| Patent | Date |
|---|
Photosensitive Polymer And Resist Composition Having The Same
App 20220259354 - CHOI; Sang Jun ; et al. | 2022-08-18 |
Dry etching apparatus
Grant 11,348,802 - Choi , et al. May 31, 2 | 2022-05-31 |
Dry etching device and method for controlling same
Grant 11,348,810 - Choi , et al. May 31, 2 | 2022-05-31 |
Emergency and exigency situation notification system
Grant 11,244,557 - Choi February 8, 2 | 2022-02-08 |
High lateral to vertical ratio etch process for device manufacturing
Grant 11,031,233 - Lee , et al. June 8, 2 | 2021-06-08 |
Anti-reflective hardmask composition
Grant 10,858,533 - Choi December 8, 2 | 2020-12-08 |
Method For Calculating Food Intake And Apparatus Thereof
App 20200372999 - CHOI; Sang Jun | 2020-11-26 |
Anti-reflective Hardmask Composition
App 20200233305 - CHOI; Sang Jun ; et al. | 2020-07-23 |
Control method of dry etching apparatus
Grant 10,636,674 - Choi , et al. | 2020-04-28 |
Device fabrication via pulsed plasma
Grant 10,580,657 - Doh , et al. | 2020-03-03 |
High Lateral To Vertical Ratio Etch Process For Device Manufacturing
App 20200013610 - Lee; Kyeong Tae ; et al. | 2020-01-09 |
Device Fabrication Via Pulsed Plasma
App 20190371617 - DOH; Chang Wook ; et al. | 2019-12-05 |
High lateral to vertical ratio etch process for device manufacturing
Grant 10,460,921 - Lee , et al. Oc | 2019-10-29 |
Dry Etching Device And Method For Controlling Same
App 20190318942 - CHOI; Sang Jun ; et al. | 2019-10-17 |
Anti-reflective Hardmask Composition
App 20190309183 - CHOI; Sang Jun | 2019-10-10 |
Device fabrication via pulsed plasma
Grant 10,347,500 - Doh , et al. July 9, 2 | 2019-07-09 |
Dry Etching Apparatus
App 20190122893 - CHOI; Sang Jun ; et al. | 2019-04-25 |
Control Method Of Dry Etching Apparatus
App 20190103286 - CHOI; Sang Jun ; et al. | 2019-04-04 |
Composition of anti-reflective hardmask
Grant 10,189,947 - Choi Ja | 2019-01-29 |
Organic light emitting device and method for preparing the same
Grant 9,818,972 - Choi , et al. November 14, 2 | 2017-11-14 |
Composition of Anti-Reflective Hardmask
App 20170198096 - CHOI; Sang Jun | 2017-07-13 |
Transistor and method of operating same
Grant 9,299,783 - Yang , et al. March 29, 2 | 2016-03-29 |
Substrate and display device including the same
Grant 9,099,662 - Choi , et al. August 4, 2 | 2015-08-04 |
Image Sensor
App 20150155328 - PARK; Hae-Yong ; et al. | 2015-06-04 |
Distributed mobile phone system
Grant 9,042,843 - Choi May 26, 2 | 2015-05-26 |
Photosensitive polymer, resist composition including the photosensitive polymer and method of preparing resist pattern using the resist composition
Grant 9,023,582 - Choi May 5, 2 | 2015-05-05 |
Transistor And Method Of Operating Same
App 20150109048 - YANG; Woo-young ; et al. | 2015-04-23 |
Image sensors
Grant 8,958,002 - Choi , et al. February 17, 2 | 2015-02-17 |
Substrate And Display Device Including The Same
App 20140140015 - Choi; Sang-Jun ; et al. | 2014-05-22 |
Photosensitive Polymer, Resist Composition Including The Photosensitive Polymer And Method Of Preparing Resist Pattern Using The Resist Composition
App 20140141372 - Choi; Sang-Jun | 2014-05-22 |
Organic Light Emitting Device And Method For Preparing The Same
App 20140070195 - Choi; Sang-Jun ; et al. | 2014-03-13 |
Image Sensors
App 20140048853 - Choi; Sang-Jun ; et al. | 2014-02-20 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same
Grant 8,637,942 - Kim , et al. January 28, 2 | 2014-01-28 |
Semiconductor Device
App 20140008705 - Choi; Joon- Young ; et al. | 2014-01-09 |
Image sensor and method of fabricating the same
Grant 8,614,113 - Ahn , et al. December 24, 2 | 2013-12-24 |
Image Sensor, Image Processing System Including The Image Sensor, And Method Of Manufacturing The Image Sensor
App 20130320479 - AHN; Jung Chak ; et al. | 2013-12-05 |
High Lateral To Vertical Ratio Etch Process For Device Manufacturing
