Patent | Date |
---|
Acetylene Fluid Supply Package, System Comprising The Same And Method Of Fabricating Semiconductor Device Using The Same App 20220260212 - Sinha; Ashwini K. ;   et al. | 2022-08-18 |
Semiconductor Device And Method For Fabricating Thereof App 20220093532 - LEE; Jin-su ;   et al. | 2022-03-24 |
Materials For Fabricating Thin Films, Methods Of Fabricating Thin Films Using The Same, And Equipment For Fabricating Thin Films Using The Same App 20210380622 - Ryu; Seung-Min ;   et al. | 2021-12-09 |
Integrated Circuit Device App 20210273039 - KIM; Youn-soo ;   et al. | 2021-09-02 |
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same Grant 11,062,940 - Sun , et al. July 13, 2 | 2021-07-13 |
Integrated circuit device Grant 11,043,553 - Kim , et al. June 22, 2 | 2021-06-22 |
Method of forming oxide layer and method of fabricating semiconductor device Grant 10,923,341 - Park , et al. February 16, 2 | 2021-02-16 |
Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound Grant 10,913,754 - Park , et al. February 9, 2 | 2021-02-09 |
Method of forming tin-containing material film and method of synthesizing a tin compound Grant 10,882,873 - Ryu , et al. January 5, 2 | 2021-01-05 |
Method of forming a thin film Grant 10,752,645 - Park , et al. A | 2020-08-25 |
Tantalum compound Grant 10,651,031 - Ryu , et al. | 2020-05-12 |
Integrated Circuit Device App 20200091275 - Kim; Youn-soo ;   et al. | 2020-03-19 |
Methods of forming a silicon layer, methods of forming patterns, and methods of manufacturing semiconductor devices using the same Grant 10,553,449 - Hwang , et al. Fe | 2020-02-04 |
Semiconductor Device And Method Of Manufacturing The Same Using Preliminary Sacrificial Layers App 20190378854 - LEE; WOON KYUNG ;   et al. | 2019-12-12 |
Method of fabricating semiconductor device Grant 10,468,264 - Lim , et al. No | 2019-11-05 |
Organometallic Precursors, Methods Of Forming A Layer Using The Same And Methods Of Manufacturing Semiconductor Devices Using Th App 20190304835 - Sun; Chang-Woo ;   et al. | 2019-10-03 |
Method Of Forming A Thin Film App 20190292207 - PARK; Gyu-hee ;   et al. | 2019-09-26 |
Method Of Forming Oxide Layer And Method Of Fabricating Semiconductor Device App 20190279862 - PARK; Jin-wook ;   et al. | 2019-09-12 |
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same Grant 10,361,118 - Sun , et al. | 2019-07-23 |
Lanthanum compound, method of synthesizing lanthanum compound, lanthanum precursor composition, method of forming thin film, and method of manufacturing integrated circuit device Grant 10,329,312 - Park , et al. | 2019-06-25 |
Method of forming semiconductor device using metal-containing hardmask to pattern photoresist having protected polymer Grant 10,319,590 - Ko , et al. | 2019-06-11 |
Lanthanum Compound And Methods Of Forming Thin Film And Integrated Circuit Device Using The Lanthanum Compound App 20190152996 - PARK; Gyu-hee ;   et al. | 2019-05-23 |
Method Of Forming Tin-containing Material Film And Method Of Synthesizing A Tin Compound App 20190144472 - RYU; Seung-min ;   et al. | 2019-05-16 |
Methods of forming thin film and fabricating integrated circuit device using niobium compound Grant 10,259,836 - Lim , et al. | 2019-04-16 |
Aluminum compound and methods of forming thin film and fabricating integrated circuit device by using the same Grant 10,242,877 - Park , et al. | 2019-03-26 |
Tantalum Compound App 20190074175 - RYU; Seung-min ;   et al. | 2019-03-07 |
Aluminum compound, method of forming thin film by using the same, and method of fabricating integrated circuit device Grant 10,224,200 - Park , et al. | 2019-03-05 |
Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same Grant 10,134,582 - Ryu , et al. November 20, 2 | 2018-11-20 |
Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD Grant 10,049,882 - Chung , et al. August 14, 2 | 2018-08-14 |
