| Patent | Date |
|---|
Printed Circuit Board, Antenna Structure Including The Same And Image Display Device Including The Same
App 20220312594 - PARK; Dong Pil ; et al. | 2022-09-29 |
Template replication
Grant 11,454,883 - Choi , et al. September 27, 2 | 2022-09-27 |
Antenna Device And Display Device Including The Same
App 20220302573 - CHOI; Byung Jin ; et al. | 2022-09-22 |
Touch sensor and image display device including the same
Grant 11,449,161 - Choi , et al. September 20, 2 | 2022-09-20 |
Antenna Device And Display Device Including The Same
App 20220294106 - CHOI; Byung Jin ; et al. | 2022-09-15 |
Method of separating a template from a shaped film on a substrate
Grant 11,442,359 - Rafferty , et al. September 13, 2 | 2022-09-13 |
Antenna device and display device comprising the same
Grant 11,431,095 - Huh , et al. August 30, 2 | 2022-08-30 |
Antenna Element, Antenna Package And Display Device Including The Same
App 20220271412 - CHOI; Byung Jin ; et al. | 2022-08-25 |
Alignment control in nanoimprint lithography using feedback and feedforward control
Grant 11,422,460 - Lou , et al. August 23, 2 | 2022-08-23 |
Antenna Module And Display Device Including The Same
App 20220263237 - CHOI; Byung Jin ; et al. | 2022-08-18 |
Connector Structure For Antenna, Antenna Package And Image Display Device
App 20220263276 - KIM; Young Ju ; et al. | 2022-08-18 |
Electrode connection structure and electronic device including the same
Grant 11,392,241 - Choi , et al. July 19, 2 | 2022-07-19 |
Antenna Device And Image Display Device Including The Same
App 20220224000 - SHIN; Seung Hyun ; et al. | 2022-07-14 |
Antenna Structure And Display Device Including The Same
App 20220216596 - RYU; Han Sub ; et al. | 2022-07-07 |
Antenna Package And Image Display Device Including The Same
App 20220216587 - CHOI; Byung Jin ; et al. | 2022-07-07 |
Plate Connecting Assembly
App 20220193571 - LIM; Su Hyeon ; et al. | 2022-06-23 |
Overlay improvement in nanoimprint lithography
Grant 11,347,144 - Cherala , et al. May 31, 2 | 2022-05-31 |
Antenna Element And Display Device Including The Same
App 20220158350 - CHOI; Byung Jin ; et al. | 2022-05-19 |
Antenna Package And Image Display Device Including The Same
App 20220158329 - CHOI; Byung Jin ; et al. | 2022-05-19 |
Touch sensor and image display device including the same
Grant 11,327,612 - Choi , et al. May 10, 2 | 2022-05-10 |
Antenna Element, Antenna Array And Display Device Including The Same
App 20220140495 - KIM; Young Ju ; et al. | 2022-05-05 |
Antenna Element, Antenna Device And Display Device Including The Same
App 20220140482 - LEE; Won Hee ; et al. | 2022-05-05 |
Electrode Structure Combined With Antenna And Display Device Including The Same
App 20220137741 - CHOI; Byung Jin ; et al. | 2022-05-05 |
Antenna Package And Image Display Device Including The Same
App 20220131279 - KIM; Young Ju ; et al. | 2022-04-28 |
Touch sensing electrode structure and touch sensor including the same
Grant 11,314,359 - Choi , et al. April 26, 2 | 2022-04-26 |
Chuck Assembly, Planarization Process, Apparatus And Method Of Manufacturing An Article
App 20220115259 - BAMESBERGER; SETH J. ; et al. | 2022-04-14 |
High performance film-type touch sensor
Grant 11,262,880 - Lee , et al. March 1, 2 | 2022-03-01 |
System and method for improving the performance of a nanoimprint system
Grant 11,249,405 - Choi , et al. February 15, 2 | 2022-02-15 |
Touch sensor and image display device including the same
Grant 11,237,675 - Choi , et al. February 1, 2 | 2022-02-01 |
Wafer Process, Apparatus And Method Of Manufacturing An Article
App 20210358746 - Choi; Byung-Jin | 2021-11-18 |
Touch sensor and image display device including the same
Grant 11,175,786 - Choi , et al. November 16, 2 | 2021-11-16 |
Strain and kinetics control during separation phase of imprint process
Grant 11,161,280 - Khusnatdinov , et al. November 2, 2 | 2021-11-02 |
Planarization process, apparatus and method of manufacturing an article
Grant 11,145,535 - Choi , et al. October 12, 2 | 2021-10-12 |
Apparatus for separating a master template from a replica template
Grant 11,143,957 - Choi October 12, 2 | 2021-10-12 |
Film antenna and display device including the same
Grant 11,139,555 - Choi , et al. October 5, 2 | 2021-10-05 |
Wafer process, apparatus and method of manufacturing an article
Grant 11,107,678 - Choi August 31, 2 | 2021-08-31 |
Imprint apparatus and method of imprinting a partial field
Grant 11,104,057 - Meissl , et al. August 31, 2 | 2021-08-31 |
Composite cathode active material, method of preparing the composite cathode active material, and cathode and lithium battery each including the composite cathode active material
Grant 11,101,461 - Mun , et al. August 24, 2 | 2021-08-24 |
OLED integrated digitizer and method of preparing the same
Grant 11,094,756 - Choi , et al. August 17, 2 | 2021-08-17 |
Nanofabrication Method with Correction of Distortion Within an Imprint System
App 20210191257 - Choi; Byung-Jin ; et al. | 2021-06-24 |
Planarization process, apparatus and method of manufacturing an article
Grant 11,043,407 - Choi , et al. June 22, 2 | 2021-06-22 |
Alignment Control In Nanoimprint Lithography Using Feedback And Feedforward Control
App 20210181622 - Lou; Mingji ; et al. | 2021-06-17 |
Planarization process, apparatus and method of manufacturing an article
Grant 11,034,057 - Ozturk , et al. June 15, 2 | 2021-06-15 |
Touch Sensor And Image Display Device Including The Same
App 20210173528 - CHOI; Byung Jin ; et al. | 2021-06-10 |
Safe separation for nano imprinting
Grant 11,020,894 - Im , et al. June 1, 2 | 2021-06-01 |
Wafer Process, Apparatus And Method Of Manufacturing An Article