App 20130319614 - Lee; Kyeong Tae ; et al. | 2013-12-05 |
Image sensors and methods of manufacturing image sensors
Grant 8,570,409 - Choi , et al. October 29, 2 | 2013-10-29 |
Oligomer probe array and method of producing the same
Grant 8,551,759 - Hah , et al. October 8, 2 | 2013-10-08 |
High lateral to vertical ratio etch process for device manufacturing
Grant 8,529,776 - Lee , et al. September 10, 2 | 2013-09-10 |
Data recording medium for data storage and method of recording or erasing data using the same
Grant 8,507,112 - Lee , et al. August 13, 2 | 2013-08-13 |
High Lateral To Vertical Ratio Etch Process For Device Manufacturing
App 20130029490 - Lee; Kyeong Tae ; et al. | 2013-01-31 |
Storage node of a resistive random access memory device with a resistance change layer and method of manufacturing the same
Grant 8,362,455 - Choi , et al. January 29, 2 | 2013-01-29 |
Method Of Implanting Impurities And Method Of Manufacturing A Complementary Metal Oxide Semiconductor (cmos) Image Sensor Using The Same
App 20120252155 - CHOI; Sang-Jun ; et al. | 2012-10-04 |
Apparatus For Measuring Compound Using Photo-ionization Detector
App 20120241636 - Ahn; Jae-Kyoung ; et al. | 2012-09-27 |
Nonvolatile memory device
Grant 8,247,788 - Seol , et al. August 21, 2 | 2012-08-21 |
Image Sensor And Method Of Fabricating The Same
App 20120077301 - Ahn; Yu-Jin ; et al. | 2012-03-29 |
Image projecting apparatus
Grant 8,128,236 - Kim , et al. March 6, 2 | 2012-03-06 |
Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same
Grant 8,106,394 - Lee , et al. January 31, 2 | 2012-01-31 |
Methods of forming semiconductor devices formed by processes including the use of specific etchant solutions
Grant 8,092,698 - Kim , et al. January 10, 2 | 2012-01-10 |
Photosensitive polymer, resist composition, and associated methods
Grant 8,017,301 - Choi , et al. September 13, 2 | 2011-09-13 |
(Meth)acrylate compound having aromatic acid labile group, photosensitive polymer, resist composition, and associated methods
Grant 7,993,810 - Choi , et al. August 9, 2 | 2011-08-09 |
Resistive random access memory device
Grant 7,985,961 - Choi , et al. July 26, 2 | 2011-07-26 |
Polymer For Protective Layer Of Resist, And Polymer Composition Including The Same
App 20110123925 - YUN; Sang-Geun ; et al. | 2011-05-26 |
Polymer, Composition For Protective Layer, And Patterning Method Using The Same
App 20110123933 - YUN; Sang-Geun ; et al. | 2011-05-26 |
Distributed Mobile Phone System
App 20110111748 - Choi; Sang Jun | 2011-05-12 |
Image Sensors and Methods of Manufacturing Image Sensors
App 20110096215 - Choi; Sang-Jun ; et al. | 2011-04-28 |
Wire structure and semiconductor device comprising the wire structure
Grant 7,932,543 - Choi , et al. April 26, 2 | 2011-04-26 |
(Meth)acrylate compound, photosensitive polymer, and resist composition
App 20110045405 - Lee; Sung-Jae ; et al. | 2011-02-24 |
Method for fabricating a three-dimensional capacitor
Grant 7,888,231 - Lee , et al. February 15, 2 | 2011-02-15 |
Photoresist composition with high etching resistance
App 20100239982 - Choi; Sang-Jun ; et al. | 2010-09-23 |
Nonvolatile memory device
App 20100237312 - Seol; Kwang-soo ; et al. | 2010-09-23 |
Copolymer and photoresist composition including the same
App 20100233620 - Choi; Sang-Jun ; et al. | 2010-09-16 |
(Meth)acrylate compound, photosensitive polymer, and resist composition including the same
App 20100167200 - Choi; Sang-Jun ; et al. | 2010-07-01 |
(Meth)acrylate compound, photosensitive polymer, and resist composition including the same
App 20100151388 - Yang; Young-Soo ; et al. | 2010-06-17 |
Method for fabricating a three-dimensional capacitor
Grant 7,732,851 - Lee , et al. June 8, 2 | 2010-06-08 |
Resistive RAM having at least one varistor and methods of operating the same
Grant 7,714,313 - Lee , et al. May 11, 2 | 2010-05-11 |
