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Patent applications and USPTO patent grants for CHU; Schubert.The latest application filed is for "methods and apparatus for metal silicide deposition".
Patent | Date |
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Methods And Apparatus For Metal Silicide Deposition App 20220005704 - LI; Xuebin ;   et al. | 2022-01-06 |
Methods And Apparatus For Metal Silicide Deposition App 20220005705 - LI; Xuebin ;   et al. | 2022-01-06 |
Purged viewport for quartz dome in epitaxy reactor Grant 11,189,508 - Hu , et al. November 30, 2 | 2021-11-30 |
Methods and apparatus for metal silicide deposition Grant 11,152,221 - Li , et al. October 19, 2 | 2021-10-19 |
Methods for depositing metallic iridium and iridium silicide Grant 11,124,874 - Chung , et al. September 21, 2 | 2021-09-21 |
Structure & Material Engineering Methods For Optoelectronic Devices Signal To Noise Ratio Enhancement App 20210265416 - CHEN; Papo ;   et al. | 2021-08-26 |
Liner for processing chamber Grant 11,021,790 - Cong , et al. June 1, 2 | 2021-06-01 |
Method For Forming Silicon-phosphorous Materials App 20200399784 - Sanchez; Errol Antonio C ;   et al. | 2020-12-24 |
Methods And Apparatus For Metal Silicide Deposition App 20200266068 - LI; Xuebin ;   et al. | 2020-08-20 |
Methods For Depositing Metallic Iridium And Iridium Silicide App 20200131633 - CHUNG; Hua ;   et al. | 2020-04-30 |
Purged Viewport For Quartz Dome In Epitaxy Reactor App 20200105554 - HU; Ji-Dih ;   et al. | 2020-04-02 |
Liner For Processing Chamber App 20200040451 - CONG; Zhepeng ;   et al. | 2020-02-06 |
Low Temperature Deposition Of Iridium Containing Films App 20190078203 - Liu; Feng Q. ;   et al. | 2019-03-14 |
Methods for depositing oxygen deficient metal films Grant 9,011,973 - Chu , et al. April 21, 2 | 2015-04-21 |
Methods For Depositing Oxygen Deficient Metal Films App 20140017403 - Chu; Schubert ;   et al. | 2014-01-16 |
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