App 20210159075 - Choi; Byung-Jin | 2021-05-27 |
Systems and Methods for Curing a Shaped Film
App 20210157229 - Cherala; Anshuman ; et al. | 2021-05-27 |
Touch sensor and image display device including the same
Grant 11,003,268 - Choi , et al. May 11, 2 | 2021-05-11 |
Nanoimprint lithography with a six degrees-of-freedom imprint head module
Grant 10,996,561 - Bamesberger , et al. May 4, 2 | 2021-05-04 |
Real-time correction of template deformation in nanoimprint lithography
Grant 10,996,560 - Cherala , et al. May 4, 2 | 2021-05-04 |
Superstrate Chuck, Method Of Use, And Method Of Manufacturing An Article
App 20210125855 - Roy; Nilabh K. ; et al. | 2021-04-29 |
Touch sensor including antenna
Grant 10,990,234 - Kim , et al. April 27, 2 | 2021-04-27 |
Template for imprint lithography including a recession, an apparatus of using the template, and a method of fabricating an article
Grant 10,991,582 - Choi April 27, 2 | 2021-04-27 |
Edge Exclusion Apparatus And Methods Of Using The Same
App 20210104400 - CHOI; Byung-Jin | 2021-04-08 |
Nano imprinting with reusable polymer template with metallic or oxide coating
Grant 10,968,516 - Ahn , et al. April 6, 2 | 2021-04-06 |
System and method for adjusting a position of a template
Grant 10,969,680 - Choi , et al. April 6, 2 | 2021-04-06 |
Electrode connection and electric device comprising the same
Grant 10,942,599 - Choi , et al. March 9, 2 | 2021-03-09 |
Overlay Improvement In Nanoimprint Lithography
App 20210063870 - Cherala; Anshuman ; et al. | 2021-03-04 |
Touch sensor and image display device including the same
Grant 10,936,129 - Choi , et al. March 2, 2 | 2021-03-02 |
Planarization Process, Apparatus And Method Of Manufacturing An Article
App 20210050218 - Ozturk; Ozkan ; et al. | 2021-02-18 |
Planarization Process, Apparatus And Method Of Manufacturing An Article
App 20210050246 - Choi; Byung-Jin ; et al. | 2021-02-18 |
Planarization Process, Apparatus And Method Of Manufacturing An Article
App 20210050245 - Choi; Byung-Jin ; et al. | 2021-02-18 |
High resolution touch sensor
Grant 10,921,910 - Choi February 16, 2 | 2021-02-16 |
High Performance Film-type Touch Sensor
App 20210034199 - Lee; Jae Hyun ; et al. | 2021-02-04 |
Antenna Device And Display Device Comprising The Same
App 20200403315 - HUH; Yoon Ho ; et al. | 2020-12-24 |
Touch Sensor And Touch Screen Panel Including The Same
App 20200401256 - KIM; Keon ; et al. | 2020-12-24 |
Overlay improvement in nanoimprint lithography
Grant 10,866,510 - Cherala , et al. December 15, 2 | 2020-12-15 |
Nano Imprinting With Reusable Polymer Template With Metallic Or Oxide Coating
App 20200340118 - Ahn; Se-Hyun ; et al. | 2020-10-29 |
Forming Apparatus, Forming Method, And Article Manufacturing Method
App 20200333702 - Iwatani; Satoshi ; et al. | 2020-10-22 |
Touch sensor and touch screen panel having a bending portion
Grant 10,795,511 - Kim , et al. October 6, 2 | 2020-10-06 |
Method of Separating a Template from a Shaped Film on a Substrate
App 20200292933 - Rafferty; Tom H. ; et al. | 2020-09-17 |
OLED-integrated touch sensor and OLED display device including the same
Grant 10,770,518 - Choi , et al. Sep | 2020-09-08 |
Film Antenna And Display Device Including The Same
App 20200266526 - CHOI; Byung Jin ; et al. | 2020-08-20 |
Method and apparatus for selecting a reactant for removing a residual lithium compound from a cathode material
Grant 10,741,847 - Min , et al. A | 2020-08-11 |
Template For Imprint Lithography Including A Recession, An Apparatus Of Using The Template, And A Method Of Fabricating An Artic
App 20200243328 - CHOI; Byung-Jin | 2020-07-30 |
Nano imprinting with reusable polymer template with metallic or oxide coating
Grant 10,718,054 - Ahn , et al. | 2020-07-21 |
Apparatus for Separating a Master Template from a Replica Template
App 20200225575 - Choi; Byung-Jin | 2020-07-16 |
Template for imprint lithography including a recession and an apparatus and method of using the template
Grant 10,712,660 - Choi | 2020-07-14 |
Touch Sensor And Manufacturing Method Therefor
App 20200201481 - Lee; Jin Koo ; et al. | 2020-06-25 |
Composite Cathode Active Material, Method Of Preparing The Composite Cathode Active Material, And Cathode And Lithium Battery Ea
App 20200161645 - MUN; Jun-young ; et al. | 2020-05-21 |
System and methods for nanoimprint lithography
Grant 10,654,216 - Lu , et al. | 2020-05-19 |
Touch sensor
Grant 10,635,247 - Choi , et al. | 2020-04-28 |
Method for separating a nanoimprint template from a substrate
Grant 10,627,715 - Choi | 2020-04-21 |
Touch sensor comprising mesh pattern
Grant 10,606,383 - Choi , et al. | 2020-03-31 |
Composite cathode active material, method of preparing the composite cathode active material, and cathode and lithium battery each including the composite cathode active material
Grant 10,586,980 - Mun , et al. | 2020-03-10 |
Asymmetric template shape modulation for partial field imprinting
Grant 10,578,964 - Ganapathisubramanian , et al. | 2020-03-03 |
Adaptive chucking system
Grant 10,578,984 - Meissl , et al. | 2020-03-03 |
Touch Sensor Including Antenna
App 20200067176 - Kim; Jong Min ; et al. | 2020-02-27 |
Method and system for imprint force control
Grant 10,534,259 - Choi , et al. Ja | 2020-01-14 |
Digitizer and method of preparing the same
Grant 10,489,000 - Chae , et al. Nov | 2019-11-26 |
Digitizer and flexible display device comprising the same
Grant 10,474,266 - Chae , et al. Nov | 2019-11-12 |
System and Method for Improving the Performance of a Nanoimprint System
App 20190332021 - Choi; Byung-Jin ; et al. | 2019-10-31 |