Non-linear silicon compound, method of manufacturing oligomer probe array using the same, substrate for oligomer probe array with the same, and oligomer probe array with the same
Grant 7,713,634 - Chi , et al. May 11, 2 | 2010-05-11 |
PAA-based etchant, methods of using same, and resultant structures
Grant 7,709,277 - Lee , et al. May 4, 2 | 2010-05-04 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same
Grant 7,700,496 - Kim , et al. April 20, 2 | 2010-04-20 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same
App 20100019292 - Kim; Sang-Yong ; et al. | 2010-01-28 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
Grant 7,642,042 - Hata , et al. January 5, 2 | 2010-01-05 |
Image Projecting Apparatus
App 20090290131 - Kim; Jin Sub ; et al. | 2009-11-26 |
Resistive random access memory device
Grant 7,619,915 - Lee , et al. November 17, 2 | 2009-11-17 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
Grant 7,604,917 - Choi , et al. October 20, 2 | 2009-10-20 |
Photosensitive polymer and photoresist composition having the same
Grant 7,604,918 - Choi , et al. October 20, 2 | 2009-10-20 |
Insulating layer patterning method, insulating layer formed by the insulating layer patterning method, display device having the insulating layer
Grant 7,579,283 - Choi , et al. August 25, 2 | 2009-08-25 |
Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same
App 20090194764 - Lee; Jung-hyun ; et al. | 2009-08-06 |
Photolabile compound and substrate for oligomer probe array with the same
Grant 7,566,773 - Chi , et al. July 28, 2 | 2009-07-28 |
Cleaning solution and cleaning method of a semiconductor device
Grant 7,562,662 - Kim , et al. July 21, 2 | 2009-07-21 |
(Meth)acrylate compound having aromatic acid labile group, photosensitive polymer, resist composition, and associated methods
App 20090170029 - Choi; Sang-Jun ; et al. | 2009-07-02 |
Photosensitive polymer, resist composition, and associated methods
App 20090155720 - Choi; Sang-Jun ; et al. | 2009-06-18 |
Aromatic (meth)acrylate compound having an alpha-hydroxy, photosensitive polymer, resist compositions, and associated methods
App 20090155719 - Choi; Sang-Jun ; et al. | 2009-06-18 |
Semiconductor capacitor structure and method for manufacturing the same
Grant 7,544,985 - Shim , et al. June 9, 2 | 2009-06-09 |
Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution
Grant 7,531,491 - Min , et al. May 12, 2 | 2009-05-12 |
Wheel alignment and vehicle height adjusting apparatus
Grant 7,527,275 - Choi May 5, 2 | 2009-05-05 |
Apparatus and method of transmitting ATM cells in an ATM network based mobile communication system
Grant 7,522,610 - Choi April 21, 2 | 2009-04-21 |
Nonvolatile variable resistance memory device and method of fabricating the same
Grant 7,518,213 - Bae , et al. April 14, 2 | 2009-04-14 |
Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip
Grant 7,507,958 - Choi , et al. March 24, 2 | 2009-03-24 |
Etching Solution For Removal Of Oxide Film, Method For Preparing The Same, And Method Of Fabricating Semiconductor Device
App 20090023265 - MUN; CHANG-SUP ; et al. | 2009-01-22 |
Methods Of Forming Semiconductor Devices Formed By Processes Including The Use Of Specific Etchant Solutions
App 20080314868 - Kim; Yu-Kyung ; et al. | 2008-12-25 |
Barrier coating compositions containing fluorine and methods of forming photoresist patterns using such compositions
Grant 7,468,235 - Hata , et al. December 23, 2 | 2008-12-23 |
Alternating Current Driving Type Quantum Dot Electroluminescent Device
App 20080309234 - CHO; KYUNG SANG ; et al. | 2008-12-18 |
Method of fabricating semiconductor memory device having plurality of storage node electrodes
Grant 7,459,370 - Kang , et al. December 2, 2 | 2008-12-02 |
Cell switching method and system
Grant 7,443,863 - Choi October 28, 2 | 2008-10-28 |
