Patent | Date |
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Differential Contrast Plating For Advanced Packaging Applications App 20220275531 - Banik; Stephen J. ;   et al. | 2022-09-01 |
Gold Through Silicon Mask Plating App 20220216104 - Chua; Lee Peng ;   et al. | 2022-07-07 |
Cross Flow Conduit For Foaming Prevention In High Convection Plating Cells App 20210395913 - Banik, II; Stephen J. ;   et al. | 2021-12-23 |
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking Grant 10,982,346 - Berke , et al. April 20, 2 | 2021-04-20 |
Protecting anodes from passivation in alloy plating systems Grant 10,954,605 - Chua , et al. March 23, 2 | 2021-03-23 |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity Grant 10,923,340 - Kagajwala , et al. February 16, 2 | 2021-02-16 |
Cleaning Electroplating Substrate Holders Using Reverse Current Deplating App 20200115816 - Chua; Lee Peng ;   et al. | 2020-04-16 |
Cleaning electroplating substrate holders using reverse current deplating Grant 10,538,855 - Chua , et al. Ja | 2020-01-21 |
Dynamic modulation of cross flow manifold during electroplating Grant 10,233,556 - Graham , et al. | 2019-03-19 |
Integrated Elastomeric Lipseal And Cup Bottom For Reducing Wafer Sticking App 20190040544 - Berke; Aaron ;   et al. | 2019-02-07 |
Protecting Anodes From Passivation In Alloy Plating Systems App 20180371637 - Chua; Lee Peng ;   et al. | 2018-12-27 |
Methods and apparatus for wetting pretreatment for through resist metal plating Grant 10,128,102 - Chua , et al. November 13, 2 | 2018-11-13 |
Apparatus And Method For Modulating Azimuthal Uniformity In Electroplating App 20180312991 - Graham; Gabriel Hay ;   et al. | 2018-11-01 |
Protecting anodes from passivation in alloy plating systems Grant 10,106,907 - Chua , et al. October 23, 2 | 2018-10-23 |
Methods and apparatuses for cleaning electroplating substrate holders Grant 10,092,933 - Kumar , et al. October 9, 2 | 2018-10-09 |
Edge flow element for electroplating apparatus Grant 10,094,034 - Graham , et al. October 9, 2 | 2018-10-09 |
Convection optimization for mixed feature electroplating Grant 10,094,035 - Graham , et al. October 9, 2 | 2018-10-09 |
Apparatus And Method For Electrodeposition Of Metals With The Use Of An Ionically Resistive Ionically Permeable Element Having Spatially Tailored Resistivity App 20180286660 - Kagajwala; Burhanuddin ;   et al. | 2018-10-04 |
Automated cleaning of wafer plating assembly Grant 10,087,545 - Mayer , et al. October 2, 2 | 2018-10-02 |
Electroplating Apparatus And Methods Utilizing Independent Control Of Impinging Electrolyte App 20180258546 - Graham; Gabriel Hay ;   et al. | 2018-09-13 |
Wide Lipseal For Electroplating App 20180251907 - Thorkelsson; Kari ;   et al. | 2018-09-06 |
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking Grant 10,053,793 - Berke , et al. August 21, 2 | 2018-08-21 |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity Grant 10,014,170 - Kagajwala , et al. July 3, 2 | 2018-07-03 |
Apparatus and method for modulating azimuthal uniformity in electroplating Grant 9,988,733 - Graham , et al. June 5, 2 | 2018-06-05 |
Methods And Apparatus For Wetting Pretreatment For Through Resist Metal Plating App 20170148627 - Chua; Lee Peng ;   et al. | 2017-05-25 |
Protecting Anodes From Passivation In Alloy Plating Systems App 20170137960 - Chua; Lee Peng ;   et al. | 2017-05-18 |
Methods and apparatus for wetting pretreatment for through resist metal plating Grant 9,613,833 - Chua , et al. April 4, 2 | 2017-04-04 |
Durable Low Cure Temperature Hydrophobic Coating In Electroplating Cup Assembly App 20170073832 - Berke; Aaron ;   et al. | 2017-03-16 |
Edge Flow Element For Electroplating Apparatus App 20170058417 - Graham; Gabriel Hay ;   et al. | 2017-03-02 |
Apparatus and method for dynamic control of plated uniformity with the use of remote electric current Grant 9,567,685 - Kagajwala , et al. February 14, 2 | 2017-02-14 |
Cleaning Electroplating Substrate Holders Using Reverse Current Deplating App 20170009370 - Chua; Lee Peng ;   et al. | 2017-01-12 |
Integrated Elastomeric Lipseal And Cup Bottom For Reducing Wafer Sticking App 20170009369 - Berke; Aaron ;   et al. | 2017-01-12 |
Protecting anodes from passivation in alloy plating systems Grant 9,534,308 - Chua , et al. January 3, 2 | 2017-01-03 |
Apparatus And Method For Modulating Azimuthal Uniformity In Electroplating App 20160362809 - Graham; Gabriel Hay ;   et al. | 2016-12-15 |
Apparatus And Method For Electodeposition Of Metals With The Use Of An Ionically Resistive Ionically Permeable Element Having Spatially Tailored Resistivity App 20160333495 - Kagajwala; Burhanuddin ;   et al. | 2016-11-17 |
Cleaning electroplating substrate holders using reverse current deplating Grant 9,476,139 - Chua , et al. October 25, 2 | 2016-10-25 |
Dynamic Modulation Of Cross Flow Manifold During Electroplating App 20160265132 - Graham; Gabriel Hay ;   et al. | 2016-09-15 |
Apparatus And Method For Dynamic Control Of Plated Uniformity With The Use Of Remote Electric Current App 20160215408 - Kagajwala; Burhanuddin ;   et al. | 2016-07-28 |
Apparatuses and methods for controlling PH in electroplating baths Grant 9,359,688 - Chua , et al. June 7, 2 | 2016-06-07 |
Automated Cleaning Of Wafer Plating Assembly App 20160145761 - Mayer; Steven T. ;   et al. | 2016-05-26 |
Automated cleaning of wafer plating assembly Grant 9,221,081 - Mayer , et al. December 29, 2 | 2015-12-29 |
Methods And Apparatus For Wetting Pretreatment For Through Resist Metal Plating App 20140230860 - Chua; Lee Peng ;   et al. | 2014-08-21 |
Protecting Anodes From Passivation In Alloy Plating Systems App 20130334052 - Chua; Lee Peng ;   et al. | 2013-12-19 |
Methods And Apparatuses For Cleaning Electroplating Substrate Holders App 20130292254 - Kumar; Santosh ;   et al. | 2013-11-07 |
Cleaning Electroplating Substrate Holders Using Reverse Current Deplating App 20130256146 - Chua; Lee Peng ;   et al. | 2013-10-03 |
Transferring heat in loadlocks Grant 8,288,288 - Gage , et al. October 16, 2 | 2012-10-16 |