Patent | Date |
---|
Thinner composition and method of removing photoresist using the same Grant 7,863,231 - Ahn , et al. January 4, 2 | 2011-01-04 |
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition Grant 7,858,527 - Kim , et al. December 28, 2 | 2010-12-28 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same Grant 7,678,751 - Park , et al. March 16, 2 | 2010-03-16 |
Methods of forming a thin film and methods of manufacturing a capacitor and a gate structure using the same Grant 7,642,200 - Lee , et al. January 5, 2 | 2010-01-05 |
Method of forming metal oxide using an atomic layer deposition process Grant 7,605,094 - Lee , et al. October 20, 2 | 2009-10-20 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process Grant 7,573,568 - Yang , et al. August 11, 2 | 2009-08-11 |
Method and apparatus for inspecting defects in multiple regions with different parameters Grant 7,433,032 - Kim , et al. October 7, 2 | 2008-10-07 |
Thinner Composition And Method Of Removing Photoresist Using The Same App 20080214422 - AHN; Seung-Hyun ;   et al. | 2008-09-04 |
Thinner composition and method of removing photoresist using the same Grant 7,387,988 - Ahn , et al. June 17, 2 | 2008-06-17 |
Method and apparatus for inspecting substrate pattern Grant 7,385,689 - Kim , et al. June 10, 2 | 2008-06-10 |
Additive Composition, Slurry Composition Including The Same, And Method Of Polishing An Object Using The Slurry Composition App 20080014838 - KIM; Nam-Soo ;   et al. | 2008-01-17 |
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device Grant 7,311,857 - Ko , et al. December 25, 2 | 2007-12-25 |
Method of Forming Metal Oxide Using an Atomic Layer Deposition Process App 20070292628 - Lee; Jung-Ho ;   et al. | 2007-12-20 |
Method and apparatus for inspecting a wafer surface Grant 7,310,140 - Eom , et al. December 18, 2 | 2007-12-18 |
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition Grant 7,288,212 - Kim , et al. October 30, 2 | 2007-10-30 |
Method and apparatus for inspecting defects Grant 7,271,890 - Kim , et al. September 18, 2 | 2007-09-18 |
Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contamination Grant 7,258,931 - Kim , et al. August 21, 2 | 2007-08-21 |
Method of forming metal oxide using an atomic layer deposition process Grant 7,250,379 - Lee , et al. July 31, 2 | 2007-07-31 |
Resist and etching by-product removing composition and resist removing method using the same Grant 7,223,721 - Park , et al. May 29, 2 | 2007-05-29 |
Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition Grant 7,183,192 - Park , et al. February 27, 2 | 2007-02-27 |
Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same Grant 7,179,537 - Lee , et al. February 20, 2 | 2007-02-20 |
Wafer carrier for minimizing contacting area with wafers App 20060216942 - Kim; Gi-Jung ;   et al. | 2006-09-28 |
Method and apparatus for inspecting a substrate Grant 7,113,274 - Yang , et al. September 26, 2 | 2006-09-26 |
Methods of forming a thin film and methods of manufacturing a capacitor and a gate structure using the same App 20060166512 - Lee; Jung-Ho ;   et al. | 2006-07-27 |
Method of measuring a level of contamination in a chemical solution and systems thereof App 20060160239 - Lee; Sung-Jae ;   et al. | 2006-07-20 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same App 20060122084 - Park; Jung-Dae ;   et al. | 2006-06-08 |
Method of inspecting defects and apparatus for performing the same App 20060082766 - Kim; Joung-Soo ;   et al. | 2006-04-20 |
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same Grant 7,027,638 - Jun , et al. April 11, 2 | 2006-04-11 |
Method and apparatus for inspecting substrate pattern App 20060039598 - Kim; Kye-Weon ;   et al. | 2006-02-23 |
Grating and clean room system comprising the same App 20060003684 - Hwang; Jung-Sung ;   et al. | 2006-01-05 |
Method of forming metal oxide using an atomic layer deposition process App 20050277223 - Lee, Jung-Ho ;   et al. | 2005-12-15 |
Methods of monitoring rinsing solutions and related systems and reagents App 20050227363 - Hwang, Dong-won ;   et al. | 2005-10-13 |
Apparatus and method for measuring substrates App 20050191768 - Yoon, Young-Jee ;   et al. | 2005-09-01 |
Thinner composition and method of removing photoresist using the same App 20050176607 - Ahn, Seung-Hyun ;   et al. | 2005-08-11 |
Method and apparatus for measuring contamination of a semiconductor substrate Grant 6,927,077 - Eom , et al. August 9, 2 | 2005-08-09 |
Electron-beam inspection apparatus and methods of inspecting through-holes using clustered nanotube arrays App 20050151456 - Yoon, Young-Jee ;   et al. | 2005-07-14 |
