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Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film
Grant 9,466,476 - Sato , et al. October 11, 2 | 2016-10-11 |
Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film
Grant 9,460,913 - Sato , et al. October 4, 2 | 2016-10-04 |
Film Forming Apparatus
App 20160024654 - FUKUSHIMA; Kohei ; et al. | 2016-01-28 |
Film-forming Method For Forming Silicon Oxide Film On Tungsten Film Or Tungsten Oxide Film
App 20150332917 - SATO; Jun ; et al. | 2015-11-19 |
Vertical Heat Treatment Apparatus, Method Of Operating Vertical Heat Treatment Apparatus, And Storage Medium
App 20150259799 - MOTOYAMA; Yutaka ; et al. | 2015-09-17 |
Film-forming Method For Forming Silicon Oxide Film On Tungsten Film Or Tungsten Oxide Film
App 20150087161 - SATO; Jun ; et al. | 2015-03-26 |
Film-forming Method For Forming Silicon Oxide Film On Tungsten Film Or Tungsten Oxide Film
App 20140199839 - SATO; Jun ; et al. | 2014-07-17 |
Film deposition method and apparatus
Grant 8,734,901 - Suzuki , et al. May 27, 2 | 2014-05-27 |
Thin Film Forming Apparatus And Computer-readable Medium
App 20140090594 - IKEUCHI; Toshiyuki ; et al. | 2014-04-03 |
Multilayer sidewall spacer for seam protection of a patterned structure
Grant 8,673,725 - O'Meara , et al. March 18, 2 | 2014-03-18 |
Dual sidewall spacer for seam protection of a patterned structure
Grant 8,664,102 - O'Meara , et al. March 4, 2 | 2014-03-04 |
Film deposition method
Grant 8,658,247 - Ikeuchi , et al. February 25, 2 | 2014-02-25 |
Thin film forming method, thin film forming apparatus, and program
Grant 8,642,486 - Ikeuchi , et al. February 4, 2 | 2014-02-04 |
SiCN film formation method and apparatus
Grant 8,591,989 - Chou , et al. November 26, 2 | 2013-11-26 |
Vertical film formation apparatus and method for using same
Grant 8,563,096 - Matsunaga , et al. October 22, 2 | 2013-10-22 |
Micro pattern forming method
Grant 8,383,522 - Nakajima , et al. February 26, 2 | 2013-02-26 |
Film formation method and apparatus for semiconductor process
Grant 8,343,594 - Hasebe , et al. January 1, 2 | 2013-01-01 |
SiCN FILM FORMATION METHOD AND APPARATUS
App 20120282418 - CHOU; Pao-Hwa ; et al. | 2012-11-08 |
Film Deposition Method And Apparatus
App 20120269969 - SUZUKI; Keisuke ; et al. | 2012-10-25 |
Film Deposition Method And Film Deposition Apparatus
App 20120190215 - IKEUCHI; Toshiyuki ; et al. | 2012-07-26 |
Film formation method and apparatus
Grant 8,216,648 - Matsunaga , et al. July 10, 2 | 2012-07-10 |
Film-forming Method And Film-forming Apparatus For Forming Silicon Oxide Film On Tungsten Film Or Tungsten Oxide Film
App 20120164327 - SATO; Jun ; et al. | 2012-06-28 |
Thin Film Forming Method, Thin Film Forming Apparatus, And Program
App 20120164847 - IKEUCHI; Toshiyuki ; et al. | 2012-06-28 |
Film formation method and apparatus for semiconductor process
Grant 8,178,448 - Nodera , et al. May 15, 2 | 2012-05-15 |
Patterning method
Grant 8,168,375 - Nakajima , et al. May 1, 2 | 2012-05-01 |
Film formation method and apparatus for semiconductor process
Grant 8,080,290 - Hasebe , et al. December 20, 2 | 2011-12-20 |
Film Formation Method And Film Formation Apparatus
App 20110281443 - CHOU; Pao-Hwa ; et al. | 2011-11-17 |
Film formation method and apparatus for forming silicon-containing insulating film doped with metal
Grant 8,034,673 - Kadonaga , et al. October 11, 2 | 2011-10-11 |
Dual Sidewall Spacer For Seam Protection Of A Patterned Structure
App 20110241085 - O'Meara; David L. ; et al. | 2011-10-06 |
Multilayer Sidewall Spacer For Seam Protection Of A Patterned Structure
App 20110241128 - O'Meara; David L. ; et al. | 2011-10-06 |
Micro Pattern Forming Method
App 20110237082 - Nakajima; Shigeru ; et al. | 2011-09-29 |
Film formation apparatus for semiconductor process and method for using the same
Grant 8,025,931 - Chou , et al. September 27, 2 | 2011-09-27 |
