| Patent | Date |
|---|
Single-mask alternating line deposition
Grant 11,437,317 - Anderson , et al. September 6, 2 | 2022-09-06 |
Barrier removal for conductor in top via integration scheme
Grant 11,430,735 - Anderson , et al. August 30, 2 | 2022-08-30 |
Top Via On Subtractively Etched Conductive Line
App 20220223473 - Anderson; Brent ; et al. | 2022-07-14 |
Conductive Lines With Subtractive Cuts
App 20220181255 - Anderson; Brent ; et al. | 2022-06-09 |
Interconnects Having Spacers For Improved Top Via Critical Dimension And Overlay Tolerance
App 20220157652 - Anderson; Brent A. ; et al. | 2022-05-19 |
Stepped Top Via For Via Resistance Reduction
App 20220130718 - Anderson; Brent Alan ; et al. | 2022-04-28 |
Self-aligned top via
Grant 11,315,872 - Park , et al. April 26, 2 | 2022-04-26 |
Quad-layer high-k for metal-insulator-metal capacitors
Grant 11,309,383 - Choi , et al. April 19, 2 | 2022-04-19 |
Subtractive line with damascene second line type
Grant 11,302,575 - Anderson , et al. April 12, 2 | 2022-04-12 |
Interconnects having spacers for improved top via critical dimension and overlay tolerance
Grant 11,295,978 - Anderson , et al. April 5, 2 | 2022-04-05 |
Top vias with selectively retained etch stops
Grant 11,289,371 - Anderson , et al. March 29, 2 | 2022-03-29 |
Conductive lines with subtractive cuts
Grant 11,276,639 - Anderson , et al. March 15, 2 | 2022-03-15 |
Tiered-Profile Contact for Semiconductor
App 20220068713 - Choi; Kisik ; et al. | 2022-03-03 |
Subtractive Line with Damascene Second Line Type
App 20220037205 - Anderson; Brent ; et al. | 2022-02-03 |
Bottom Barrier Free Interconnects Without Voids
App 20220028797 - Cheng; Kenneth Chun Kuen ; et al. | 2022-01-27 |
Top Via Interconnect Having A Line With A Reduced Bottom Dimension
App 20220028785 - Anderson; Brent ; et al. | 2022-01-27 |
Top Via Stack
App 20220028783 - Anderson; Brent Alan ; et al. | 2022-01-27 |
Stepped top via for via resistance reduction
Grant 11,232,977 - Anderson , et al. January 25, 2 | 2022-01-25 |
Top Via With Damascene Line And Via
App 20220005732 - Clevenger; Lawrence A. ; et al. | 2022-01-06 |
Etch Stop Layer Removal For Capacitance Reduction In Damascene Top Via Integration
App 20220005731 - Penny; Christopher J. ; et al. | 2022-01-06 |
Top Via With Next Level Line Selective Growth
App 20220005761 - Anderson; Brent ; et al. | 2022-01-06 |
Well-controlled Edge-to-edge Spacing Between Adjacent Interconnects
App 20210384123 - Anderson; Brent ; et al. | 2021-12-09 |
Well-controlled edge-to-edge spacing between adjacent interconnects
Grant 11,195,795 - Anderson , et al. December 7, 2 | 2021-12-07 |
Top via stack
Grant 11,195,792 - Anderson , et al. December 7, 2 | 2021-12-07 |
Tiered-profile contact for semiconductor
Grant 11,195,753 - Choi , et al. December 7, 2 | 2021-12-07 |
Top via interconnect having a line with a reduced bottom dimension
Grant 11,189,568 - Anderson , et al. November 30, 2 | 2021-11-30 |
Etch stop layer removal for capacitance reduction in damascene top via integration
Grant 11,177,166 - Penny , et al. November 16, 2 | 2021-11-16 |
Top via with next level line selective growth
Grant 11,171,084 - Anderson , et al. November 9, 2 | 2021-11-09 |
Interconnects Having Spacers For Improved Top Via Critical Dimension And Overlay Tolerance
App 20210343585 - Anderson; Brent ; et al. | 2021-11-04 |
Top Via Interconnect Having A Line With A Reduced Bottom Dimension
App 20210343643 - Anderson; Brent ; et al. | 2021-11-04 |
Top via with damascene line and via
