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Method of fabricating semiconductor device Grant 10,153,170 - Jang , et al. Dec | 2018-12-11 |
Vertical memory devices and methods of manufacturing the same Grant 10,079,203 - Son , et al. September 18, 2 | 2018-09-18 |
Method Of Fabricating Semiconductor Device App 20170358457 - JANG; Hwa Jin ;   et al. | 2017-12-14 |
Nano-structured semiconductor light-emitting element Grant 9,842,966 - Cha , et al. December 12, 2 | 2017-12-12 |
Nano-structure semiconductor light emitting device Grant 9,608,163 - Cha , et al. March 28, 2 | 2017-03-28 |
Vertical Memory Devices And Methods Of Manufacturing The Same App 20170084532 - SON; Yong-Hoon ;   et al. | 2017-03-23 |
Integrated circuit device including polycrystalline semiconductor film and method of manufacturing the same Grant 9,576,969 - Manorotkul , et al. February 21, 2 | 2017-02-21 |
Integrated Circuit Device Including Polycrystalline Semiconductor Film And Method Of Manufacturing The Same App 20160300847 - MANOROTKUL; Wanit ;   et al. | 2016-10-13 |
Integrated circuit device including polycrystalline semiconductor film and method of manufacturing the same Grant 9,391,090 - Manorotkul , et al. July 12, 2 | 2016-07-12 |
Semiconductor devices and methods of manufacturing the same Grant 9,316,789 - Kim , et al. April 19, 2 | 2016-04-19 |
Integrated Circuit Device Including Polycrystalline Semiconductor Film And Method Of Manufacturing The Same App 20160056171 - MANOROTKUL; Wanit ;   et al. | 2016-02-25 |
Method of fabricating semiconductor device having preliminary stacked structure with offset oxide etched using gas cluster ion Grant 9,240,357 - Kim , et al. January 19, 2 | 2016-01-19 |
Method of manufacturing semiconductor device having doped layer Grant 9,236,259 - Jo , et al. January 12, 2 | 2016-01-12 |
Nano-structured Semiconductor Light-emitting Element App 20150372194 - CHA; Nam-Goo ;   et al. | 2015-12-24 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20150309255 - KIM; KI CHUL ;   et al. | 2015-10-29 |
Semiconductor devices Grant 9,110,233 - Kim , et al. August 18, 2 | 2015-08-18 |
Vertical memory devices and methods of manufacturing the same Grant 9,012,974 - Chae , et al. April 21, 2 | 2015-04-21 |
Methods of forming epitaxial layers Grant 8,993,420 - Shin , et al. March 31, 2 | 2015-03-31 |
Integrated circuit devices including electrode support structures and methods of fabricating the same Grant 8,970,039 - Kuh , et al. March 3, 2 | 2015-03-03 |
Method For Fabricating Semiconductor Device App 20140377926 - KIM; Tae-Gon ;   et al. | 2014-12-25 |
Method Of Manufacturing Semiconductor Device Having Doped Layer App 20140357071 - JO; Eun-Young ;   et al. | 2014-12-04 |
Fabricating Method Of Semiconductor Device App 20140357062 - SHIN; Joong-Han ;   et al. | 2014-12-04 |
Methods of manufacturing a semiconductor device Grant 8,883,608 - Kang , et al. November 11, 2 | 2014-11-11 |
Method Of Fabricating Semiconductor Device App 20140322832 - KIM; Tae-Gon ;   et al. | 2014-10-30 |
Methods Of Forming Epitaxial Layers App 20140256117 - SHIN; Joong-han ;   et al. | 2014-09-11 |
Methods of manufacturing semiconductor devices Grant 8,822,287 - Kim , et al. September 2, 2 | 2014-09-02 |
Method of fabricating semiconductor device Grant 8,815,697 - Yoon , et al. August 26, 2 | 2014-08-26 |
Nano-structure Semiconductor Light Emitting Device App 20140209858 - Cha; Nam Goo ;   et al. | 2014-07-31 |
Vertical structure non-volatile memory device and method of manufacturing the same Grant 8,748,249 - Yang , et al. June 10, 2 | 2014-06-10 |
Method for fabricating nonvolatile memory device Grant 8,735,247 - Yoo , et al. May 27, 2 | 2014-05-27 |
Methods Of Manufacturing A Semiconductor Device App 20140065793 - Kang; Jong-Hoon ;   et al. | 2014-03-06 |
Method of fabricating nonvolatile memory device Grant 8,642,458 - Chung , et al. February 4, 2 | 2014-02-04 |
Semiconductor devices including vertical channel pattern Grant 8,637,917 - Lee , et al. January 28, 2 | 2014-01-28 |
Method of manufacturing semiconductor device Grant 08617947 - | 2013-12-31 |
Method of manufacturing semiconductor device Grant 8,617,947 - Yang , et al. December 31, 2 | 2013-12-31 |
