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Method of fabricating semiconductor device having multiple gate dielectric layers and semiconductor device fabricated thereby Grant 7,846,790 - Kang , et al. December 7, 2 | 2010-12-07 |
Inkjet print head and method of fabricating the same Grant 7,726,777 - Min , et al. June 1, 2 | 2010-06-01 |
Electrode line structure having fine line width and method of forming the same Grant 7,510,969 - Lee , et al. March 31, 2 | 2009-03-31 |
MEMS tunable capacitor with a wide tuning range Grant 7,394,641 - Won , et al. July 1, 2 | 2008-07-01 |
Method Of Fabricating Semiconductor Device Having Multiple Gate Dielectric Layers And Semiconductor Device Fabricated Thereby App 20080099856 - Kang; Sung-Gun ;   et al. | 2008-05-01 |
Electrode line structure having fine line width and method of forming the same App 20070166885 - Lee; Joo-won ;   et al. | 2007-07-19 |
Method of fabricating MEMS tunable capacitor with wide tuning range Grant 7,203,052 - Won , et al. April 10, 2 | 2007-04-10 |
Electrode line structure having fine line width and method of forming the same Grant 7,180,190 - Lee , et al. February 20, 2 | 2007-02-20 |
MEMS tunable capacitor with a wide tuning range App 20060215348 - Won; Seok-Jun ;   et al. | 2006-09-28 |
Method of fabricating MEMS tunable capacitor with wide tuning range App 20060187611 - Won; Seok-Jun ;   et al. | 2006-08-24 |
Method for forming silicon dioxide film using siloxane Grant 7,084,076 - Park , et al. August 1, 2 | 2006-08-01 |
Inkjet print head and method of fabricating the same App 20060103693 - Min; Jae-Sik ;   et al. | 2006-05-18 |
MEMS tunable capacitor with a wide tuning range and method of fabricating the same Grant 7,042,698 - Won , et al. May 9, 2 | 2006-05-09 |
Semiconductor device with silicon dioxide layers formed using atomic layer deposition App 20060040510 - Lee; Joo-won ;   et al. | 2006-02-23 |
Methods for forming silicon dioxide layers on substrates using atomic layer deposition Grant 6,992,019 - Lee , et al. January 31, 2 | 2006-01-31 |
Method of forming fine patterns using silicon oxide layer Grant 6,989,231 - Park , et al. January 24, 2 | 2006-01-24 |
MEMS tunable capacitor with a wide tuning range and method of fabricating the same App 20050168910 - Won, Seok-Jun ;   et al. | 2005-08-04 |
Semiconductor device having an etch stopper formed of a SiN layer by low temperature ALD and method of fabricating the same App 20050146037 - Chu, Kang-soo ;   et al. | 2005-07-07 |
Semiconductor device having an etch stopper formed of a SiN layer by low temperature ALD and method of fabricating the same App 20050142781 - Chu, Kang-soo ;   et al. | 2005-06-30 |
Semiconductor device having an etch stopper formed of a sin layer by low temperature ALD and method of fabricating the same Grant 6,858,533 - Chu , et al. February 22, 2 | 2005-02-22 |
Method of manufacturing CMOS transistor with LDD structure App 20040180483 - Park, Jae-eun ;   et al. | 2004-09-16 |
Method for forming silicon dioxide film using siloxane App 20040180557 - Park, Jae-eun ;   et al. | 2004-09-16 |
Atomic layer deposition apparatus and method for preventing generation of solids in exhaust path App 20040107897 - Lee, Seung-Hwan ;   et al. | 2004-06-10 |
Electrode line structure having fine line width and method of forming the same App 20040056292 - Lee, Joo-Won ;   et al. | 2004-03-25 |
Semiconductor device having an etch stopper formed of a SiN layer by low temperature ALD and method of fabricating the same App 20040046189 - Chu, Kang-Soo ;   et al. | 2004-03-11 |
Method of forming fine patterns using silicon oxide layer App 20040029052 - Park, Jae-eun ;   et al. | 2004-02-12 |
Methods for forming silicon dioxide layers on substrates using atomic layer deposition App 20040018694 - Lee, Joo-won ;   et al. | 2004-01-29 |