Method For Fabricating Semiconductor Device Including Forming A Dielectric Layer On A Structure Having A Height Difference Using Ald App 20180211842 - CHUNG; Won Woong ;   et al. | 2018-07-26 |
Tin Compound, Method Of Synthesizing The Same, Tin Precursor Compound For Atomic Layer Deposition, And Method Of Forming Tin-containing Material Film App 20180155372 - RYU; Seung-min ;   et al. | 2018-06-07 |
Method for forming dielectric film and method for fabricating semiconductor device Grant 9,991,112 - Chung , et al. June 5, 2 | 2018-06-05 |
Organometallic Precursors, Methods Of Forming A Layer Using The Same And Methods Of Manufacturing Semiconductor Devices Using The Same App 20180102284 - Sun; Chang-Woo ;   et al. | 2018-04-12 |
Methods Of Forming A Silicon Layer, Methods Of Forming Patterns, And Methods Of Manufacturing Semiconductor Devices Using The Same App 20180102260 - HWANG; Sun-Hye ;   et al. | 2018-04-12 |
Organometallic precursors and methods of forming thin layers using the same Grant 9,941,114 - Cho , et al. April 10, 2 | 2018-04-10 |
Method For Forming Dielectric Film And Method For Fabricating Semiconductor Device App 20180090313 - CHUNG; WON WOONG ;   et al. | 2018-03-29 |
Method for manufacturing a capacitor for semiconductor devices Grant 9,923,047 - Oh , et al. March 20, 2 | 2018-03-20 |
Aluminum Compound, Method Of Forming Thin Film By Using The Same, And Method Of Fabricating Integrated Circuit Device App 20180076024 - PARK; Gyu-hee ;   et al. | 2018-03-15 |
Aluminum Compound And Methods Of Forming Thin Film And Fabricating Integrated Circuit Device By Using The Same App 20180019135 - PARK; Gyu-hee ;   et al. | 2018-01-18 |
Method Of Fabricating Semiconductor Device App 20180005836 - LIM; JAE SOON ;   et al. | 2018-01-04 |
Method of fabricating a semiconductor device Grant 9,812,329 - Chung , et al. November 7, 2 | 2017-11-07 |
Nickel compound and method of forming thin film using the nickel compound Grant 9,790,246 - Youn , et al. October 17, 2 | 2017-10-17 |
Nickel Compound And Method Of Forming Thin Film Using The Nickel Compound App 20170198001 - Youn; Sang-chul ;   et al. | 2017-07-13 |
Method Of Forming Semiconductor Device Using Selective Deposition Layer And Related Device App 20170186614 - KO; Cha-won ;   et al. | 2017-06-29 |
Tantalum Compound And Methods Of Forming Thin Film And Fabricating Integrated Circuit Device By Using The Same App 20170178961 - RYU; Seung-min ;   et al. | 2017-06-22 |
Method Of Fabricating A Semiconductor Device App 20170170023 - CHUNG; Won Woong ;   et al. | 2017-06-15 |
Methods Of Forming Thin Film And Fabricating Integrated Circuit Device Using Niobium Compound App 20170152277 - LIM; Jae-soon ;   et al. | 2017-06-01 |
Method of forming thin film using a heterostructured nickel compound Grant 9,637,511 - Youn , et al. May 2, 2 | 2017-05-02 |
Copper electroplating solution and copper electroplating apparatus Grant 9,562,299 - Park , et al. February 7, 2 | 2017-02-07 |
Lanthanum Compound, Method Of Synthesizing Lanthanum Compound, Lanthanum Precursor Composition, Method Of Forming Thin Film, And Method Of Manufacturing Integrated Circuit Device App 20170008914 - PARK; Gyu-hee ;   et al. | 2017-01-12 |
Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same Grant 9,472,345 - Youn , et al. October 18, 2 | 2016-10-18 |
Methods of forming a pattern and methods of manufacturing a semiconductor device using the same Grant 9,425,059 - Park , et al. August 23, 2 | 2016-08-23 |
Method of manufacturing semiconductor device including nickel-containing film Grant 9,391,089 - Youn , et al. July 12, 2 | 2016-07-12 |
Semiconductor Devices Including Capacitors And Methods For Manufacturing The Same App 20160197136 - Oh; Se Hoon ;   et al. | 2016-07-07 |
.beta.-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same Grant 9,359,383 - Cho , et al. June 7, 2 | 2016-06-07 |
.beta.-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same Grant 9,359,382 - Cho , et al. June 7, 2 | 2016-06-07 |