Active metrology frame and thermal frame temperature control in imprint lithography
Grant 10,444,624 - Lu , et al. Oc | 2019-10-15 |
High Resolution Touch Sensor
App 20190286257 - CHOI; Byung Jin | 2019-09-19 |
Touch Sensor And Image Display Device Including The Same
App 20190286269 - CHOI; Byung Jin ; et al. | 2019-09-19 |
Input Sensor And Display Device Including The Same
App 20190278399 - CHOI; Byung Jin ; et al. | 2019-09-12 |
Alignment control in nanoimprint lithography based on real-time system identification
Grant 10,409,178 - Lu , et al. Sept | 2019-09-10 |
Mold, imprint apparatus, and method of manufacturing article
Grant 10,409,156 - Choi , et al. Sept | 2019-09-10 |
Oled Integrated Digitizer And Method Of Preparing The Same
App 20190267430 - CHOI; Byung Jin ; et al. | 2019-08-29 |
Electrode connection unit and touch screen panel including the same
Grant 10,394,362 - Lee , et al. A | 2019-08-27 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20190232533 - Khusnatdinov; Niyaz ; et al. | 2019-08-01 |
Touch sensor including driving electrode connected to driving channel for each divided area
Grant 10,345,955 - Lee , et al. July 9, 2 | 2019-07-09 |
Imprint apparatus and article manufacturing method
Grant 10,335,984 - Choi , et al. | 2019-07-02 |
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
Grant RE47,483 - Resnick , et al. | 2019-07-02 |
Touch sensing electrode structure and touch sensor including the same
Grant 10,338,758 - Choi , et al. | 2019-07-02 |
Nanoimprint Lithography With A Six Degrees-of-freedom Imprint Head Module
App 20190196324 - Bamesberger; Seth J. ; et al. | 2019-06-27 |
Touch sensor integrated with OLED and OLED display device comprising the same
Grant 10,332,943 - Seo , et al. | 2019-06-25 |
Alignment Control In Nanoimprint Lithography Based On Real-time System Identification
App 20190187575 - Lu; Xiaoming ; et al. | 2019-06-20 |
Touch sensor
Grant 10,303,314 - Choi , et al. | 2019-05-28 |
Electrode connecting structure, touch sensor and image display device
Grant 10,296,155 - Noh , et al. | 2019-05-21 |
Methods for controlling extrusions during imprint template replication processes
Grant 10,288,999 - Choi | 2019-05-14 |
Electrode Connection Structure And Electronic Device Including The Same
App 20190129535 - CHOI; Byung Jin ; et al. | 2019-05-02 |
Touch Sensor And Image Display Device Including The Same
App 20190079622 - CHOI; Byung Jin ; et al. | 2019-03-14 |
Safe Separation for Nano Imprinting
App 20190061228 - Im; Se-Hyuk ; et al. | 2019-02-28 |
Touch Sensor And Image Display Device Including The Same
App 20190064964 - CHOI; Byung Jin ; et al. | 2019-02-28 |
Touch Sensor And Image Display Device Including The Same
App 20190056821 - CHOI; Byung Jin ; et al. | 2019-02-21 |
Imprint apparatus, and method of manufacturing article
Grant 10,199,244 - Kawahara , et al. Fe | 2019-02-05 |
Overlay Improvement In Nanoimprint Lithography
App 20190033709 - Cherala; Anshuman ; et al. | 2019-01-31 |
Real-time Correction Of Template Deformation In Nanoimprint Lithography
App 20190033708 - Cherala; Anshuman ; et al. | 2019-01-31 |
Touch Sensor And Image Display Device Including The Same
App 20190018518 - CHOI; Byung Jin ; et al. | 2019-01-17 |
Oled-integrated Touch Sensor And Oled Display Device Including The Same
App 20180350885 - CHOI; Byung Jin ; et al. | 2018-12-06 |
Touch Sensing Electrode Structure And Touch Sensor Including The Same
App 20180335865 - CHOI; Byung Jin ; et al. | 2018-11-22 |
Touch sensor
Grant 10,133,406 - Choi November 20, 2 | 2018-11-20 |
Composite Cathode Active Material, Method Of Preparing The Composite Cathode Active Material, And Cathode And Lithium Battery Each Including The Composite Cathode Active Material
App 20180323426 - MUN; Jun-young ; et al. | 2018-11-08 |
Touch sensor laminate, touch screen panel and image display device including the same
Grant 10,095,340 - Choi October 9, 2 | 2018-10-09 |
Method And System For Imprint Force Control
App 20180284604 - Choi; Byung-Jin ; et al. | 2018-10-04 |
Electrode Connecting Structure, Touch Sensor And Image Display Device
App 20180253170 - NOH; Sung Jin ; et al. | 2018-09-06 |
Digitizer And Method Of Preparing The Same
App 20180246608 - HUH; Yoonho ; et al. | 2018-08-30 |
Digitizer And Method Of Preparing The Same
App 20180246595 - CHAE; Seung Jin ; et al. | 2018-08-30 |
Digitizer And Flexible Display Device Comprising The Same
App 20180239478 - CHAE; Seung Jin ; et al. | 2018-08-23 |
Composite cathode active material, method of preparing the composite cathode active material, and cathode and lithium battery each including the composite cathode active material
Grant 10,056,608 - Mun , et al. August 21, 2 | 2018-08-21 |
Electrode Connection Unit And Touch Screen Panel Including The Same
App 20180224988 - LEE; Jin Koo ; et al. | 2018-08-09 |
Touch Sensing Electrode Structure And Touch Sensor Including The Same
App 20180188852 - CHOI; Byung Jin ; et al. | 2018-07-05 |
Touch panel and image display device including the same
Grant 10,013,127 - Choi , et al. July 3, 2 | 2018-07-03 |
Adaptive Chucking System
App 20180173119 - Meissl; Mario Johannes ; et al. | 2018-06-21 |
Methods For Controlling Extrusions During Imprint Template Replication Processes
App 20180169910 - Choi; Byung-Jin | 2018-06-21 |
Template For Imprint Lithography Including A Recession And An Apparatus And Method Of Using The Template
App 20180170089 - Choi; Byung-Jin | 2018-06-21 |
Template For Imprint Lithography Including A Recession, An Apparatus Of Using The Template, And A Method Of Fabricating An Article
App 20180174827 - CHOI; Byung-Jin | 2018-06-21 |
Electrode Connection And Electric Device Comprising The Same