Methods of forming conductive layer patterns using gas phase cleaning process and methods of manufacturing semiconductor devices Grant 8,497,142 - Yang , et al. July 30, 2 | 2013-07-30 |
Method of forming a thin layer structure Grant 8,492,251 - Kang , et al. July 23, 2 | 2013-07-23 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20130170784 - KIM; Ki-Chul ;   et al. | 2013-07-04 |
Integrated Circuit Devices Including Electrode Support Structures And Methods Of Fabricating The Same App 20130147048 - KUH; Bong-jin ;   et al. | 2013-06-13 |
Memory device and method of fabricating the same Grant 8,440,527 - Yoo , et al. May 14, 2 | 2013-05-14 |
Method Of Forming A Thin Layer Structure App 20130115760 - KANG; JONG-HOON ;   et al. | 2013-05-09 |
Methods of manufacturing a vertical type semiconductor device Grant 8,426,304 - Yoo , et al. April 23, 2 | 2013-04-23 |
Charge-trapping nonvolatile memory devices having gate structures therein with improved blocking layers Grant 8,410,542 - Yoo , et al. April 2, 2 | 2013-04-02 |
Method of fabricating semiconductor device App 20130005110 - Yoon; Jun-Ho ;   et al. | 2013-01-03 |
Method Of Fabricating Nonvolatile Memory Device App 20120315752 - CHUNG; Byung-Hong ;   et al. | 2012-12-13 |
Vertical Structure Non-volatile Memory Device And Method Of Manufacturing The Same App 20120276696 - Yang; Jun-Kyu ;   et al. | 2012-11-01 |
Method Of Manufacturing Semiconductor Device App 20120276702 - YANG; Jun-kyu ;   et al. | 2012-11-01 |
Semiconductor integrated circuit device and method of fabricating the same Grant 8,294,198 - Yoo , et al. October 23, 2 | 2012-10-23 |
Methods Of Manufacturing Semiconductor Devices App 20120149185 - Kim; Hyo-Jung ;   et al. | 2012-06-14 |
Methods of Manufacturing a Vertical Type Semiconductor Device App 20120115309 - Yoo; Dong-Chul ;   et al. | 2012-05-10 |
Vertical Memory Devices And Methods Of Manufacturing The Same App 20120098139 - Chae; Soo-Doo ;   et al. | 2012-04-26 |
Method For Fabricating Nonvolatile Memory Device App 20120052673 - Yoo; Dong-Chul ;   et al. | 2012-03-01 |
Semiconductor Devices Including Vertical Channel Pattern App 20120037977 - Lee; Ju-Yul ;   et al. | 2012-02-16 |
Method of manufacturing a non-volatile memory device Grant 8,114,735 - Kim , et al. February 14, 2 | 2012-02-14 |
Methods of Fabricating Non-Volatile Memory Devices App 20110300686 - Chae; Soo-doo ;   et al. | 2011-12-08 |
Methods Of Forming Conductive Layer Patterns Using Gas Phase Cleaning Process And Methods Of Manufacturing Semiconductor Devices App 20110281379 - YANG; Jun-Kyu ;   et al. | 2011-11-17 |
Layer deposition methods Grant 8,039,054 - Park , et al. October 18, 2 | 2011-10-18 |
Nonvolatile memory device and method of fabricating the same Grant 7,994,003 - Kim , et al. August 9, 2 | 2011-08-09 |
Methods Of Manufacturing Semiconductor Devices Including Structures App 20110165750 - Yang; Jun-Kyu ;   et al. | 2011-07-07 |
Method Of Forming A Dielectric Layer And Method Of Manufacturing A Semiconductor Device Using The Same App 20110159680 - YOO; Dong-Chul ;   et al. | 2011-06-30 |
Method of manufacturing semiconductor device Grant 7,964,462 - Yoo , et al. June 21, 2 | 2011-06-21 |
Nonvolatile Memory Devices Having Gate Structures Therein with Improved Blocking Layers App 20110101438 - Yoo; Dong-Chul ;   et al. | 2011-05-05 |
Method of fabricating trap type nonvolatile memory device Grant 7,927,950 - Choi , et al. April 19, 2 | 2011-04-19 |
Semiconductor device and gate structure having a composite dielectric layer and methods of manufacturing the same Grant 7,888,727 - Park , et al. February 15, 2 | 2011-02-15 |
Memory device and method of fabricating the same App 20110001183 - Yoo; Dong-Chul ;   et al. | 2011-01-06 |
Methods of forming flash memory devices including blocking oxide films Grant 7,820,514 - Ryu , et al. October 26, 2 | 2010-10-26 |
Methods of manufacturing semiconductor devices including metal oxide layers Grant 7,790,591 - Yoo , et al. September 7, 2 | 2010-09-07 |
Semiconductor Integrated Circuit Device and Method of Fabricating the Same App 20100200907 - Yoo; Dong Chul ;   et al. | 2010-08-12 |
Method of manufacturing a non-volatile memory device Grant 7,682,906 - Park , et al. March 23, 2 | 2010-03-23 |
