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Patent applications and USPTO patent grants for Chouno; Yasuhiro.The latest application filed is for "substrate processing apparatus".
Patent | Date |
---|---|
Substrate processing apparatus Grant 8,978,670 - Minamida , et al. March 17, 2 | 2015-03-17 |
Substrate Processing Apparatus App 20110079252 - MINAMIDA; Junya ;   et al. | 2011-04-07 |
Substrate processing method and substrate processing system Grant 7,445,689 - Yoshida , et al. November 4, 2 | 2008-11-04 |
Process system, process liquid supply method, and process liquid supply program App 20070134822 - Yamamoto; Shu ;   et al. | 2007-06-14 |
Substrate processing device Grant 7,180,035 - Ito , et al. February 20, 2 | 2007-02-20 |
Substrate processing apparatus and substrate processing method Grant 7,086,410 - Chouno , et al. August 8, 2 | 2006-08-08 |
Substrate processing device App 20060110143 - Ito; Norihiro ;   et al. | 2006-05-25 |
Substrate processing container App 20060102210 - Chouno; Yasuhiro ;   et al. | 2006-05-18 |
Substrate processing method and substrate processing system App 20040069226 - Yoshida, Masahiro ;   et al. | 2004-04-15 |
Substrate processing apparatus and substrate processing method App 20030170949 - Chouno, Yasuhiro ;   et al. | 2003-09-11 |
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