Patterning method
Grant 7,989,354 - Nakajima , et al. August 2, 2 | 2011-08-02 |
Film formation method and apparatus for semiconductor process
Grant 7,964,241 - Hasebe , et al. June 21, 2 | 2011-06-21 |
Film formation apparatus and method for semiconductor process
Grant 7,959,733 - Hasebe , et al. June 14, 2 | 2011-06-14 |
Vertical Film Formation Apparatus And Method For Using Same
App 20110129618 - MATSUNAGA; Masanobu ; et al. | 2011-06-02 |
Film Formation Method And Apparatus
App 20110129619 - Matsunaga; Masanobu ; et al. | 2011-06-02 |
Film Formation Method And Apparatus For Semiconductor Process
App 20100304574 - NODERA; Nobutake ; et al. | 2010-12-02 |
Method and apparatus for forming silicon-containing insulating film
Grant 7,758,920 - Hasebe , et al. July 20, 2 | 2010-07-20 |
Patterning method utilizing SiBN and photolithography
Grant 7,754,622 - Chou , et al. July 13, 2 | 2010-07-13 |
Patterning Method
App 20100130015 - Nakajima; Shigeru ; et al. | 2010-05-27 |
Method for manufacturing semiconductor device
Grant 7,718,497 - Akasaka , et al. May 18, 2 | 2010-05-18 |
Patterning Method
App 20100112496 - Nakajima; Shigeru ; et al. | 2010-05-06 |
Patterning Method
App 20100112796 - Chou; Pao-Hwa ; et al. | 2010-05-06 |
Film Formation Apparatus And Method For Semiconductor Process
App 20090275150 - Hasebe; Kazuhide ; et al. | 2009-11-05 |
Film Formation Method And Apparatus For Forming Silicon-containing Insulating Film Doped With Metal
App 20090263975 - KADONAGA; Kentaro ; et al. | 2009-10-22 |
Film formation method and apparatus for semiconductor process
App 20090191722 - Hasebe; Kazuhide ; et al. | 2009-07-30 |
Film formation method and apparatus for semiconductor process
Grant 7,507,676 - Chou , et al. March 24, 2 | 2009-03-24 |
Film formation method and apparatus for semiconductor process
App 20080311760 - Nodera; Nobutake ; et al. | 2008-12-18 |
Film formation method and apparatus for semiconductor process for forming a silicon nitride film
Grant 7,462,571 - Hasebe , et al. December 9, 2 | 2008-12-09 |
Method For Manufacturing Semiconductor Device
App 20080299728 - Akasaka; Yasushi ; et al. | 2008-12-04 |
Film Formation Method And Apparatus For Semiconductor Process
App 20080274302 - Hasebe; Kazuhide ; et al. | 2008-11-06 |
SiCN film formation method and apparatus
App 20080213479 - Chou; Pao-Hwa ; et al. | 2008-09-04 |
Film formation method and apparatus for semiconductor process
Grant 7,351,668 - Chou , et al. April 1, 2 | 2008-04-01 |
Film formation method and apparatus for semiconductor process
App 20080063791 - Hasebe; Kazuhide ; et al. | 2008-03-13 |
Film formation apparatus for semiconductor process and method for using the same
App 20080014758 - Chou; Pao-Hwa ; et al. | 2008-01-17 |
Film formation apparatus and method for semiconductor process
Grant 7,300,885 - Hasebe , et al. November 27, 2 | 2007-11-27 |
Film Formation Method And Apparatus For Semiconductor Process
App 20070167028 - CHOU; Pao-Hwa ; et al. | 2007-07-19 |
Method and apparatus for forming silicon-containing insulating film
App 20070032047 - Hasebe; Kazuhide ; et al. | 2007-02-08 |
Film formation method and apparatus for semiconductor process
App 20060207504 - Hasebe; Kazuhide ; et al. | 2006-09-21 |
Film formation method and apparatus for semiconductor process
App 20060205231 - Chou; Pao-Hwa ; et al. | 2006-09-14 |
Film formation method and apparatus for semiconductor process
App 20060032443 - Hasebe; Kazuhide ; et al. | 2006-02-16 |
Film formation apparatus and method for semiconductor process
App 20050287775 - Hasebe, Kazuhide ; et al. | 2005-12-29 |
Film formation apparatus and method for semiconductor process
App 20050282365 - Hasebe, Kazuhide ; et al. | 2005-12-22 |
Method of reducing wet etch rate of silicon nitride
App 20030029839 - Chou, Pao-Hwa | 2003-02-13 |
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