Cleaning solution of silicon germanium layer and cleaning method using the same
Grant 7,435,301 - Mun , et al. October 14, 2 | 2008-10-14 |
Method of manufacturing capacitor of semiconductor device
Grant 7,435,644 - Shim , et al. October 14, 2 | 2008-10-14 |
Method of depositing noble metal electrode using oxidation-reduction reaction
Grant 7,435,678 - Lee , et al. October 14, 2 | 2008-10-14 |
Data recording medium for data storage and method of recording or erasing data using the same
App 20080199719 - Lee; Jung-hyun ; et al. | 2008-08-21 |
Storage node of a resistive random access memory device and method of manufacturing the same
App 20080169459 - Choi; Sang-jun ; et al. | 2008-07-17 |
Wire structure and semiconductor device comprising the the wire structure
App 20080169118 - Choi; Sang-jun ; et al. | 2008-07-17 |
Resistive random access memory devices and methods of manufacturing the same
App 20080170427 - Choi; Sang-jun ; et al. | 2008-07-17 |
Biochip Kits And Methods Of Testing Biological Samples Using The Same
App 20080167200 - Hah; Jung-hwan ; et al. | 2008-07-10 |
Resistive random access memory device
App 20080157055 - Lee; Jung-hyun ; et al. | 2008-07-03 |
Coating Compositions for Use in Forming Patterns and Methods of Forming Patterns
App 20080113300 - Choi; Sang-jun ; et al. | 2008-05-15 |
Probe array and associated methods
App 20080113876 - Kim; Won-sun ; et al. | 2008-05-15 |
Inkjet Printhead Heater And Method Of Manufacture
App 20080094455 - LEE; Jung-hyun ; et al. | 2008-04-24 |
Barrier coating compositions containing silicon and methods of forming photoresist patterns using the same
Grant 7,361,612 - Choi , et al. April 22, 2 | 2008-04-22 |
Resistive memory devices having a CMOS compatible electrolyte layer and methods of operating the same
App 20080089120 - Choi; Sang-jun ; et al. | 2008-04-17 |
Non-Linear Silicon Compound, Method of Manufacturing Oligomer Probe Array Using the Same, Substrate For Oligomer Probe Array With the Same, and Oligomer Probe Array With the Same
App 20080057322 - Chi; Sung-min ; et al. | 2008-03-06 |
Photolabile Compound and Substrate for Oligomer Probe Array with the Same
App 20080057489 - Chi; Sung-Min ; et al. | 2008-03-06 |
Microarrays including probe cells formed within substrates and methods of making the same
App 20080051298 - Kim; Won-sun ; et al. | 2008-02-28 |
Oligomer Probe Array and Method of Producing the Same
App 20080038732 - Hah; Jung-Hwan ; et al. | 2008-02-14 |
Apparatus for drying substrate and method thereof
Grant 7,322,385 - Kim , et al. January 29, 2 | 2008-01-29 |
Nonvolatile variable resistance memory device and method of fabricating the same
App 20080002458 - Bae; Hyung-jin ; et al. | 2008-01-03 |
Patterned magnetic recording medium and method of manufacturing the same
App 20070297091 - Choi; Sang-jun ; et al. | 2007-12-27 |
Focusing/zooming apparatus for optical projection device and projection optical system
App 20070296931 - Choi; Sang-jun ; et al. | 2007-12-27 |
Cleaning composition and method of cleaning a semiconductor device using the same
Grant 7,309,683 - Mun , et al. December 18, 2 | 2007-12-18 |
Negative resist composition comprising hydroxy-substituted base polymer and Si-containing crosslinker having epoxy ring and a method for patterning semiconductor devices using the same
Grant 7,270,936 - Choi September 18, 2 | 2007-09-18 |
Methods for cleaning a semiconductor substrate having a recess channel region
Grant 7,262,141 - Ko , et al. August 28, 2 | 2007-08-28 |
Nonvolatile memory device, layer deposition apparatus and method of fabricating a nonvolatile memory device using the same
App 20070196984 - Lee; Jung-hyun ; et al. | 2007-08-23 |
Insulating layer patterning method, insulating layer formed by the insulating layer patterning method, display device having the insulating layer
App 20070184667 - Choi; Sang-jun ; et al. | 2007-08-09 |
