Chu; Yin-Shen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chu; Yin-Shen.The latest application filed is for "prevention of trench photoresist scum".

Company Profile

0.4.5

Chu; Yin-Shen - Taichung TW
Chu; Yin-Shen - Taichung City TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Prevention of trench photoresist scum Grant 7,820,553 - Chu , et al. October 26, 2	2010-10-26
Prevention of trench photoresist scum App 20070020921 - Chu; Yin-Shen ; et al.	2007-01-25
Method for selectively controlling damascene CD bias Grant 6,972,258 - Chu , et al. December 6, 2	2005-12-06
Method for removing polymeric residue contamination on semiconductor feature sidewalls Grant 6,884,728 - Huang , et al. April 26, 2	2005-04-26
Method for selectively controlling damascene CD bias App 20050032354 - Chu, Yin-Shen ; et al.	2005-02-10
Pre-etching plasma treatment to form dual damascene with improved profile App 20040192058 - Chu, Yin-Shen ; et al.	2004-09-30
Method for protecting a wafer backside from etching damage Grant 6,777,334 - Shiu , et al. August 17, 2	2004-08-17
Method for removing polymeric residue contamination on semiconductor feature sidewalls App 20040087167 - Huang, Jun-Lung ; et al.	2004-05-06
Method for protecting a wafer backside from etching damage App 20040018732 - Shiu, Le Der ; et al.	2004-01-29

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