Grant 11,164,777 - Clevenger , et al. November 2, 2 | 2021-11-02 |
Bottom barrier free interconnects without voids
Grant 11,164,815 - Cheng , et al. November 2, 2 | 2021-11-02 |
Top vias with subtractive line formation
Grant 11,158,537 - Anderson , et al. October 26, 2 | 2021-10-26 |
Etch Stop Layer Removal For Capacitance Reduction In Damascene Top Via Integration
App 20210327751 - Penny; Christopher J. ; et al. | 2021-10-21 |
Top Via With Next Level Line Selective Growth
App 20210313265 - Anderson; Brent ; et al. | 2021-10-07 |
Inverted, Self-aligned Top-via Structures
App 20210305152 - DECHENE; DANIEL JAMES ; et al. | 2021-09-30 |
Top Via On Subtractively Etched Conductive Line
App 20210296171 - Anderson; Brent ; et al. | 2021-09-23 |
Barrier Removal For Conductor In Top Via Integration Scheme
App 20210257308 - Anderson; Brent Alan ; et al. | 2021-08-19 |
Stepped Top Via For Via Resistance Reduction
App 20210249302 - Anderson; Brent Alan ; et al. | 2021-08-12 |
Single-mask Alternating Line Deposition
App 20210249351 - Anderson; Brent Alan ; et al. | 2021-08-12 |
Forming barrierless contact
Grant 11,081,388 - Choi , et al. August 3, 2 | 2021-08-03 |
Top Vias With Subtractive Line Formation
App 20210233808 - Anderson; Brent ; et al. | 2021-07-29 |
Top Vias With Selectively Retained Etch Stops
App 20210233807 - Anderson; Brent ; et al. | 2021-07-29 |
Conductive Lines With Subtractive Cuts
App 20210225761 - Anderson; Brent ; et al. | 2021-07-22 |
Top Via Stack
App 20210217696 - Anderson; Brent Alan ; et al. | 2021-07-15 |
Top Via With Damascene Line And Via
App 20210217661 - Clevenger; Lawrence A. ; et al. | 2021-07-15 |
Bottom Barrier Free Interconnects Without Voids
App 20210098388 - Cheng; Kenneth Chun Kuen ; et al. | 2021-04-01 |
Gate contact over active enabled by alternative spacer scheme and claw-shaped cap
Grant 10,943,990 - Greene , et al. March 9, 2 | 2021-03-09 |
Method and structure for forming a vertical field-effect transistor using a replacement metal gate process
Grant 10,892,195 - Lee , et al. January 12, 2 | 2021-01-12 |
Method and structure for forming a vertical field-effect transistor using a replacement metal gate process
Grant 10,886,183 - Lee , et al. January 5, 2 | 2021-01-05 |
Air-Gap Containing Metal Interconnects
App 20200273743 - Cheng; Kenneth C. K. ; et al. | 2020-08-27 |
Air-gap containing metal interconnects
Grant 10,748,812 - Cheng , et al. A | 2020-08-18 |
Forming Barrierless Contact
App 20200227313 - Choi; Kisik ; et al. | 2020-07-16 |
Gate Contact Over Active Enabled by Alternative Spacer Scheme and Claw-Shaped Cap
App 20200135886 - Greene; Andrew ; et al. | 2020-04-30 |
Method and structure for forming a vertical field-effect transistor using a replacement metal gate process
Grant 10,629,499 - Lee , et al. | 2020-04-21 |
Tiered-Profile Contact for Semiconductor
App 20200090995 - Choi; Kisik ; et al. | 2020-03-19 |
Method And Structure For Forming A Vertical Field-effect Transistor Using A Replacement Metal Gate Process
App 20200083121 - Lee; ChoongHyun ; et al. | 2020-03-12 |
Method And Structure For Forming A Vertical Field-effect Transistor Using A Replacement Metal Gate Process
App 20200083120 - Lee; ChoongHyun ; et al. | 2020-03-12 |
Method And Structure For Forming A Vertical Field-effect Transistor Using A Replacement Metal Gate Process
App 20190385917 - Lee; ChoongHyun ; et al. | 2019-12-19 |
Method to improve reliability of replacement gate device
Grant 10,361,281 - Ando , et al. | 2019-07-23 |
Method To Improve Reliability Of Replacement Gate Device