App 20180164913 - CHOI; Byung Jin ; et al. | 2018-06-14 |
Touch Sensor Integrated With Oled And Oled Display Device Comprising The Same
App 20180151627 - SEO; Min Soo ; et al. | 2018-05-31 |
System And Method For Adjusting A Position Of A Template
App 20180149968 - Choi; Byung-Jin ; et al. | 2018-05-31 |
Method And Apparatus For Selecting A Reactant For Removing A Residual Lithium Compound From A Cathode Material
App 20180145332 - MIN; Kyoung Min ; et al. | 2018-05-24 |
Template Replication
App 20180136556 - Choi; Byung-Jin ; et al. | 2018-05-17 |
Method For Separating A Nanoimprint Template From A Substrate
App 20180117805 - Choi; Byung-Jin | 2018-05-03 |
Touch Sensor Laminate, Touch Screen Panel And Image Display Device Including The Same
App 20180039361 - CHOI; Byung Jin | 2018-02-08 |
Touch panel and image display device including the same
Grant 9,886,127 - Choi February 6, 2 | 2018-02-06 |
Nano Imprinting With Reusable Polymer Template With Metallic Or Oxide Coating
App 20180030598 - Ahn; Se-Hyun ; et al. | 2018-02-01 |
Touch Sensor
App 20180032177 - CHOI; Byung Jin ; et al. | 2018-02-01 |
Touch Sensor
App 20180018034 - CHOI; Byung Jin ; et al. | 2018-01-18 |
Nano imprinting with reusable polymer template with metallic or oxide coating
Grant 9,816,186 - Ahn , et al. November 14, 2 | 2017-11-14 |
Touch Sensor
App 20170322667 - LEE; Cheol Hun ; et al. | 2017-11-09 |
Touch Sensor And Touch Screen Panel Including The Same
App 20170285800 - KIM; Keon ; et al. | 2017-10-05 |
System And Methods For Nanoimprint Lithography
App 20170282439 - LU; XIAOMING ; et al. | 2017-10-05 |
Touch Sensor
App 20170285801 - Choi; Byung Jin ; et al. | 2017-10-05 |
Low contact imprint lithography template chuck system for improved overlay correction
Grant 9,778,578 - Meissl , et al. October 3, 2 | 2017-10-03 |
Porous template and imprinting stack for nano-imprint lithography
Grant 9,778,562 - Xu , et al. October 3, 2 | 2017-10-03 |
Touch Sensing Electrode Integrally Formed With Polarizing Plate, Display Device Comprising Same, And Manufacturing Method Therefor
App 20170277291 - LEE; Jaehyun ; et al. | 2017-09-28 |
Imprint apparatus and article manufacturing method
Grant 9,770,850 - Mizuno , et al. September 26, 2 | 2017-09-26 |
Imprint Apparatus And Method Of Imprinting A Partial Field
App 20170165898 - Meissl; Mario Johannes ; et al. | 2017-06-15 |
Composite Cathode Active Material, Method Of Preparing The Composite Cathode Active Material, And Cathode And Lithium Battery Each Including The Composite Cathode Active Material
App 20170155136 - MUN; Jun-young ; et al. | 2017-06-01 |
Touch Panel And Image Display Device Including The Same
App 20170147132 - CHOI; Byung Jin | 2017-05-25 |
Touch Sensor
App 20170147133 - CHOI; Byung Jin | 2017-05-25 |
Large area imprint lithography
Grant 9,616,614 - Choi , et al. April 11, 2 | 2017-04-11 |
Composite cathode active material, method of preparing the composite cathode active material, and cathode and lithium battery each including the composite cathode active material
Grant 9,601,761 - Mun , et al. March 21, 2 | 2017-03-21 |
Touch Panel And Image Display Device Including The Same
App 20170068382 - CHOI; Byung Jin ; et al. | 2017-03-09 |
Imprint Apparatus, And Method Of Manufacturing Article
App 20170047234 - Kawahara; Nobuto ; et al. | 2017-02-16 |
Imprint Apparatus And Article Manufacturing Method
App 20170028598 - Choi; Byung-jin ; et al. | 2017-02-02 |
Chucking system with recessed support feature
Grant 9,529,274 - GanapathiSubramanian , et al. December 27, 2 | 2016-12-27 |
Mold, Imprint Apparatus, And Method Of Manufacturing Article
App 20160236400 - Choi; Byung-Jin ; et al. | 2016-08-18 |
Composite cathode active material, method of preparing the same, and cathode and lithium battery containing the same
Grant 9,373,868 - Choi , et al. June 21, 2 | 2016-06-21 |
Nano Imprinting With Reusable Polymer Template With Metallic Or Oxide Coating
App 20160047044 - Ahn; Se Hyun ; et al. | 2016-02-18 |
Cathode active material, and cathode and lithium battery including the material
Grant 9,246,171 - Choi , et al. January 26, 2 | 2016-01-26 |
Imprint lithography template
Grant 9,227,361 - Choi , et al. January 5, 2 | 2016-01-05 |
Method of automatic fluid dispensing for imprint lithography processes
Grant 9,223,202 - Choi , et al. December 29, 2 | 2015-12-29 |
Nano imprinting with reusable polymer template with metallic or oxide coating
Grant 9,170,485 - Ahn , et al. October 27, 2 | 2015-10-27 |
Dual zone template chuck
Grant 9,164,375 - Ganapathisubramanian , et al. October 20, 2 | 2015-10-20 |
Asymmetric Template Shape Modulation for Partial Field Imprinting
App 20150183151 - Ganapathisubramanian; Mahadevan ; et al. | 2015-07-02 |
Safe Separation For Nano Imprinting
App 20150165671 - Im; Se-Hyuk ; et al. | 2015-06-18 |
Low Contact Imprint Lithography Template Chuck System For Improved Overlay Correction
App 20150131072 - Meissl; Mario Johannes ; et al. | 2015-05-14 |
Chucking System With Recessed Support Feature
App 20150091230 - GanapathiSubramanian; Mahadevan ; et al. | 2015-04-02 |
Composite Cathode Active Material, Method Of Preparing The Same, And Cathode And Lithium Battery Containing The Same
App 20150079465 - CHOI; Byung-jin ; et al. | 2015-03-19 |
Methods and systems of material removal and pattern transfer
Grant 8,980,751 - Schmid , et al. March 17, 2 | 2015-03-17 |
Safe separation for nano imprinting
Grant 8,968,620 - Im , et al. March 3, 2 | 2015-03-03 |
Composite Cathode Active Material, Method Of Preparing The Composite Cathode Active Material, And Cathode And Lithium Battery Each Including The Composite Cathode Active Material
