| Patent | Date |
|---|
Optimizing the utilization of metrology tools
Grant 10,725,385 - Holovinger , et al. | 2020-07-28 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 10,649,447 - Izikson , et al. | 2020-05-12 |
Overlay control with non-zero offset prediction
Grant 10,409,171 - Adel , et al. Sept | 2019-09-10 |
Method and apparatus for direct self assembly in target design and production
Grant 10,303,835 - Amit , et al. | 2019-05-28 |
Method and system for detecting and correcting problematic advanced process control parameters
Grant 10,295,993 - Choi , et al. | 2019-05-21 |
Optimizing The Utilization Of Metrology Tools
App 20180348649 - Holovinger; Tsachy ; et al. | 2018-12-06 |
Optimizing the utilization of metrology tools
Grant 10,095,121 - Holovinger , et al. October 9, 2 | 2018-10-09 |
Overlay Control with Non-Zero Offset Prediction
App 20180253017 - Adel; Michael E. ; et al. | 2018-09-06 |
Methods and Systems for Creating or Performing a Dynamic Sampling Scheme for a Process During Which Measurements Are Performed on Wafers
App 20170255188 - Izikson; Pavel ; et al. | 2017-09-07 |
Overlay target geometry for measuring multiple pitches
Grant 9,709,903 - Choi , et al. July 18, 2 | 2017-07-18 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 9,651,943 - Izikson , et al. May 16, 2 | 2017-05-16 |
Hybrid imaging and scatterometry targets
Grant 9,476,838 - Choi , et al. October 25, 2 | 2016-10-25 |
Optimizing The Utilization Of Metrology Tools
App 20160131983 - Holovinger; Tsachy ; et al. | 2016-05-12 |
Method And Apparatus For Direct Self Assembly In Target Design And Production
App 20150242558 - AMIT; Eran ; et al. | 2015-08-27 |
Feedforward/feedback litho process control of stress and overlay
Grant 9,116,442 - Adel , et al. August 25, 2 | 2015-08-25 |
Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets
Grant 9,093,458 - Amir , et al. July 28, 2 | 2015-07-28 |
Hybrid Imaging And Scatterometry Targets
App 20140375984 - Choi; DongSub ; et al. | 2014-12-25 |
Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability
Grant 8,804,137 - Choi , et al. August 12, 2 | 2014-08-12 |
Device Correlated Metrology (dcm) For Ovl With Embedded Sem Structure Overlay Targets
App 20140065736 - Amir; Nuriel ; et al. | 2014-03-06 |
Advanced process control optimization
Grant 8,655,469 - Choi , et al. February 18, 2 | 2014-02-18 |
Focus Monitoring Method Using Asymmetry Embedded Imaging Target
App 20130336572 - Choi; DongSub ; et al. | 2013-12-19 |
Overlay Target Geometry For Measuring Multiple Pitches
App 20130107259 - Choi; Dongsub ; et al. | 2013-05-02 |
Method And System For Detecting And Correcting Problematic Advanced Process Control Parameters
App 20130060354 - Choi; Dongsub ; et al. | 2013-03-07 |
Methods and Systems for Creating or Performing a Dynamic Sampling Scheme for a Process During Which Measurements Are Performed on Wafers
App 20120208301 - Izikson; Pavel ; et al. | 2012-08-16 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 8,175,831 - Izikson , et al. May 8, 2 | 2012-05-08 |
Feedforward/feedback Litho Process Control Of Stress And Overlay
App 20120094400 - Adel; Michael ; et al. | 2012-04-19 |
Feedforward/feedback litho process control of stress and overlay
Grant 8,111,376 - Adel , et al. February 7, 2 | 2012-02-07 |
Advanced Process Control Optimization
App 20120022679 - Choi; DongSub ; et al. | 2012-01-26 |
Unique Mark And Method To Determine Critical Dimension Uniformity And Registration Of Reticles Combined With Wafer Overlay Capability
App 20110051150 - Choi; DongSub ; et al. | 2011-03-03 |
Feedforward/feedback Litho Process Control Of Stress And Overlay
App 20080316442 - Adel; Michael ; et al. | 2008-12-25 |
Methods And Systems For Creating Or Performing A Dynamic Sampling Scheme For A Process During Which Measurements Are Performed On Wafers
App 20080286885 - Izikson; Pavel ; et al. | 2008-11-20 |
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