Chou; Pei-Fen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chou; Pei-Fen.The latest application filed is for "novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (fsg) film".

Company Profile

0.4.4

Chou; Pei-Fen - Hsin Chu TW
Chou, Pei-Fen - Hsin-Chu City TW
Chou; Pei-Fen - Chiayih TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for determining two dimensional doping profiles with SIMS Grant 6,890,772 - Liu , et al. May 10, 2	2005-05-10
Novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (FSG) film App 20050009367 - Cheng, Yi-Lung ; et al.	2005-01-13
Method of wet etching low dielectric constant materials Grant 6,780,783 - Lai , et al. August 24, 2	2004-08-24
Method for removing residual fluorine in HDP-CVD chamber Grant 6,602,560 - Cheng , et al. August 5, 2	2003-08-05
Method and apparatus for determining two dimensional doping profiles with SIMS App 20030127601 - Liu, Chin-Kai ; et al.	2003-07-10
Method for reducing contaminants in a CVD chamber App 20030068448 - Cheng, Yi-Lung ; et al.	2003-04-10
Method of wet etching low dielectric constant materials App 20030049938 - Lai, Jane-Bai ; et al.	2003-03-13
Low temperature formation of palladium silicided shallow junctions using implant through metal/silicide technology Grant 5,624,867 - Cheng , et al. April 29, 1	1997-04-29

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