App 20140377655 - MUN; Jun-young ; et al. | 2014-12-25 |
Chucking system with recessed support feature
Grant 8,913,230 - GanapathiSubramanian , et al. December 16, 2 | 2014-12-16 |
Patterning Of Non-convex Shaped Nanostructures
App 20140319727 - Sreenivasan; Sidlgata V. ; et al. | 2014-10-30 |
Imprint Apparatus And Article Manufacturing Method
App 20140312532 - Mizuno; Makoto ; et al. | 2014-10-23 |
Nano Imprinting With Reusable Polymer Template With Metallic Or Oxide Coating
App 20140314897 - Ahn; Se Hyun ; et al. | 2014-10-23 |
Imprinting of partial fields at the edge of the wafer
Grant 8,865,046 - Sreenivasan , et al. October 21, 2 | 2014-10-21 |
Patterning of non-convex shaped nanostructures
Grant 8,828,297 - Sreenivasan , et al. September 9, 2 | 2014-09-09 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20140117574 - Khusnatdinov; Niyaz ; et al. | 2014-05-01 |
Cathode Active Material, And Cathode And Lithium Battery Including The Material
App 20140103252 - CHOI; Byung-jin ; et al. | 2014-04-17 |
Roll-to-roll imprint lithography and purging system
Grant 8,691,134 - Choi April 8, 2 | 2014-04-08 |
Lamp electrode printed circuit board and backlight unit including the same
Grant 8,678,633 - Choi , et al. March 25, 2 | 2014-03-25 |
Strain and kinetics control during separation phase of imprint process
Grant 8,652,393 - Khusnatdinov , et al. February 18, 2 | 2014-02-18 |
Imprint Lithography Template
App 20140008841 - Choi; Byung-Jin ; et al. | 2014-01-09 |
Methods for exposure for the purpose of thermal management for imprint lithography processes
Grant 8,609,326 - Sreenivasan , et al. December 17, 2 | 2013-12-17 |
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
Grant 8,556,616 - Resnick , et al. October 15, 2 | 2013-10-15 |
Large Area Imprint Lithography
App 20130214452 - Choi; Byung-Jin ; et al. | 2013-08-22 |
Liquid crystal display and driving method thereof
Grant 8,446,395 - Song , et al. May 21, 2 | 2013-05-21 |
Alignment for edge field nano-imprinting
Grant 8,432,548 - Choi , et al. April 30, 2 | 2013-04-30 |
In-situ cleaning of an imprint lithography tool
Grant 8,394,203 - Schmid , et al. March 12, 2 | 2013-03-12 |
Method and system to control movement of a body for nano-scale manufacturing
Grant 8,387,482 - Choi , et al. March 5, 2 | 2013-03-05 |
Step and repeat imprint lithography process
Grant 8,318,066 - Sreenivasan , et al. November 27, 2 | 2012-11-27 |
Separation in an imprint lithography process
Grant 8,309,008 - Choi , et al. November 13, 2 | 2012-11-13 |
Liquid crystal display
Grant 8,289,258 - Song , et al. October 16, 2 | 2012-10-16 |
Method for expelling gas positioned between a substrate and a mold
Grant 8,282,383 - Choi , et al. October 9, 2 | 2012-10-09 |
Liquid crystal display device having a single source printed circuit board
Grant 8,237,648 - Song , et al. August 7, 2 | 2012-08-07 |
Energy sources for curing in an imprint lithography system
Grant 8,237,133 - Ganapathisubramanian , et al. August 7, 2 | 2012-08-07 |
Substrate alignment
Grant 8,231,821 - Choi , et al. July 31, 2 | 2012-07-31 |
Imprint lithography system and method
Grant 8,215,946 - GanapathiSubramanian , et al. July 10, 2 | 2012-07-10 |
Liquid crystal display and driving method thereof
Grant 8,212,764 - Song , et al. July 3, 2 | 2012-07-03 |
Large area roll-to-roll imprint lithography
Grant 8,187,515 - Sreenivasan , et al. May 29, 2 | 2012-05-29 |
Patterning Of Non-convex Shaped Nanostructures
App 20120112385 - Sreenivasan; Sidlgata V. ; et al. | 2012-05-10 |
Alignment system and method for a substrate in a nano-imprint process
Grant 8,147,731 - Nimmakayala , et al. April 3, 2 | 2012-04-03 |
Imprint lithography system and method
Grant 8,142,704 - Wang , et al. March 27, 2 | 2012-03-27 |
Conforming template for patterning liquids disposed on substrates
Grant 8,123,514 - Sreenivasan , et al. February 28, 2 | 2012-02-28 |
Double-sided nano-imprint lithography system
Grant 8,109,753 - Choi , et al. February 7, 2 | 2012-02-07 |
Method and system for double-sided patterning of substrates
Grant 8,109,754 - Choi , et al. February 7, 2 | 2012-02-07 |
Capillary imprinting technique
Grant 8,057,725 - Choi , et al. November 15, 2 | 2011-11-15 |
Safe Deparation For Nano Imprinting
App 20110260361 - Im; Se-Hyuk ; et al. | 2011-10-27 |
Backlight driving apparatus of LCD and driving method thereof
Grant 8,044,919 - Song , et al. October 25, 2 | 2011-10-25 |
Chucking system for nano-manufacturing
Grant 8,033,815 - Babbs , et al. October 11, 2 | 2011-10-11 |
Chucking system comprising an array of fluid chambers
Grant 8,033,813 - Cherala , et al. October 11, 2 | 2011-10-11 |
Device for holding a template for use in imprint lithography
Grant 8,033,814 - Bailey , et al. October 11, 2 | 2011-10-11 |
Template having alignment marks formed of contrast material
Grant 8,012,395 - Selinidis , et al. September 6, 2 | 2011-09-06 |
Imprinting of Partial Fields at the Edge of the Wafer
App 20110212263 - Sreenivasan; Sidlgata V. ; et al. | 2011-09-01 |
Process Gas Confinement for Nano-Imprinting
App 20110193251 - Jain; Ankur ; et al. | 2011-08-11 |
Roll-to-roll Imprint Lithography And Purging System
App 20110183070 - Choi; Byung-Jin | 2011-07-28 |
Systems And Methods For Substrate Formation
App 20110180964 - Choi; Byung-Jin | 2011-07-28 |
Methods And Systems Of Material Removal And Pattern Transfer
App 20110183521 - Schmid; Gerard M. ; et al. | 2011-07-28 |
Backlight unit and method for manufacturing the same
Grant 7,980,715 - Song , et al. July 19, 2 | 2011-07-19 |
Liquid Crystal Display And Driving Method Thereof
