Choo; Bryan K.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Choo; Bryan K..The latest application filed is for "using scatterometry to obtain measurements of in circuit structures".

Company Profile

0.13.2

Choo; Bryan K. - Mountain View CA
Choo; Bryan K. - Mountian View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Using scatterometry to obtain measurements of in circuit structures Grant 6,912,438 - Choo , et al. June 28, 2	2005-06-28
Use of scanning probe microscope for defect detection and repair Grant 6,884,999 - Yedur , et al. April 26, 2	2005-04-26
Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system Grant 6,829,380 - Choo , et al. December 7, 2	2004-12-07
Using scatterometry to obtain measurements of in circuit structures App 20040078108 - Choo, Bryan K. ; et al.	2004-04-22
Parallel plate development Grant 6,634,805 - Templeton , et al. October 21, 2	2003-10-21
Self-cleaning technique for contamination on calibration sample in SEM Grant 6,635,874 - Singh , et al. October 21, 2	2003-10-21
System and method for illuminating a semiconductor processing system Grant 6,632,283 - Singh , et al. October 14, 2	2003-10-14
Carbon nanotubes as linewidth standards for SEM & AFM Grant 6,591,658 - Yedur , et al. July 15, 2	2003-07-15
System and method to determine line edge roughness and/or linewidth Grant 6,516,528 - Choo , et al. February 11, 2	2003-02-11
UV-enhanced silylation process to increase etch resistance of ultra thin resists Grant 6,451,512 - Rangarajan , et al. September 17, 2	2002-09-17
Electron beam flood exposure technique to reduce the carbon contamination Grant 6,444,381 - Singh , et al. September 3, 2	2002-09-03
Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube Grant 6,437,329 - Yedur , et al. August 20, 2	2002-08-20
Analysis of CD-SEM signal to detect scummed/closed contact holes and lines Grant 6,373,053 - Choo , et al. April 16, 2	2002-04-16
Use of carbon nanotubes to calibrate conventional tips used in AFM Grant 6,354,133 - Yedur , et al. March 12, 2	2002-03-12
Ozone cleaning of wafers App 20010010229 - Subramanian, Ramkumar ; et al.	2001-08-02

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