Nickel Compound And Method Of Forming Thin Film Using The Nickel Compound App 20150266913 - Youn; Sang-chul ;   et al. | 2015-09-24 |
Organometallic Precursors And Methods Of Forming Thin Layers Using The Same App 20150255276 - CHO; Youn-Joung ;   et al. | 2015-09-10 |
Method Of Manufacturing Semiconductor Device Including Nickel-containing Film App 20150228663 - Youn; Sang-chul ;   et al. | 2015-08-13 |
Beta-ketoimine Ligand, Method Of Preparing The Same, Metal Complex Comprising The Same And Method Of Forming Thin Film Using The Same App 20140316164 - CHO; Youn-Joung ;   et al. | 2014-10-23 |
Beta-ketoimine Ligand, Method Of Preparing The Same, Metal Complex Comprising The Same And Method Of Forming Thin Film Using The Same App 20140309456 - CHO; Youn-Joung ;   et al. | 2014-10-16 |
Aluminum Precursor, Method Of Forming A Thin Film And Method Of Forming A Capacitor Using The Same App 20140242263 - YOUN; Sang-Chul ;   et al. | 2014-08-28 |
Methods Of Forming A Pattern And Methods Of Manufacturing A Semiconductor Device Using The Same App 20140199820 - PARK; Ji-Man ;   et al. | 2014-07-17 |
Copper Electroplating Solution And Copper Electroplating Apparatus App 20140197038 - PARK; Myung-Beom ;   et al. | 2014-07-17 |
Precursor composition, methods of forming a layer, methods of forming a gate structure and methods of forming a capacitor Grant 8,563,085 - Cho , et al. October 22, 2 | 2013-10-22 |
Beta-ketoimine Ligand, Method Of Preparing The Same, Metal Complex Comprising The Same And Method Of Forming Thin Film Using The Same App 20120251724 - CHO; Youn-Joung ;   et al. | 2012-10-04 |
Organometallic precursor, thin film having the same, metal wiring including the thin film, method of forming a thin film and method of manufacturing a metal wiring using the same Grant 8,268,397 - Cho , et al. September 18, 2 | 2012-09-18 |
Precursor Composition, Methods of Forming a Layer, Methods of Forming a Gate Structure and Methods of Forming a Capacitor App 20110183527 - Cho; Youn-Joung ;   et al. | 2011-07-28 |
Methods Of Forming A Layer, Methods Of Forming A Gate Structure And Methods Of Forming A Capacitor App 20110045183 - Cho; Youn-Joung ;   et al. | 2011-02-24 |
Methods Of Forming A Layer, Methods Of Forming A Gate Structure And Methods Of Forming A Capacitor App 20100047988 - Cho; Youn-Joung ;   et al. | 2010-02-25 |
Methods of forming metal oxide layers, methods of forming gate structures using the same, and methods of forming capacitors using the same Grant 7,648,854 - Lee , et al. January 19, 2 | 2010-01-19 |
Organic aluminum precursor and method of forming a metal wire using the same Grant 7,488,684 - Choi , et al. February 10, 2 | 2009-02-10 |
Organometallic precursor, thin film having the same, metal wiring including the thin film, method of forming a thin film and method of manufacturing a metal wiring using the same App 20090035516 - Cho; Youn-Joung ;   et al. | 2009-02-05 |
Method Of Manufacturing A Thin Layer And Methods Of Manufacturing Gate Structures And Capacitors Using The Same App 20080292783 - CHO; Jun-Hyun ;   et al. | 2008-11-27 |
Organic aluminum precursor and method of manufacturing a metal wiring using the same Grant 7,452,569 - Lee , et al. November 18, 2 | 2008-11-18 |
Methods of forming metal oxide layers, methods of forming gate structures using the same, and methods of forming capacitors using the same App 20080213940 - Lee; Jung-Ho ;   et al. | 2008-09-04 |
Method of forming a thin film and methods of manufacturing a gate structure and a capacitor using same App 20080057224 - Cho; Youn-Joung ;   et al. | 2008-03-06 |
Organic aluminum precursor and method of manufacturing a metal wiring using the same App 20070071893 - Lee; Jung-Ho ;   et al. | 2007-03-29 |
Organic aluminum precursor and method of forming a metal wire using the same App 20070066061 - Choi; Jung-Sik ;   et al. | 2007-03-22 |