Cleaning Solution and Cleaning Method of a Semiconductor Device
App 20070181150 - KIM; Sang-Yong ; et al. | 2007-08-09 |
Resistive random access memory device including an amorphous solid electrolyte layer
App 20070176264 - Lee; Jung-hyun ; et al. | 2007-08-02 |
Photosensitive polymer and photoresist composition having the same
App 20070172760 - Choi; Sang-jun ; et al. | 2007-07-26 |
Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip
App 20070164214 - Choi; Sang-jun ; et al. | 2007-07-19 |
Resistive RAM having at least one varistor and methods of operating the same
App 20070165434 - Lee; Jung-Hyun ; et al. | 2007-07-19 |
Resist composition comprising photosensitive polymer having lactone in its backbone
Grant 7,241,552 - Yoon , et al. July 10, 2 | 2007-07-10 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
App 20070155925 - Hata; Mitsuhiro ; et al. | 2007-07-05 |
Negative resist composition comprising base polymer having epoxy ring and si-containing crosslinker and patterning method for semiconductor device using the same
Grant 7,226,725 - Choi June 5, 2 | 2007-06-05 |
PAA-based etchant, methods of using same, and resultant structures
App 20070111532 - Lee; Hyo-san ; et al. | 2007-05-17 |
Cleaning solution and cleaning method of a semiconductor device
Grant 7,216,653 - Kim , et al. May 15, 2 | 2007-05-15 |
Method of fabricating semiconductor memory device having plurality of storage node electrodes
App 20070082471 - Kang; Dae-hyuk ; et al. | 2007-04-12 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
App 20070082297 - Choi; Sang-Jun ; et al. | 2007-04-12 |
Photosensitive polymer including fluorine and resist composition containing the same
Grant 7,202,011 - Yoon , et al. April 10, 2 | 2007-04-10 |
Barrier coating compositions containing silicon and methods of forming photoresist patterns using the same
App 20070048672 - Choi; Sang-Jun ; et al. | 2007-03-01 |
Coating compositions for use in forming patterns and methods of forming patterns
App 20070048670 - Choi; Sang-jun ; et al. | 2007-03-01 |
Barrier coating compositions containing fluorine and methods of forming photoresist patterns using such compositions
App 20070048671 - Hata; Mitsuhiro ; et al. | 2007-03-01 |
Barrier coating compositions for photoresist and methods of forming photoresist patterns using the same
App 20070037068 - Choi; Sang-Jun ; et al. | 2007-02-15 |
PAA-based etchant, methods of using same, and resultant structures
Grant 7,176,041 - Lee , et al. February 13, 2 | 2007-02-13 |
Methods for forming fine pattern of semiconductor device
Grant 7,172,974 - Choi , et al. February 6, 2 | 2007-02-06 |
Phase change memory device and method of operating the same
Grant 7,170,777 - Choi , et al. January 30, 2 | 2007-01-30 |
Nano wires and method of manufacturing the same
App 20060269745 - Lee; Eun-kyung ; et al. | 2006-11-30 |
Cleaning solution and cleaning method of a semiconductor device
App 20060270575 - Kim; Sang-Yong ; et al. | 2006-11-30 |
Method of fabricating flash memory with u-shape floating gate
App 20060246666 - Han; Jeong-nam ; et al. | 2006-11-02 |
Silicon-containing polymer, negative type resist composition comprising the same, and patterning method for semiconductor device using the same
Grant 7,129,015 - Choi October 31, 2 | 2006-10-31 |
Method of manufacturing a semiconductor device using a polysilicon etching mask
Grant 7,122,478 - Han , et al. October 17, 2 | 2006-10-17 |
Cleaning solution and method of forming a metal pattern for a semiconductor device using the same
App 20060228890 - Lee; Hyo-san ; et al. | 2006-10-12 |
Negative resist composition comprising base polymer having epoxy ring and si-containing crosslinker and patterning method for semiconductor device using the same
App 20060204897 - Choi; Sang-Jun | 2006-09-14 |
Cleaning solution and cleaning method of a semiconductor device