App 20110169797 - Song; Hong Sung ; et al. | 2011-07-14 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20110171340 - Resnick; Douglas J. ; et al. | 2011-07-14 |
Capillary Imprinting Technique
App 20110140302 - Choi; Byung-Jin ; et al. | 2011-06-16 |
Imprint Lithography Template
App 20110140304 - Choi; Byung-Jin ; et al. | 2011-06-16 |
Step and repeat imprint lithography processes
Grant 7,943,081 - Sreenivasan , et al. May 17, 2 | 2011-05-17 |
Liquid crystal display and driving method thereof
Grant 7,944,427 - Choi May 17, 2 | 2011-05-17 |
Imprinting of partial fields at the edge of the wafer
Grant 7,935,292 - Sreenivasan , et al. May 3, 2 | 2011-05-03 |
Method to control an atmosphere between a body and a substrate
Grant 7,931,846 - Choi , et al. April 26, 2 | 2011-04-26 |
Liquid crystal display and driving method thereof
Grant 7,932,884 - Song , et al. April 26, 2 | 2011-04-26 |
Liquid Crystal Display Device
App 20110084956 - CHOI; Byung Jin ; et al. | 2011-04-14 |
Large Area Linear Array Nanoimprinting
App 20110084417 - Choi; Byung-Jin ; et al. | 2011-04-14 |
Liquid crystal display module
Grant 7,924,391 - Choi , et al. April 12, 2 | 2011-04-12 |
Capillary imprinting technique
Grant 7,910,042 - Choi , et al. March 22, 2 | 2011-03-22 |
Bifurcated contact printing technique
Grant 7,906,058 - GanapathiSubramanian , et al. March 15, 2 | 2011-03-15 |
Method and System to Control Movement of a Body for Nano-Scale Manufacturing
App 20110048160 - Choi; Byung-Jin ; et al. | 2011-03-03 |
Methods For Manufacturing Chucking Systems
App 20110042345 - Choi; Byung-Jin ; et al. | 2011-02-24 |
Alignment System and Method for a Substrate in a Nano-Imprint Process
App 20110026039 - Nimmakayala; Pawan Kumar ; et al. | 2011-02-03 |
Interferometric analysis method for the manufacture of nano-scale devices
Grant 7,880,872 - Nimmakayala , et al. February 1, 2 | 2011-02-01 |
Chucking System for Nano-Manufacturing
App 20110014314 - Babbs; Daniel A. ; et al. | 2011-01-20 |
Chucking System With Recessed Support Feature
App 20110001954 - GanapathiSubramanian; Mahadevan ; et al. | 2011-01-06 |
Dual Zone Template Chuck
App 20100320645 - Ganapathisubramanian; Mahadevan ; et al. | 2010-12-23 |
Chucking System for Nano-Manufacturing
App 20100314803 - Babbs; Daniel A. ; et al. | 2010-12-16 |
Alignment system and method for a substrate in a nano-imprint process
Grant 7,837,907 - Nimmakayala , et al. November 23, 2 | 2010-11-23 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20100291257 - Resnick; Douglas J. ; et al. | 2010-11-18 |
Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks
App 20100278954 - Sreenivasan; Sidlgata V. ; et al. | 2010-11-04 |
Real time imprint process diagnostics for defects
Grant 7,815,824 - Sreenivasan , et al. October 19, 2 | 2010-10-19 |
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques
App 20100259745 - Cherala; Anshuman ; et al. | 2010-10-14 |
Imprinting of partial fields at the edge of the wafer
Grant 7,802,978 - Sreenivasan , et al. September 28, 2 | 2010-09-28 |
Technique for separating a mold from solidified imprinting material
Grant 7,803,308 - GanapathiSubramanian , et al. September 28, 2 | 2010-09-28 |
Chucking system for nano-manufacturing
Grant 7,798,801 - Babbs , et al. September 21, 2 | 2010-09-21 |
Enhanced multi channel alignment
Grant 7,785,096 - Nimmakayala , et al. August 31, 2 | 2010-08-31 |
Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks
Grant 7,780,893 - Sreenivasan , et al. August 24, 2 | 2010-08-24 |
Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques
Grant 7,768,624 - Cherala , et al. August 3, 2 | 2010-08-03 |
Conforming Template for Patterning Liquids Disposed on Substrates
App 20100173034 - Sreenivasan; Sidlgata V. ; et al. | 2010-07-08 |
Separation Methods For Imprint Lithography
App 20100154993 - Choi; Byung-Jin ; et al. | 2010-06-24 |
Capillary Imprinting Technique
App 20100140841 - Choi; Byung-Jin ; et al. | 2010-06-10 |
Method for Expelling Gas Positioned Between a Substrate and a Mold
App 20100143521 - Choi; Byung-Jin ; et al. | 2010-06-10 |
Method and System for Double-Sided Patterning of Substrates
App 20100129486 - Choi; Byung-Jin ; et al. | 2010-05-27 |
Method to Control an Atmosphere Between a Body and a Substrate
App 20100119637 - Choi; Yeong-Jun ; et al. | 2010-05-13 |
Double-Sided Nano-Imprint Lithography System
App 20100112116 - Choi; Byung-Jin ; et al. | 2010-05-06 |
Substrate Patterning
App 20100112310 - Truskett; Van Nguyen ; et al. | 2010-05-06 |
Alignment for Edge Field Nano-Imprinting
App 20100110434 - Choi; Byung-Jin ; et al. | 2010-05-06 |
Separation in an Imprint Lithography Process
App 20100110409 - Choi; Byung-Jin ; et al. | 2010-05-06 |
Substrate Alignment
App 20100109202 - Choi; Byung-Jin ; et al. | 2010-05-06 |
Device for holding a template for use in imprint lithography
Grant 7,708,542 - Bailey , et al. May 4, 2 | 2010-05-04 |
Capillary imprinting technique
Grant 7,708,926 - Choi , et al. May 4, 2 | 2010-05-04 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20100102469 - Khusnatdinov; Niyaz ; et al. | 2010-04-29 |
Imprint Lithography System and Method
App 20100096766 - Wang; Liang ; et al. | 2010-04-22 |
Remote center compliant flexure device
Grant 7,701,112 - Choi , et al. April 20, 2 | 2010-04-20 |
Conforming template for patterning liquids disposed on substrates
Grant 7,699,598 - Sreenivasan , et al. April 20, 2 | 2010-04-20 |
Energy Sources for Curing in an Imprint Lithography System
App 20100090130 - Ganapathisubramanian; Mahadevan ; et al. | 2010-04-15 |
In-Situ Cleaning of an Imprint Lithography Tool
App 20100085555 - Schmid; Gerard M. ; et al. | 2010-04-08 |
