loadpatents
Patent applications and USPTO patent grants for CHONG; Halbert.The latest application filed is for "methods and apparatus for processing a substrate".
Patent | Date |
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Methods And Apparatus For Processing A Substrate App 20220310364 - CHONG; Halbert ;   et al. | 2022-09-29 |
Methods And Apparatus For Processing A Substrate App 20220310363 - CHONG; Halbert ;   et al. | 2022-09-29 |
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability Grant 11,289,312 - Allen , et al. March 29, 2 | 2022-03-29 |
Extreme ultraviolet mask absorber materials Grant 11,249,390 - Liu , et al. February 15, 2 | 2022-02-15 |
Coating for chamber particle reduction Grant 11,251,024 - Tseng , et al. February 15, 2 | 2022-02-15 |
Methods And Apparatus For Processing A Substrate App 20210319989 - CHONG; Halbert ;   et al. | 2021-10-14 |
Coating For Chamber Particle Reduction App 20210043429 - TSENG; Hsin-wei ;   et al. | 2021-02-11 |
Physical Vapor Deposition (pvd) Chamber With In Situ Chamber Cleaning Capability App 20200395198 - ALLEN; ADOLPH M. ;   et al. | 2020-12-17 |
Method For Particle Removal From Wafers Through Plasma Modification In Pulsed PVD App 20200255938 - Chong; Halbert ;   et al. | 2020-08-13 |
Extreme Ultraviolet Mask Absorber Materials App 20200249557 - Kind Code | 2020-08-06 |
Wet Cleaning Inside Of Gasline Of Semiconductor Process Equipment App 20190352775 - PENG; Gang ;   et al. | 2019-11-21 |
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