Grant 7,105,475 - Kim , et al. September 12, 2 | 2006-09-12 |
Negative resist composition comprising hydroxy-substituted base polymer and si-containing crosslinker having epoxy ring and a method for patterning semiconductor devices using the same
Grant 7,105,271 - Choi September 12, 2 | 2006-09-12 |
Method of manufacturing capacitor of semiconductor device
App 20060189064 - Shim; Woo-Gwan ; et al. | 2006-08-24 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same
App 20060189148 - Kim; Sang-Yong ; et al. | 2006-08-24 |
Etching solution for removal of oxide film, method for preparing the same, and method of fabricating semiconductor device
App 20060183297 - Mun; Chang-Sup ; et al. | 2006-08-17 |
Alignment system used in nano-imprint lithography and nano imprint lithography method using the alignment system
App 20060172229 - Choi; Sang-jun ; et al. | 2006-08-03 |
Microelectronic cleaning agent(s) and method(s) of fabricating semiconductor device(s) using the same
App 20060172907 - Kim; Sang-Yong ; et al. | 2006-08-03 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
Grant 7,084,227 - Jung , et al. August 1, 2 | 2006-08-01 |
Negative resist composition comprising base polymer having epoxy ring and Si-containing crosslinker and patterning method for semiconductor device using the same
Grant 7,078,156 - Choi July 18, 2 | 2006-07-18 |
Wheel alignment and vehicle height adjusting apparatus
App 20060125198 - Choi; Sang-Jun | 2006-06-15 |
Apparatus and method for processing AAL2 which supports multiple virtual channels in mobile communication system
Grant 7,054,320 - Lee , et al. May 30, 2 | 2006-05-30 |
Semiconductor capacitor structure and method for manufacturing the same
App 20060097410 - Shim; Woo-Gwan ; et al. | 2006-05-11 |
Phase change memory device and method of operating the same
App 20060092694 - Choi; Sang-jun ; et al. | 2006-05-04 |
Semiconductor capacitor structure and method for manufacturing the same
Grant 7,018,892 - Shim , et al. March 28, 2 | 2006-03-28 |
Apparatus for drying substrate and method thereof
App 20060042722 - Kim; Sang-Yong ; et al. | 2006-03-02 |
Method for fabricating a three-dimensional capacitor
App 20060040444 - Lee; Jung-hyun ; et al. | 2006-02-23 |
Method of depositing noble metal electrode using oxidation-reduction reaction
App 20060040486 - Lee; Jung-hyun ; et al. | 2006-02-23 |
Methods for cleaning a semiconductor substrate having a recess channel region
App 20060030117 - Ko; Hyung-Ho ; et al. | 2006-02-09 |
Etchant solutions and methods of forming semiconductor devices formed by processes including the same
App 20060028865 - Kim; Yu-Kyung ; et al. | 2006-02-09 |
Methods of processing substrates during semiconductor manufacturing processes
App 20060027252 - Mun; Chang-Sup ; et al. | 2006-02-09 |
Apparatus of depositing thin film with high uniformity
Grant 6,966,952 - Kim , et al. November 22, 2 | 2005-11-22 |
Photosensitive polymer having cyclic backbone and resist composition containing the same
Grant 6,964,839 - Choi , et al. November 15, 2 | 2005-11-15 |
Negative resist composition comprising hydroxy-substituted base polymer and si-containing crosslinker having epoxy ring and a method for patterning semiconductor devices using the same
App 20050244750 - Choi, Sang-Jun | 2005-11-03 |
Cleaning solution of silicon germanium layer and cleaning method using the same
App 20050239672 - Mun, Chang-Sup ; et al. | 2005-10-27 |
Cleaning composition and method of cleaning a semiconductor device using the same
App 20050170981 - Mun, Chang-Sup ; et al. | 2005-08-04 |
PAA- based etchant, methods of using same, and resultant structures
App 20050169096 - Lee, Hyo-san ; et al. | 2005-08-04 |
Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution
App 20050159322 - Min, Chang-Sup ; et al. | 2005-07-21 |
Apparatus of depositing thin film with high uniformity
