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Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process Grant 7,573,568 - Yang , et al. August 11, 2 | 2009-08-11 |
Stator of linear motor Grant 7,459,810 - Jeong , et al. December 2, 2 | 2008-12-02 |
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Apparatus and method for measuring a thickness of a substrate Grant 7,355,729 - Park , et al. April 8, 2 | 2008-04-08 |
Method and apparatus for inspecting a wafer surface Grant 7,310,140 - Eom , et al. December 18, 2 | 2007-12-18 |
Apparatus and method for inspecting a substrate Grant 7,289,661 - Jun , et al. October 30, 2 | 2007-10-30 |
Method and apparatus for inspecting an edge exposure area of a wafer Grant 7,280,233 - Shin , et al. October 9, 2 | 2007-10-09 |
Apparatus for monitoring a density profile of impurities App 20070222999 - Lee; Yun-Jung ;   et al. | 2007-09-27 |
Systems and methods for measuring distance of semiconductor patterns Grant 7,274,471 - Shin , et al. September 25, 2 | 2007-09-25 |
Method and apparatus for inspecting defects Grant 7,271,890 - Kim , et al. September 18, 2 | 2007-09-18 |
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Stator of linear motor App 20060261681 - Choi; Sun Yong ;   et al. | 2006-11-23 |
Method and apparatus for inspecting a substrate Grant 7,113,274 - Yang , et al. September 26, 2 | 2006-09-26 |
Method of measuring and controlling concentration of dopants of a thin film Grant 7,046,760 - Kim , et al. May 16, 2 | 2006-05-16 |
Method and apparatus for measuring contamination of a semiconductor substrate Grant 6,927,077 - Eom , et al. August 9, 2 | 2005-08-09 |
Systems and methods for measuring distance of semiconductor patterns App 20050134867 - Shin, Koung-Su ;   et al. | 2005-06-23 |
Method and apparatus for inspecting defects App 20050094137 - Kim, Joung-Soo ;   et al. | 2005-05-05 |
Apparatus and method for measuring a thickness of a substrate App 20050083539 - Park, Hwan-Shik ;   et al. | 2005-04-21 |
Method and apparatus for detecting contaminants in ion-implanted wafer Grant 6,869,215 - Yang , et al. March 22, 2 | 2005-03-22 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process App 20050026054 - Yang, Yu-Sin ;   et al. | 2005-02-03 |
Method and apparatus for classifying defects of an object App 20050018182 - Hyun, Pil-Sik ;   et al. | 2005-01-27 |
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Method and apparatus for monitoring a density profile of impurities App 20040253750 - Jee, Yun-Jung ;   et al. | 2004-12-16 |
Method of measuring and controlling concentration of dopants of a thin film App 20040224428 - Kim, Tae-Kyoung ;   et al. | 2004-11-11 |
Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device Grant 6,815,236 - Kim , et al. November 9, 2 | 2004-11-09 |
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same Grant 6,800,863 - Jun , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for inspecting a substrate App 20040169851 - Yang, Yu-Sin ;   et al. | 2004-09-02 |
Method and apparatus for inspecting an edge exposure area of a wafer App 20040169869 - Shin, Koung-Su ;   et al. | 2004-09-02 |
Method and apparatus for detecting contaminants in ion-implanted wafer App 20040105486 - Yang, Yu-Sin ;   et al. | 2004-06-03 |
Method and apparatus for measuring contamination of a semiconductor substrate App 20040100298 - Eom, Tae-Min ;   et al. | 2004-05-27 |
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same App 20040099818 - Jun, Chung-Sam ;   et al. | 2004-05-27 |
Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device App 20040092046 - Kim, Tae-Kyoung ;   et al. | 2004-05-13 |
Method and apparatus for analyzing a sample employing fast fourier transformation App 20040086167 - Jun, Chung-Sam ;   et al. | 2004-05-06 |
Apparatus and method for inspecting a substrate App 20040086171 - Jun, Chung-Sam ;   et al. | 2004-05-06 |
Water purifier with means for indicating when filter replacement is due and for automatically initiating a membrane washing step Grant 5,676,824 - Jeon , et al. October 14, 1 | 1997-10-14 |