Method for expelling gas positioned between a substrate and a mold
Grant 7,691,313 - Choi , et al. April 6, 2 | 2010-04-06 |
Liquid crystal display module
App 20100073591 - Choi; Byung-Jin ; et al. | 2010-03-25 |
Imprint Lithography System And Method
App 20100072652 - GanapathiSubramanian; Mahadevan ; et al. | 2010-03-25 |
Chucking System Comprising an Array of Fluid Chambers
App 20100059914 - Cherala; Anshuman ; et al. | 2010-03-11 |
Method and system for double-sided patterning of substrates
Grant 7,670,529 - Choi , et al. March 2, 2 | 2010-03-02 |
Method to control an atmosphere between a body and a substrate
Grant 7,670,534 - Choi , et al. March 2, 2 | 2010-03-02 |
Patterning substrates employing multiple chucks
Grant 7,670,530 - Choi , et al. March 2, 2 | 2010-03-02 |
System to transfer a template transfer body between a motion stage and a docking plate
Grant 7,665,981 - Schumaker , et al. February 23, 2 | 2010-02-23 |
Interferometric Analysis Method for the Manufacture of Nano-Scale Devices
App 20100038827 - Nimmakayala; Pawan Kumar ; et al. | 2010-02-18 |
Inner Cavity System For Nano-imprint Lithography
App 20100015270 - Choi; Byung-Jin ; et al. | 2010-01-21 |
Method for expelling gas positioned between a substrate and a mold
Grant 7,641,840 - Choi , et al. January 5, 2 | 2010-01-05 |
Method of retaining a substrate to a wafer chuck
Grant 7,636,999 - Choi , et al. December 29, 2 | 2009-12-29 |
Chucking system comprising an array of fluid chambers
Grant 7,635,263 - Cherala , et al. December 22, 2 | 2009-12-22 |
Method of separating a mold from a solidified layer disposed on a substrate
Grant 7,635,445 - Choi , et al. December 22, 2 | 2009-12-22 |
Interferometric analysis method for the manufacture of nano-scale devices
Grant 7,630,067 - Nimmakayala , et al. December 8, 2 | 2009-12-08 |
Remote Center Compliant Flexure Device
App 20090294059 - Choi; Byung-Jin ; et al. | 2009-12-03 |
Imprinting of Partial Fields at the Edge of the Wafer
App 20090283934 - Sreenivasan; Sidlgata V. ; et al. | 2009-11-19 |
Template Having Alignment Marks Formed of Contrast Material
App 20090250840 - Selinidis; Kosta S. ; et al. | 2009-10-08 |
Large Area Roll-To-Roll Imprint Lithography
App 20090243153 - Sreenivasan; Sidlgata V. ; et al. | 2009-10-01 |
Imprint Lithography Templates Having Alignment Marks
App 20090214689 - Bailey; Todd C. ; et al. | 2009-08-27 |
Real Time Imprint Process Diagnostics For Defects
App 20090214761 - Sreenivasan; Sidlgata V. ; et al. | 2009-08-27 |
Formation of Conductive Templates Employing Indium Tin Oxide
App 20090214686 - Sreenivasan; Sidlgata V. ; et al. | 2009-08-27 |
Backlight Unit And Method For Manufacturing The Same
App 20090185365 - Song; Hong Sung ; et al. | 2009-07-23 |
Enhanced Multi Channel Alignment
App 20090169662 - Nimmakayala; Pawan Kumar ; et al. | 2009-07-02 |
Porous Template And Imprinting Stack For Nano-imprint Lithography
App 20090140458 - Xu; Frank Y. ; et al. | 2009-06-04 |
Nanostructured Organic Solar Cells
App 20090133751 - Sreenivasan; Sidlgata V. ; et al. | 2009-05-28 |
Formation of conductive templates employing indium tin oxide
Grant 7,491,637 - Sreenivasan , et al. February 17, 2 | 2009-02-17 |
Method and System to Control Movement of a Body for Nano-Scale Manufacturing
App 20090037004 - Choi; Byung-Jin ; et al. | 2009-02-05 |
Remote Center Compliant Flexure Device
App 20090025246 - Choi; Byung-Jin ; et al. | 2009-01-29 |
Alignment System and Method for a Substrate in a Nano-Imprint Process
App 20090026657 - Nimmakayala; Pawan Kumar ; et al. | 2009-01-29 |
Partial vacuum environment imprinting
Grant 7,462,028 - Cherala , et al. December 9, 2 | 2008-12-09 |
Lamp electrode printed circuit board and backlight unit including the same
App 20080284941 - Choi; Byung-Jin ; et al. | 2008-11-20 |
Liquid crystal display device
App 20080278428 - Song; Hong Sung ; et al. | 2008-11-13 |
Capillary imprinting technique
Grant 7,442,336 - Choi , et al. October 28, 2 | 2008-10-28 |
Remote center compliant flexure device
Grant 7,432,634 - Choi , et al. October 7, 2 | 2008-10-07 |
Liquid crystal display
App 20080225036 - Song; Hong Sung ; et al. | 2008-09-18 |
Method of varying dimensions of a substrate during nano-scale manufacturing
Grant 7,420,654 - Cherala , et al. September 2, 2 | 2008-09-02 |
Capillary Imprinting Technique
App 20080174046 - Choi; Byung-Jin ; et al. | 2008-07-24 |
Liquid crystal display and driving method thereof
App 20080170024 - Song; Hong Sung ; et al. | 2008-07-17 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20080160129 - Resnick; Douglas J. ; et al. | 2008-07-03 |
Methods for Exposure for the Purpose of Thermal Management for Imprint Lithography Processes
App 20080153312 - Sreenivasan; Sidlgata V. ; et al. | 2008-06-26 |
Compliant device for nano-scale manufacturing
Grant 7,387,508 - Choi , et al. June 17, 2 | 2008-06-17 |
Liquid crystal display and driving method thereof
App 20080117162 - Song; Hong Sung ; et al. | 2008-05-22 |
Apparatus to control displacement of a body spaced-apart from a surface
Grant 7,374,415 - Choi , et al. May 20, 2 | 2008-05-20 |
Backlight driving apparatus of LCD and driving method thereof
App 20080055232 - SONG; Hong Sung ; et al. | 2008-03-06 |
Formation of discontinuous films during an imprint lithography process
Grant 7,338,275 - Choi , et al. March 4, 2 | 2008-03-04 |
Liquid crystal display and driving method thereof
App 20080024692 - Choi; Byung Jin | 2008-01-31 |
Magnification correction employing out-of-plane distortion of a substrate
Grant 7,323,130 - Nimmakayala , et al. January 29, 2 | 2008-01-29 |
System to control an atmosphere between a body and a substrate