App 20180197972 - Ando; Takashi ; et al. | 2018-07-12 |
Method to improve reliability of replacement gate device
Grant 9,972,697 - Ando , et al. May 15, 2 | 2018-05-15 |
Method to improve reliability of replacement gate device
Grant 9,960,252 - Ando , et al. May 1, 2 | 2018-05-01 |
Replacement gate structures for transistor devices
Grant 9,953,978 - Xie , et al. April 24, 2 | 2018-04-24 |
Integrated circuit and method for fabricating the same having a replacement gate structure
Grant 9,666,690 - Kim , et al. May 30, 2 | 2017-05-30 |
Atomic layer deposition of HfAlC as a metal gate workfunction material in MOS devices
Grant 9,607,904 - Lee , et al. March 28, 2 | 2017-03-28 |
Method To Improve Reliability Of Replacement Gate Device
App 20170005179 - ANDO; TAKASHI ; et al. | 2017-01-05 |
Method To Improve Reliability Of Replacement Gate Device
App 20160380076 - Ando; Takashi ; et al. | 2016-12-29 |
Metal gate structure for midgap semiconductor device and method of making same
Grant 9,496,143 - Kim , et al. November 15, 2 | 2016-11-15 |
Method to improve reliability of replacement gate device
Grant 9,484,438 - Ando , et al. November 1, 2 | 2016-11-01 |
Method to improve reliability of replacement gate device
Grant 9,472,643 - Ando , et al. October 18, 2 | 2016-10-18 |
Low threshold voltage CMOS device
Grant 9,455,203 - Ando , et al. September 27, 2 | 2016-09-27 |
Replacement gate structure with low-K sidewall spacer for semiconductor devices
Grant 9,431,507 - Xie , et al. August 30, 2 | 2016-08-30 |
Method to improve reliability of replacement gate device
Grant 9,391,164 - Ando , et al. July 12, 2 | 2016-07-12 |
Gate structures for transistor devices for CMOS applications and products
Grant 9,362,283 - Hong , et al. June 7, 2 | 2016-06-07 |
Methods of scaling thickness of a gate dielectric structure, methods of forming an integrated circuit, and integrated circuits
Grant 9,349,823 - Choi May 24, 2 | 2016-05-24 |
Low Threshold Voltage Cmos Device
App 20160126145 - Ando; Takashi ; et al. | 2016-05-05 |
Replacement Gate Structures For Transistor Devices
App 20160118385 - Xie; Ruilong ; et al. | 2016-04-28 |
Field Effect Transistor And Method Of Fabrication
App 20160099333 - Kim; Hoon ; et al. | 2016-04-07 |
Tantalum carbide metal gate stack for mid-gap work function applications
App 20160093711 - Hong; Zhendong ; et al. | 2016-03-31 |
Integrated Circuits With Metal-titanium Oxide Contacts And Fabrication Methods
App 20160079168 - NIIMI; Hiroaki ; et al. | 2016-03-17 |
Method for single fin cuts using selective ion implants
Grant 9,287,130 - Cai , et al. March 15, 2 | 2016-03-15 |
Low threshold voltage CMOS device
Grant 9,263,344 - Ando , et al. February 16, 2 | 2016-02-16 |
Methods of forming replacement gate structures for transistors and the resulting devices
Grant 9,257,348 - Xie , et al. February 9, 2 | 2016-02-09 |
Atomic Layer Deposition of HfAlC as a Metal Gate Workfunction Material in MOS Devices
App 20160035631 - Lee; Albert Sanghyup ; et al. | 2016-02-04 |
Field effect transistor and method of fabrication
Grant 9,245,968 - Kim , et al. January 26, 2 | 2016-01-26 |
Integrated circuits having improved high-K dielectric layers and methods for fabrication of same
Grant 9,224,610 - Kim , et al. December 29, 2 | 2015-12-29 |
Integrated circuits with metal-titanium oxide contacts and fabrication methods
Grant 9,224,638 - Niimi , et al. December 29, 2 | 2015-12-29 |
Methods of forming a replacement gate structure having a gate electrode comprised of a deposited intermetallic compound material
