Patent | Date |
---|
Composition for removing silicone resins and method of thinning substrate by using the same Grant 10,894,935 - Kang , et al. January 19, 2 | 2021-01-19 |
Composition For Removing Silicone Resins And Method Of Thinning Substrate By Using The Same App 20180265819 - KANG; In-goo ;   et al. | 2018-09-20 |
Tin plating solution, tin plating equipment, and method for fabricating semiconductor device using the tin plating solution Grant 9,840,785 - Park , et al. December 12, 2 | 2017-12-12 |
Composition For Removing Silicone Resins And Method Of Thinning Substrate By Using The Same App 20170158888 - KANG; In-goo ;   et al. | 2017-06-08 |
Tin Plating Solution, Tin Plating Equipment, And Method For Fabricating Semiconductor Device Using The Tin Plating Solution App 20150308007 - Park; Myung-Beom ;   et al. | 2015-10-29 |
Methods of forming a photosensitive film Grant 8,227,182 - Lee , et al. July 24, 2 | 2012-07-24 |
Thinner composition and method of removing photoresist using the same Grant 7,863,231 - Ahn , et al. January 4, 2 | 2011-01-04 |
Methods of Forming a Photosensitive Film App 20100034962 - LEE; Ahn-Ho ;   et al. | 2010-02-11 |
Thinner Composition And Method Of Removing Photoresist Using The Same App 20080214422 - AHN; Seung-Hyun ;   et al. | 2008-09-04 |
Thinner composition and method of removing photoresist using the same Grant 7,387,988 - Ahn , et al. June 17, 2 | 2008-06-17 |
Composition for removing a film, method of removing a film using the same, and method of forming a pattern using the same App 20080026585 - Kim; Eun-Jeong ;   et al. | 2008-01-31 |
Method of manufacturing a semiconductor device using a cleaning composition App 20060014391 - Lee; Kyung-Jin ;   et al. | 2006-01-19 |
Thinner composition and method of removing photoresist using the same App 20050176607 - Ahn, Seung-Hyun ;   et al. | 2005-08-11 |
Method of reworking a conditioning disk Grant 6,740,169 - Cho , et al. May 25, 2 | 2004-05-25 |
Thinner composition and method of stripping a photoresist using the same Grant 6,682,876 - Ahn , et al. January 27, 2 | 2004-01-27 |
Chemical vapor deposition method for manufacturing semiconductor devices Grant 6,664,119 - Choi , et al. December 16, 2 | 2003-12-16 |
Method of cleaning conditioning disk App 20030205239 - Cho, Sung-Burn ;   et al. | 2003-11-06 |
Thinner composition and method of stripping a photoresist using the same App 20030157441 - Ahn, Seung-Hyun ;   et al. | 2003-08-21 |
Photoresist Stripper Compositions App 20030113673 - Ahn, Seung-Hyun ;   et al. | 2003-06-19 |
Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk App 20020127962 - Cho, Sung-Bum ;   et al. | 2002-09-12 |
Metallization process for manufacturing semiconductor devices and system used in same App 20020061650 - Choi, Baik-Soon ;   et al. | 2002-05-23 |
Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield App 20010022157 - Shin, Eun-Hee ;   et al. | 2001-09-20 |
Chemical vapor deposition apparatus for manufacturing semiconductor devices, its driving method and method of optimizing recipe of cleaning process for process chamber App 20010019896 - Choi, Baik-Soon ;   et al. | 2001-09-06 |
Chemical vapor deposition apparatus for manufacturing semiconductor devices Grant 6,279,503 - Choi , et al. August 28, 2 | 2001-08-28 |
Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk App 20010009844 - Cho, Sung-bum ;   et al. | 2001-07-26 |
Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk Grant 6,213,856 - Cho , et al. April 10, 2 | 2001-04-10 |
Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method Grant 6,146,492 - Cho , et al. November 14, 2 | 2000-11-14 |
Apparatus and method for particle sampling during semiconductor device manufacturing Grant 6,119,532 - Park , et al. September 19, 2 | 2000-09-19 |