Gate structures of a non-volatile memory device and methods of manufacturing the same Grant 7,646,056 - Choi , et al. January 12, 2 | 2010-01-12 |
Non-volatile memory device and method of manufacturing the same Grant 7,635,633 - Oh , et al. December 22, 2 | 2009-12-22 |
Method of manufacturing non-volatile memory device Grant 7,605,067 - Park , et al. October 20, 2 | 2009-10-20 |
Semiconductor device and gate structure having a composite dielectric layer and methods of manufacturing the same App 20090250741 - Park; Ki-Yeon ;   et al. | 2009-10-08 |
Nonvolatile memory device and method of fabricating the same App 20090239367 - Kim; Byong-Ju ;   et al. | 2009-09-24 |
Methods of forming thin layers including zirconium hafnium oxide and methods of forming gate structures, capacitors, and flash memory devices using the same Grant 7,566,608 - Choi , et al. July 28, 2 | 2009-07-28 |
Semiconductor device and gate structure having a composite dielectric layer and methods of manufacturing the same Grant 7,560,349 - Park , et al. July 14, 2 | 2009-07-14 |
Method Of Manufacturing Semiconductor Device App 20090124071 - Yoo; Dong-chul ;   et al. | 2009-05-14 |
Methods of Manufacturing Semiconductor Devices Including Metal Oxide Layers App 20090124070 - Yoo; Dong Chul ;   et al. | 2009-05-14 |
Nonvolatile Memory Device And Method Of Fabricating The Same App 20090096008 - Kim; Sun-jung ;   et al. | 2009-04-16 |
Flash memory devices having multilayered inter-gate dielectric layers including metal oxide layers and methods of manufacturing the same Grant 7,517,750 - Choi , et al. April 14, 2 | 2009-04-14 |
Method of fabricating a nonvolatile memory device Grant 7,510,931 - Park , et al. March 31, 2 | 2009-03-31 |
Methods for Operating Liquid Chemical Delivery Systems Having Recycling Elements App 20090050210 - Choi; Han-Mei ;   et al. | 2009-02-26 |
Methods of forming dielectric structures and capacitors Grant 7,425,493 - Yoon , et al. September 16, 2 | 2008-09-16 |
Methods of manufacturing a semiconductor device including a dielectric layer including zirconium Grant 7,402,491 - Choi , et al. July 22, 2 | 2008-07-22 |
Method of fabricating a nonvolatile memory device App 20080096349 - Park; Ki-yeon ;   et al. | 2008-04-24 |
Method of fabricating a nonvolatile memory device App 20080096340 - Oh; Se-hoon ;   et al. | 2008-04-24 |
Method of Manufacturing Non-Volatile Memory Device App 20080090353 - Park; Ki-Yeon ;   et al. | 2008-04-17 |
Method of manufacturing a non-volatile memory device App 20080085583 - Park; Young-Geun ;   et al. | 2008-04-10 |
Methods Of Forming Flash Memory Devices Including Blocking Oxide Films App 20080076224 - Ryu; Min-kyung ;   et al. | 2008-03-27 |
Method of manufacturing a non-volatile memory device App 20080070368 - Kim; Hong-Suk ;   et al. | 2008-03-20 |
Non-volatile memory device and method of manufacturing the same App 20080061360 - Oh; Se-Hoon ;   et al. | 2008-03-13 |
Semiconductor memory device and method of manufacturing the semiconductor memory device Grant 7,338,863 - Lee , et al. March 4, 2 | 2008-03-04 |
Thin film structure, capacitor, and methods for forming the same Grant 7,279,392 - Lee , et al. October 9, 2 | 2007-10-09 |
Method Of Fabricating Trap Type Nonvolatile Memory Device App 20070134868 - CHOI; Han-Mei ;   et al. | 2007-06-14 |
Method of forming a metal oxide film Grant 7,217,669 - Choi , et al. May 15, 2 | 2007-05-15 |
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning Grant 7,201,807 - Yim , et al. April 10, 2 | 2007-04-10 |
Method Of Fabricating Trap Nonvolatile Memory Device App 20070059883 - CHOI; Han-Mei ;   et al. | 2007-03-15 |
Flash Memory Devices Having Multilayered Inter-gate Dielectric Layers Including Metal Oxide Layers And Methods Of Manufacturing The Same App 20070026608 - Choi; Han-Mei ;   et al. | 2007-02-01 |
Methods of forming a multi-layered structure using an atomic layer deposition process and methods of forming a capacitor of an integrated circuit device Grant 7,135,422 - Nam , et al. November 14, 2 | 2006-11-14 |
Semiconductor device and gate structure having a composite dielectric layer and methods of manufacturing the same App 20060252281 - Park; Ki-Yeon ;   et al. | 2006-11-09 |
Method of manufacturing semiconductor device having reaction barrier layer App 20060240679 - Lee; Seung-Hwan ;   et al. | 2006-10-26 |