Method and apparatus for inspecting defects App 20050094137 - Kim, Joung-Soo ;   et al. | 2005-05-05 |
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device App 20050081883 - Ko, Yong-Kyun ;   et al. | 2005-04-21 |
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image Grant 6,870,948 - Jun , et al. March 22, 2 | 2005-03-22 |
Method and apparatus for detecting contaminants in ion-implanted wafer Grant 6,869,215 - Yang , et al. March 22, 2 | 2005-03-22 |
Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition App 20050032658 - Park, Dong-Jin ;   et al. | 2005-02-10 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process App 20050026054 - Yang, Yu-Sin ;   et al. | 2005-02-03 |
Method and apparatus for inspecting a wafer surface App 20040263836 - Eom, Tae-Min ;   et al. | 2004-12-30 |
Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus App 20040226186 - Chon, Sang-Mun ;   et al. | 2004-11-18 |
RF matching unit Grant 6,816,029 - Choi , et al. November 9, 2 | 2004-11-09 |
Method and apparatus for inspecting a substrate App 20040169851 - Yang, Yu-Sin ;   et al. | 2004-09-02 |
Method and apparatus for detecting contaminants in ion-implanted wafer App 20040105486 - Yang, Yu-Sin ;   et al. | 2004-06-03 |
Method and apparatus for measuring contamination of a semiconductor substrate App 20040100298 - Eom, Tae-Min ;   et al. | 2004-05-27 |
Method and apparatus for analyzing a sample employing fast fourier transformation App 20040086167 - Jun, Chung-Sam ;   et al. | 2004-05-06 |
Cleaning solution and method for cleaning ceramic parts using the same App 20040060579 - Kim, Jaung-Joo ;   et al. | 2004-04-01 |
Resist and etching by-product removing composition and resist removing method using the same Grant 6,713,440 - Park , et al. March 30, 2 | 2004-03-30 |
Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same Grant 6,706,646 - Lee , et al. March 16, 2 | 2004-03-16 |
Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contamination and methods of forming same App 20040041143 - Kim, Gi-Jung ;   et al. | 2004-03-04 |
Thinner composition and method of stripping a photoresist using the same Grant 6,682,876 - Ahn , et al. January 27, 2 | 2004-01-27 |
Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus App 20040010932 - Chon, Sang-Mun ;   et al. | 2004-01-22 |
System and method for drying semiconductor substrate Grant 6,655,042 - Yi , et al. December 2, 2 | 2003-12-02 |
Thinner composition and method of stripping a photoresist using the same App 20030157441 - Ahn, Seung-Hyun ;   et al. | 2003-08-21 |
Photoresist Stripper Compositions App 20030113673 - Ahn, Seung-Hyun ;   et al. | 2003-06-19 |
System and method for drying semiconductor substrate App 20030106239 - Yi, Hun-jung ;   et al. | 2003-06-12 |
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition App 20030092265 - Kim, Nam-Soo ;   et al. | 2003-05-15 |
Resist and etching by-product removing composition and resist removing method using the same App 20030078174 - Park, Dong-Jin ;   et al. | 2003-04-24 |
Method of and device for detecting micro-scratches Grant 6,528,333 - Jun , et al. March 4, 2 | 2003-03-04 |
Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same App 20030040194 - Lee, Jung-Ho ;   et al. | 2003-02-27 |
Method and apparatus for detecting thickness of thin layer formed on a wafer Grant 6,515,293 - Jun , et al. February 4, 2 | 2003-02-04 |
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same App 20020172412 - Jun, Chung-sam ;   et al. | 2002-11-21 |
Method of and device for detecting micro-scratches Grant 6,449,037 - Jun , et al. September 10, 2 | 2002-09-10 |
Method of measuring etched state of semiconductor wafer using optical impedence measurement Grant 6,440,760 - Cho , et al. August 27, 2 | 2002-08-27 |
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image App 20020072133 - Jun, Chung-Sam ;   et al. | 2002-06-13 |
RF matching unit App 20020023718 - Choi, Dae-Kyu ;   et al. | 2002-02-28 |
Use of alkoxy N-hydroxyalkyl alkanamide as resist removing agent, composition for removing resist, method for preparing the same and resist removing method using the same App 20010049346 - Park, Dong-Jin ;   et al. | 2001-12-06 |
Method of and device for detecting micro-scratches App 20010038448 - Jun, Chung-Sam ;   et al. | 2001-11-08 |
Chemical refining method and reuse system for semiconductor device manufacturing Grant 6,137,018 - Ko , et al. October 24, 2 | 2000-10-24 |
Semiconductor substrate cleaning solutions, methods of forming the same, and methods using the same Grant 5,846,921 - Gil , et al. December 8, 1 | 1998-12-08 |