Grant 9,218,975 - Choi , et al. December 22, 2 | 2015-12-22 |
Gate Structures For Cmos Based Integrated Circuit Products
App 20150348970 - Xie; Ruilong ; et al. | 2015-12-03 |
Integrated Circuits With Metal-titanium Oxide Contacts And Fabrication Methods
App 20150325473 - NIIMI; Hiroaki ; et al. | 2015-11-12 |
Methods Of Forming Gate Structures For Transistor Devices For Cmos Applications And The Resulting Products
App 20150311206 - Hong; Zhendong ; et al. | 2015-10-29 |
Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
Grant 9,165,928 - Xie , et al. October 20, 2 | 2015-10-20 |
Replacement Gate Structure With Low-k Sidewall Spacer For Semiconductor Devices
App 20150263120 - Xie; Ruilong ; et al. | 2015-09-17 |
Enabling Enhanced Reliability And Mobility For Replacement Gate Planar And Finfet Structures
App 20150249015 - Ando; Takashi ; et al. | 2015-09-03 |
Method To Improve Reliability Of Replacement Gate Device
App 20150243762 - Ando; Takashi ; et al. | 2015-08-27 |
Method To Improve Reliability Of Replacement Gate Device
App 20150243761 - Ando; Takashi ; et al. | 2015-08-27 |
Method To Improve Reliability Of Replacement Gate Device
App 20150236135 - Ando; Takashi ; et al. | 2015-08-20 |
Enabling Enhanced Reliability And Mobility For Replacement Gate Planar And Finfet Structures
App 20150228749 - Ando; Takashi ; et al. | 2015-08-13 |
Methods of forming gate structures for transistor devices for CMOS applications
Grant 9,105,497 - Hong , et al. August 11, 2 | 2015-08-11 |
Methods Of Forming Gate Structures For Semiconductor Devices Using A Replacement Gate Technique And The Resulting Devices
App 20150221749 - Xie; Ruilong ; et al. | 2015-08-06 |
Enabling enhanced reliability and mobility for replacement gate planar and FinFET structures
Grant 9,099,393 - Ando , et al. August 4, 2 | 2015-08-04 |
Methods of forming gate structures for semiconductor devices using a replacement gate technique and the resulting devices
Grant 9,093,467 - Xie , et al. July 28, 2 | 2015-07-28 |
Common Fabrication Of Different Semiconductor Devices With Different Threshold Voltages
App 20150179640 - Kim; Hoon ; et al. | 2015-06-25 |
Integrated Circuit And Method For Fabricating The Same Having A Replacement Gate Structure
App 20150171082 - Choi; Kisik ; et al. | 2015-06-18 |
Low Threshold Voltage Cmos Device
App 20150147876 - Ando; Takashi ; et al. | 2015-05-28 |
Replacement metal gate structure for CMOS device
Grant 9,041,118 - Ando , et al. May 26, 2 | 2015-05-26 |
Replacement metal gate structure for CMOS device
Grant 9,040,404 - Ando , et al. May 26, 2 | 2015-05-26 |
Methods Of Scaling Thickness Of A Gate Dielectric Structure, Methods Of Forming An Integrated Circuit, And Integrated Circuits
App 20150129972 - Choi; Kisik | 2015-05-14 |
Method To Improve Reliability Of Replacement Gate Device
App 20150126020 - Ando; Takashi ; et al. | 2015-05-07 |
Methods Of Forming Gate Structures With Multiple Work Functions And The Resulting Products
App 20150126023 - Choi; Kisik ; et al. | 2015-05-07 |
Interface-free Metal Gate Stack
App 20150126025 - ANDO; Takashi ; et al. | 2015-05-07 |
Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
Grant 9,024,388 - Choi , et al. May 5, 2 | 2015-05-05 |
Methods of forming gate structures with multiple work functions and the resulting products
Grant 9,012,319 - Choi , et al. April 21, 2 | 2015-04-21 |
Method to improve reliability of replacement gate device
Grant 8,999,831 - Ando , et al. April 7, 2 | 2015-04-07 |