Gate structures of a non-volatile memory device and methods of manufacturing the same App 20060220106 - Choi; Han-Mei ;   et al. | 2006-10-05 |
Methods of forming thin layers including zirconium hafnium oxide and methods of forming gate structures, capacitors, and flash memory devices using the same App 20060141695 - Choi; Dae-Sik ;   et al. | 2006-06-29 |
Semiconductor memory device and method of manufacturing the semiconductor memory device App 20060138523 - Lee; Jong-Cheol ;   et al. | 2006-06-29 |
Methods of manufacturing a semiconductor device including a dielectric layer including zirconium App 20060094191 - Choi; Han-Mei ;   et al. | 2006-05-04 |
Methods of forming a layer utilizing a liquid-phase lanthanum precursor and methods of manufacturing a capacitor using the same App 20060072281 - Nam; Gab-Jin ;   et al. | 2006-04-06 |
Methods of forming integrated circuit devices with metal-insulator-metal capacitors App 20060060907 - Kim; Ki-Chul ;   et al. | 2006-03-23 |
Method of forming a layer and method of forming a capacitor of a semiconductor device having the same App 20060063346 - Lee; Jong-Cheol ;   et al. | 2006-03-23 |
Flash memory devices having an alternately arrayed inter-gate dielectric layer and methods of fabricating the same App 20060046387 - Choi; Han-Mei ;   et al. | 2006-03-02 |
Integrated circuit devices with metal-insulator-metal capacitors Grant 6,992,346 - Kim , et al. January 31, 2 | 2006-01-31 |
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure Grant 6,989,338 - Choi , et al. January 24, 2 | 2006-01-24 |
Method of forming a layer and forming a capacitor of a semiconductor device having the same layer App 20060014384 - Lee; Jong-Cheol ;   et al. | 2006-01-19 |
Thin film structure, capacitor, and methods for forming the same App 20050170566 - Lee, Seung-Hwan ;   et al. | 2005-08-04 |
Methods of forming dielectric structures and capacitors App 20050170601 - Yoon, Kyoung-Ryul ;   et al. | 2005-08-04 |
Method for manufacturing a semiconductor device having a capping layer covering a capacitor of the semiconductor device Grant 6,893,501 - Kim , et al. May 17, 2 | 2005-05-17 |
Liquid chemical delivery system with recycling element and associated methods App 20050031495 - Choi, Han-Mei ;   et al. | 2005-02-10 |
Methods of forming capacitors including reducing exposed electrodes in semiconductor devices Grant 6,849,517 - Chung , et al. February 1, 2 | 2005-02-01 |
Methods of forming a multi-layered structure using an atomic layer deposition process and methods of forming a capacitor of an integrated circuit device App 20050009369 - Nam, Gab-Jin ;   et al. | 2005-01-13 |
Integrated circuit devices with metal-insulator-metal capacitors and methods of forming the same App 20040262661 - Kim, Ki-Chul ;   et al. | 2004-12-30 |
Method of forming a metal oxide film App 20040259383 - Choi, Han-mei ;   et al. | 2004-12-23 |
Layer deposition methods App 20040237893 - Park, In-Sung ;   et al. | 2004-12-02 |
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure App 20040209430 - Choi, Han-Mei ;   et al. | 2004-10-21 |
Method of forming a metal oxide film Grant 6,800,570 - Choi , et al. October 5, 2 | 2004-10-05 |
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning App 20040123879 - Yim, Eun-Taek ;   et al. | 2004-07-01 |
Methods of forming capacitors including reducing exposed electrodes in semiconductor devices App 20040018678 - Chung, Jung-Hee ;   et al. | 2004-01-29 |
Methods of forming multilayer dielectric regions using varied deposition parameters Grant 6,649,502 - Yoo , et al. November 18, 2 | 2003-11-18 |
Method for manufacturing a semiconductor device having a capping layer covering a capacitor of the semiconductor device App 20030183153 - Kim, Ki-Chul ;   et al. | 2003-10-02 |
Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics Grant 6,599,807 - Lim , et al. July 29, 2 | 2003-07-29 |
Method of forming a metal oxide film App 20030049943 - Choi, Han-Mei ;   et al. | 2003-03-13 |
Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics App 20030036239 - Lim, Jae-soon ;   et al. | 2003-02-20 |
Methods of forming multilayer dielectric regions using varied deposition parameters App 20020013041 - Yoo, Cha-young ;   et al. | 2002-01-31 |