App 20050150461 - Kim, Young-eal ; et al. | 2005-07-14 |
Patterned deposition source unit and method of depositing thin film using the same
App 20050129848 - Choi, Sang-jun ; et al. | 2005-06-16 |
Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same
Grant 6,897,005 - Choi , et al. May 24, 2 | 2005-05-24 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
Grant 6,893,793 - Jung , et al. May 17, 2 | 2005-05-17 |
Method of manufacturing shallow trench isolation structure using HF vapor etching process
App 20050074948 - Ko, Hyung-Ho ; et al. | 2005-04-07 |
Semiconductor capacitor structure and method for manufacturing the same
App 20050037562 - Shim, Woo-Gwan ; et al. | 2005-02-17 |
Resist compositions including thermal crosslinking agents
App 20050026078 - Choi, Sang-jun ; et al. | 2005-02-03 |
Method of manufacturing a semiconductor device using a polysilicon etching mask
App 20050026420 - Han, Jeong-Nam ; et al. | 2005-02-03 |
Photosensitive polymer containing silicon and a resist composition using the same
Grant 6,849,382 - Choi February 1, 2 | 2005-02-01 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
App 20050019693 - Jung, Dong-won ; et al. | 2005-01-27 |
Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same
Grant 6,844,134 - Choi , et al. January 18, 2 | 2005-01-18 |
Resist composition comprising photosensitive polymer having lactone in its backbone
App 20050008975 - Yoon, Kwang-sub ; et al. | 2005-01-13 |
Polymer having butadiene sulfone repeating unit and resist composition comprising the same
Grant 6,835,529 - Choi , et al. December 28, 2 | 2004-12-28 |
Photosensitive polymers containing adamantylalkyl vinyl ether, and resist compositions including the same
Grant 6,833,230 - Choi December 21, 2 | 2004-12-21 |
Cleaning solution and cleaning method of a semiconductor device
App 20040244823 - Kim, Sang Yong ; et al. | 2004-12-09 |
Cleaning agent including a corrosion inhibitor used in a process of forming a semiconductor device
App 20040242446 - Mun, Chang-Sup ; et al. | 2004-12-02 |
Methods for forming line patterns in semiconductor substrates
Grant 6,803,176 - Choi , et al. October 12, 2 | 2004-10-12 |
Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same
Grant 6,800,418 - Yoon , et al. October 5, 2 | 2004-10-05 |
Photosensitive polymer and photoresist composition thereof
Grant 6,777,162 - Choi August 17, 2 | 2004-08-17 |
Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same
App 20040137363 - Choi, Sang-Jun ; et al. | 2004-07-15 |
Photosensitive polymer containing silicon and a resist composition using the same
App 20040126699 - Choi, Sang-Jun | 2004-07-01 |
Photosensitive polymer having fused aromatic ring and photoresist composition containing the same
Grant 6,753,125 - Choi , et al. June 22, 2 | 2004-06-22 |
Silicon-containing polymer, negative type resist composition comprising the same, and patterning method for semiconductor device using the same
App 20040106064 - Choi, Sang-Jun | 2004-06-03 |
Method for forming fine pattern of semiconductor device
App 20040082170 - Choi, Sang-Jun ; et al. | 2004-04-29 |
Terpolymer for amplified resist
Grant 6,713,229 - Choi , et al. March 30, 2 | 2004-03-30 |
Resist composition comprising photosensitive polymer having lactone in its backbone
App 20040018442 - Yoon, Kwang-Sub ; et al. | 2004-01-29 |
Photoresist developer-soluble organic bottom antireflective composition and photolithography and etching process using the same
App 20040018451 - Choi, Sang-Jun | 2004-01-29 |
Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same
Grant 6,673,513 - Choi , et al. January 6, 2 | 2004-01-06 |
Negative resist composition comprising hydroxy-substituted base polymer and si-containing crosslinker having epoxy ring and a method for patterning semiconductor devices using the same
App 20030235788 - Choi, Sang-Jun | 2003-12-25 |