Integrated circuit and method for fabricating the same having a replacement gate structure
Grant 8,987,126 - Choi , et al. March 24, 2 | 2015-03-24 |
Interface-free metal gate stack
Grant 8,975,174 - Ando , et al. March 10, 2 | 2015-03-10 |
Methods Of Forming Gate Structures For Transistor Devices For Cmos Applications And The Resulting Products
App 20150061027 - Hong; Zhendong ; et al. | 2015-03-05 |
Replacement Metal Gate Structure For Cmos Device
App 20150054087 - Ando; Takashi ; et al. | 2015-02-26 |
Methods Of Forming Replacement Gate Structures For Transistors And The Resulting Devices
App 20150041905 - Xie; Ruilong ; et al. | 2015-02-12 |
Enabling Enhanced Reliability And Mobility For Replacement Gate Planar And Finfet Structures
App 20150035073 - Ando; Takashi ; et al. | 2015-02-05 |
Low threshold voltage CMOS device
Grant 8,941,184 - Ando , et al. January 27, 2 | 2015-01-27 |
Semiconductor gate structure for threshold voltage modulation and method of making same
Grant 8,932,923 - Kim , et al. January 13, 2 | 2015-01-13 |
Integrated Circuits Having Improved High-k Dielectric Layers And Methods For Fabrication Of Same
App 20150001643 - Kim; Hoon ; et al. | 2015-01-01 |
Field Effect Transistor And Method Of Fabrication
App 20150001642 - Kim; Hoon ; et al. | 2015-01-01 |
Methods Of Forming Gate Structures For Cmos Based Integrated Circuit Products And The Resulting Devices
App 20140367788 - Xie; Ruilong ; et al. | 2014-12-18 |
Methods Of Forming Gate Structures For Cmos Based Integrated Circuit Products And The Resulting Devices
App 20140367790 - Choi; Kisik ; et al. | 2014-12-18 |
Replacement metal gate structure for CMOS device
Grant 8,895,434 - Ando , et al. November 25, 2 | 2014-11-25 |
Field effect transistor and method of fabrication
Grant 8,853,069 - Kim , et al. October 7, 2 | 2014-10-07 |
Replacement Metal Gate With Mulitiple Titanium Nitride Laters
App 20140246734 - Kim; Hoon ; et al. | 2014-09-04 |
Semiconductor Gate Structure For Threshold Voltage Modulation And Method Of Making Same
App 20140231922 - Kim; Hoon ; et al. | 2014-08-21 |
Interface-free metal gate stack
Grant 8,791,004 - Ando , et al. July 29, 2 | 2014-07-29 |
Gate-last fabrication of quarter-gap MGHK FET
Grant 8,786,030 - Ando , et al. July 22, 2 | 2014-07-22 |
Use of band edge gate metals as source drain contacts
Grant 8,741,753 - Choi , et al. June 3, 2 | 2014-06-03 |
Method To Improve Reliability Of Replacement Gate Device
App 20140141598 - Ando; Takashi ; et al. | 2014-05-22 |
Replacement Metal Gate Structure For Cmos Device
App 20140131808 - Ando; Takashi ; et al. | 2014-05-15 |
Replacement Metal Gate Structure For Cmos Device
App 20140131809 - Ando; Takashi ; et al. | 2014-05-15 |
Metal Gate Structure For Midgap Semiconductor Device And Method Of Making Same
App 20140124876 - Kim; Hoon ; et al. | 2014-05-08 |
Field Effect Transistor And Method Of Fabrication
App 20140070283 - Kim; Hoon ; et al. | 2014-03-13 |
Methods Of Forming A Replacement Gate Structure Having A Gate Electrode Comprised Of A Deposited Intermetallic Compound Material
App 20140051240 - CHOI; Kisik ; et al. | 2014-02-20 |
Gate-last fabrication of quarter-gap MGHK FET
Grant 8,592,296 - Ando , et al. November 26, 2 | 2013-11-26 |
Integrated Circuit And Method For Fabricating The Same Having A Replacement Gate Structure
App 20130299922 - Choi; Kisik ; et al. | 2013-11-14 |
Integrated Circuit And Method For Fabricating The Same Having A Replacement Gate Structure
App 20130292744 - Kim; Hoon ; et al. | 2013-11-07 |
