
Atomic force microscope technique for minimal tip damage
Grant 7,509,844 - Wang , et al. March 31, 2 | 2009-03-31 |
Methods For Low Temperature Oxidation Of A Semiconductor Device
App 20090035952 - CHUA; THAI CHENG ; et al. | 2009-02-05 |
Device That Enables Plasma Ignition And Complete Faraday Shielding Of Capacitive Coupling For An Inductively-coupled Plasma
App 20080241419 - CHUA; THAI CHENG ; et al. | 2008-10-02 |
Method Of Clustering Sequential Processing For A Gate Stack Structure
App 20080119057 - CHUA; THAI CHENG ; et al. | 2008-05-22 |
Method for fabricating an integrated gate dielectric layer for field effect transistors
App 20080026553 - Chua; Thai Cheng ; et al. | 2008-01-31 |
Method for fabricating a gate dielectric layer utilized in a gate structure
App 20080014759 - Chua; Thai Cheng ; et al. | 2008-01-17 |
Plasma reactor with inductively coupled source power applicator and a high temperature heated workpiece support
App 20080011426 - Chua; Thai Cheng | 2008-01-17 |
Atomic Force Microscope Technique For Minimal Tip Damage
App 20070277599 - WANG; CHIKUANG C. ; et al. | 2007-12-06 |
Method Of Fabricating A High Dielectric Constant Transistor Gate Using A Low Energy Plasma Apparatus
App 20070218623 - Chua; Thai Cheng ; et al. | 2007-09-20 |
Apparatus For Fabricating A High Dielectric Constant Transistor Gate Using A Low Energy Plasma System
App 20070209930 - Chua; Thai Cheng ; et al. | 2007-09-13 |
Method And Apparatus For Fabricating A High Dielectric Constant Transistor Gate Using A Low Energy Plasma System
App 20070212895 - CHUA; Thai Cheng ; et al. | 2007-09-13 |
Method And Apparatus For Fabricating A High Dielectric Constant Transistor Gate Using A Low Energy Plasma System
App 20070212896 - Olsen; Christopher Sean ; et al. | 2007-09-13 |
Multiple nitrogen plasma treatments for thin SiON dielectrics
App 20070207624 - Chua; Thai Cheng | 2007-09-06 |
Method For Forming Silicon Oxynitride Materials
App 20070207628 - CHUA; THAI CHENG | 2007-09-06 |
Plasma gate oxidation process using pulsed RF source power
Grant 7,214,628 - Chua May 8, 2 | 2007-05-08 |
Method For Fabricating A Gate Dielectric Of A Field Effect Transistor
App 20070093013 - Chua; Thai Cheng ; et al. | 2007-04-26 |
Method for fabricating a gate dielectric of a field effect transistor
App 20070093012 - Chua; Thai Cheng ; et al. | 2007-04-26 |
Method Of Forming A Silicon Oxynitride Layer
App 20070087583 - OLSEN; CHRISTOPHER ; et al. | 2007-04-19 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
Grant 7,179,754 - Kraus , et al. February 20, 2 | 2007-02-20 |
Nitric oxide reoxidation for improved gate leakage reduction of sion gate dielectrics
App 20070010103 - Chua; Thai Cheng ; et al. | 2007-01-11 |
Selective plasma re-oxidation process using pulsed RF source power
Grant 7,141,514 - Chua November 28, 2 | 2006-11-28 |
Method And Apparatus For Plasma Nitridation Of Gate Dielectrics Using Amplitude Modulated Radio-frequency Energy
App 20060216944 - Kraus; Philip A. ; et al. | 2006-09-28 |
Plasma gate oxidation process using pulsed RF source power
App 20060172551 - Chua; Thai Cheng | 2006-08-03 |
Selective plasma re-oxidation process using pulsed RF source power
App 20060172550 - Chua; Thai Cheng | 2006-08-03 |
Suppression of NiSi.sub.2 formation in a nickel salicide process using a pre-silicide nitrogen plasma
Grant 6,998,153 - Chiang , et al. February 14, 2 | 2006-02-14 |
Method of forming a silicon oxynitride layer
App 20050130448 - Olsen, Christopher ; et al. | 2005-06-16 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
App 20040242021 - Kraus, Philip A. ; et al. | 2004-12-02 |
Suppression of NiSi2 formation in a nickel salicide process using a pre-silicide nitrogen plasma
App 20040144639 - Chiang, Mei-Ling ; et al. | 2004-07-29 |
Plasma method and apparatus for processing a substrate
App 20040038486 - Chua, Thai Cheng ; et al. | 2004-02-26 |
Plasma Method And Apparatus For Processing A Substrate
App 20030232513 - Kraus, Philip Allan ; et al. | 2003-12-18 |
Plasma method and apparatus for processing a substrate
Grant 6,660,659 - Kraus , et al. December 9, 2 | 2003-12-09 |
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