Negative resist composition comprising base polymer having epoxy ring and Si-containing crosslinker and patterning method for semiconductor device using the same
App 20030232279 - Choi, Sang-Jun | 2003-12-18 |
Photosensitive polymer including fluorine and resist composition containing the same
App 20030228537 - Yoon, Kwang-Sub ; et al. | 2003-12-11 |
Photosensitive polymers and resist compositions containing the same
App 20030224289 - Choi, Sang-Jun ; et al. | 2003-12-04 |
Photosensitive polymer
Grant 6,642,336 - Lee , et al. November 4, 2 | 2003-11-04 |
Photosensitive polymers containing adamantylalkyl vinyl ether, and resist compositions including the same
App 20030194643 - Choi, Sang-Jun | 2003-10-16 |
Polymer having butadiene sulfone repeating unit and resist composition comprising the same
App 20030180661 - Choi, Sang-jun ; et al. | 2003-09-25 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
App 20030170563 - Jung, Dong-Won ; et al. | 2003-09-11 |
Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same
App 20030157430 - Yoon, Kwang-Sub ; et al. | 2003-08-21 |
Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist compositon comprising the same
App 20030125511 - Choi, Sang-Jun ; et al. | 2003-07-03 |
Photosensitive polymer and photoresist composition thereof
App 20030091928 - Choi, Sang-jun | 2003-05-15 |
Methods for forming line patterns in semiconductor substrates
App 20030054292 - Choi, Sang-Jun ; et al. | 2003-03-20 |
Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same
Grant 6,517,990 - Choi , et al. February 11, 2 | 2003-02-11 |
Cell switching method and system
App 20030026266 - Choi, Sang Jun | 2003-02-06 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
App 20020193542 - Jung, Dong-Won ; et al. | 2002-12-19 |
Methods for forming line patterns in semiconductor substrates
Grant 6,485,895 - Choi , et al. November 26, 2 | 2002-11-26 |
Photosensitive polymer and chemically amplified photoresist composition containing the same
Grant 6,472,120 - Jung , et al. October 29, 2 | 2002-10-29 |
Terpolymer for amplified resist
App 20020132186 - Choi, Sang-Jun ; et al. | 2002-09-19 |
Cell switching method and system
App 20020089991 - Choi, Sang Jun | 2002-07-11 |
Apparatus and method of transmitting ATM cells in an ATM network based mobile communication system
App 20020085566 - Choi, Sang Jun | 2002-07-04 |
Photosensitive polymer having fused aromatic ring and photoresist composition containing the same
App 20020076641 - Choi, Sang-Jun ; et al. | 2002-06-20 |
Resist composition comprising photosensitive polymer having loctone in its backbone
App 20020042016 - Yoon, Kwang-sub ; et al. | 2002-04-11 |
Alicyclic photosensitive polymer, resist composition containing the same and method of preparing the resist composition
App 20010038968 - Kim, Hyun-woo ; et al. | 2001-11-08 |
Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same
App 20010024763 - Choi, Sang-Jun ; et al. | 2001-09-27 |
Method for forming wiring in semiconductor device
Grant 6,271,113 - Yoon , et al. August 7, 2 | 2001-08-07 |
Chemically amplified photoresist composition
Grant 6,143,466 - Choi November 7, 2 | 2000-11-07 |
Photosensitive polymer, dissolution inhibitor and chemically amplified photoresist composition containing the same
Grant 6,103,450 - Choi August 15, 2 | 2000-08-15 |
Silicon containing polymer and chemically amplified resist composition comprising the same
Grant 6,051,362 - Choi , et al. April 18, 2 | 2000-04-18 |
Polymer for photoresist, photoresist composition containing the same, and preparation method thereof
Grant 6,045,970 - Choi April 4, 2 | 2000-04-04 |
Resist compositions for chemically amplified resists comprising a di(t-butyl)malonyl methyl side group in the base polymer
Grant 5,733,704 - Choi , et al. March 31, 1 | 1998-03-31 |
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