Interface-free Metal Gate Stack
App 20130277751 - ANDO; Takashi ; et al. | 2013-10-24 |
Interface-free Metal Gate Stack
App 20130280901 - ANDO; Takashi ; et al. | 2013-10-24 |
Interface-free metal gate stack
Grant 8,564,066 - Ando , et al. October 22, 2 | 2013-10-22 |
Integrated Circuits Having Improved Metal Gate Structures And Methods For Fabricating Same
App 20130270646 - Kim; Hoon ; et al. | 2013-10-17 |
Integrated circuits having improved metal gate structures and methods for fabricating same
Grant 8,552,505 - Kim , et al. October 8, 2 | 2013-10-08 |
Use of Band Edge Gate Metals as Source Drain Contacts
App 20130241008 - Choi; Kisik ; et al. | 2013-09-19 |
Use Of Band Edge Gate Metals As Source Drain Contacts
App 20130241007 - Choi; Kisik ; et al. | 2013-09-19 |
Low Threshold Voltage Cmos Device
App 20130154019 - Ando; Takashi ; et al. | 2013-06-20 |
Method of fabricating a semiconductor device using compressive material with a replacement gate technique
Grant 8,420,470 - Choi April 16, 2 | 2013-04-16 |
Finned semiconductor device with oxygen diffusion barrier regions, and related fabrication methods
Grant 8,354,719 - Choi , et al. January 15, 2 | 2013-01-15 |
Gate-Last Fabrication of Quarter-Gap MGHK FET
App 20120299123 - Ando; Takashi ; et al. | 2012-11-29 |
Dual Metal Gates Using One Metal To Alter Work Function Of Another Metal
App 20120256270 - Lee; Byoung H. ; et al. | 2012-10-11 |
Dual metal gates using one metal to alter work function of another metal
Grant 8,236,686 - Lee , et al. August 7, 2 | 2012-08-07 |
Semiconductor device and related fabrication methods that use compressive material with a replacement gate technique
Grant 8,173,530 - Lee , et al. May 8, 2 | 2012-05-08 |
Method Of Fabricating A Semiconductor Device Using Compressive Material With A Replacement Gate Technique
App 20120052666 - CHOI; Kisik | 2012-03-01 |
Interface-free Metal Gate Stack
App 20110309449 - ANDO; TAKASHI ; et al. | 2011-12-22 |
Gate-Last Fabrication of Quarter-Gap MGHK FET
App 20110309455 - Ando; Takashi ; et al. | 2011-12-22 |
Method of forming a semiconductor device
Grant 8,048,791 - Hargrove , et al. November 1, 2 | 2011-11-01 |
Finned Semiconductor Device With Oxygen Diffusion Barrier Regions, And Related Fabrication Methods
App 20110198696 - CHOI; Kisik ; et al. | 2011-08-18 |
Semiconductor Device And Related Fabrication Methods That Use Compressive Material With A Replacement Gate Technique
App 20100301401 - Lee; Doug H. ; et al. | 2010-12-02 |
Metal Oxide Semiconductor Devices Having Capping Layers And Methods For Fabricating The Same
App 20100213555 - HARGROVE; Michael ; et al. | 2010-08-26 |
Metal Oxide Semiconductor Devices Having Buried Gate Channels And Methods For Fabricating The Same
App 20100213553 - HARGROVE; Michael ; et al. | 2010-08-26 |
Method For Nitridation Of Shallow Trench Isolation Structure To Prevent Oxygen Absorption
App 20100193896 - Choi; Kisik ; et al. | 2010-08-05 |
Dual Metal Gates Using One Metal To Alter Work Function Of Another Metal
App 20090294867 - Lee; Byoung H. ; et al. | 2009-12-03 |
Scalable High-k Dielectric Gate Stack
App 20090108294 - Choi; Changhwan ; et al. | 2009-04-30 |
Mosfet With Metal Gate Electrode
App 20090039441 - Luna; Hongfa ; et al. | 2009-02-12 |
Methods of modulating the work functions of film layers
Grant 7,332,433 - Choi , et al. February 19, 2 | 2008-02-19 |
Methods of modulating the work functions of film layers
App 20070063296 - Choi; Kisik ; et al. | 2007-03-22 |
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