Grant 7,316,554 - Choi , et al. January 8, 2 | 2008-01-08 |
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques
App 20070287081 - Cherala; Anshuman ; et al. | 2007-12-13 |
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
Grant 7,303,383 - Sreenivasan , et al. December 4, 2 | 2007-12-04 |
Partial Vacuum Environment Imprinting
App 20070275114 - Cherala; Anshuman ; et al. | 2007-11-29 |
System for varying dimensions of a substrate during nanoscale manufacturing
Grant 7,298,456 - Cherala , et al. November 20, 2 | 2007-11-20 |
Imprint Lithography System To Produce Light To Impinge Upon And Polymerize A Liquid In Superimposition With Template Overlay Marks
App 20070264588 - Sreenivasan; Sidlgata V. ; et al. | 2007-11-15 |
Interferometric analysis for the manufacture of nano-scale devices
Grant 7,292,326 - Nimmakayala , et al. November 6, 2 | 2007-11-06 |
System to vary dimensions of a thin template
App 20070231422 - Cherala; Anshuman ; et al. | 2007-10-04 |
Imprinting of Partial Fields at the Edge of the Wafer
App 20070228609 - Sreenivasan; Sidlgata V. ; et al. | 2007-10-04 |
Enhanced Multi Channel Alignment
App 20070231421 - Nimmakayala; Pawan Kumar ; et al. | 2007-10-04 |
Method For Expelling Gas Positioned Between A Substrate And A Mold
App 20070228589 - Choi; Byung-Jin ; et al. | 2007-10-04 |
Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks
App 20070228610 - Sreenivasan; Sidlgata V. ; et al. | 2007-10-04 |
Chucking system comprising an array of fluid chambers
App 20070190200 - Cherala; Anshuman ; et al. | 2007-08-16 |
System for dispensing liquids
Grant 7,252,715 - Watts , et al. August 7, 2 | 2007-08-07 |
Patterning Substrates Employing Multiple Chucks
App 20070170617 - Choi; Byung-Jin ; et al. | 2007-07-26 |
Method and System for Double-Sided Patterning of Substrates
App 20070132152 - Choi; Byung-Jin ; et al. | 2007-06-14 |
Imprint lithography template having a feature size under 250 nm
Grant 7,229,273 - Bailey , et al. June 12, 2 | 2007-06-12 |
Technique for separating a mold from solidified imprinting material
App 20070126156 - Mahadevan; GanapathiSubramanian ; et al. | 2007-06-07 |
Bifurcated contact printing technique
App 20070126150 - GanapathiSubramanian; Mahadevan ; et al. | 2007-06-07 |
Imprint lithography substrate processing tool for modulating shapes of substrates
Grant 7,224,443 - Choi , et al. May 29, 2 | 2007-05-29 |
Method For Expelling Gas Positioned Between A Substrate And A Mold
App 20070114686 - Choi; Byung-Jin ; et al. | 2007-05-24 |
System to couple a body and a docking plate
App 20070074635 - Schumaker; Philip D. ; et al. | 2007-04-05 |
System to transfer a template transfer body between a motion stage and a docking plate
App 20070071582 - Schumaker; Philip D. ; et al. | 2007-03-29 |
Method to control an atmostphere between a body and a substrate
App 20070063384 - Choi; Yeong-Jun ; et al. | 2007-03-22 |
System to control an atmosphere between a body and a substrate
App 20070065532 - Choi; Yeong-Jun ; et al. | 2007-03-22 |
Method to transfer a template transfer body between a motion stage and a docking plate
App 20070064384 - Schumaker; Philip D. ; et al. | 2007-03-22 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween
Grant 7,186,483 - Sreenivasan , et al. March 6, 2 | 2007-03-06 |
Formation Of Conductive Templates Employing Indium Tin Oxide
App 20070026542 - Sreenivasan; Sidlgata V. ; et al. | 2007-02-01 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
Grant 7,170,589 - Cherala , et al. January 30, 2 | 2007-01-30 |
Method to reduce adhesion between a conformable region and a pattern of a mold
Grant 7,157,036 - Choi , et al. January 2, 2 | 2007-01-02 |
Systems for magnification and distortion correction for imprint lithography processes
Grant 7,150,622 - Choi , et al. December 19, 2 | 2006-12-19 |
Method for providing desirable wetting and release characteristics between a mold and a polymerizable composition
App 20060279024 - Choi; Byung-Jin ; et al. | 2006-12-14 |
Apparatus to control displacement of a body spaced-apart from a surface
Grant 7,098,572 - Choi , et al. August 29, 2 | 2006-08-29 |
Method of separating a mold from a solidified layer disposed on a substrate
App 20060172549 - Choi; Byung-Jin ; et al. | 2006-08-03 |
Chucking system for nano-manufacturing
App 20060172031 - Babbs; Daniel A. ; et al. | 2006-08-03 |
Alignment systems for imprint lithography
Grant 7,070,405 - Sreenivasan , et al. July 4, 2 | 2006-07-04 |
Method of orientating a template with respect to a substrate in response to a force exerted on the template
Grant 7,060,402 - Choi , et al. June 13, 2 | 2006-06-13 |
Method and system to measure characteristics of a film disposed on a substrate
Grant 7,019,835 - McMackin , et al. March 28, 2 | 2006-03-28 |
Method to control the relative position between a body and a surface
Grant 6,955,868 - Choi , et al. October 18, 2 | 2005-10-18 |
Formation of discontinuous films during an imprint lithography process
Grant 6,932,934 - Choi , et al. August 23, 2 | 2005-08-23 |
System and method for dispensing liquids
Grant 6,926,929 - Watts , et al. August 9, 2 | 2005-08-09 |
Apparatus to orientate a body with respect to a surface
Grant 6,922,906 - Choi , et al. August 2, 2 | 2005-08-02 |
Step and repeat imprint lithography systems
Grant 6,900,881 - Sreenivasan , et al. May 31, 2 | 2005-05-31 |
High precision orientation alignment and gap control stages for imprint lithography processes
Grant 6,873,087 - Choi , et al. March 29, 2 | 2005-03-29 |
Method of separating a template from a substrate during imprint lithography
Grant 6,870,301 - Choi , et al. March 22, 2 | 2005-03-22 |
| 