Patent | Date |
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Methods And Apparatus For Symmetrical Hollow Cathode Electrode And Discharge Mode For Remote Plasma Processes App 20220293396 - CHO; Tae Seung ;   et al. | 2022-09-15 |
Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes Grant 11,373,845 - Cho , et al. June 28, 2 | 2022-06-28 |
Methods and apparatus for processing a substrate Grant 11,361,941 - Kim , et al. June 14, 2 | 2022-06-14 |
Methods And Apparatus For Processing A Substrate App 20210398778 - KIM; Junghoon ;   et al. | 2021-12-23 |
Methods And Apparatus For Symmetrical Hollow Cathode Electrode And Discharge Mode For Remote Plasma Processes App 20210384011 - CHO; Tae Seung ;   et al. | 2021-12-09 |
Plasma health determination in semiconductor substrate processing reactors Grant 10,920,320 - Kim , et al. February 16, 2 | 2021-02-16 |
Two Piece Electrode Assembly With Gap For Plasma Control App 20200328065 - Tan; Tien Fak ;   et al. | 2020-10-15 |
Apparatus and method for depositing a coating on a substrate at atmospheric pressure Grant 10,752,994 - Ruzic , et al. A | 2020-08-25 |
Two piece electrode assembly with gap for plasma control Grant 10,699,879 - Tan , et al. | 2020-06-30 |
Magnetic induction plasma source for semiconductor processes and equipment Grant 10,593,560 - Cho , et al. | 2020-03-17 |
High temperature chuck for plasma processing systems Grant 10,468,285 - Tran , et al. No | 2019-11-05 |
Two Piece Electrode Assembly With Gap For Plasma Control App 20190318911 - Tan; Tien Fak ;   et al. | 2019-10-17 |
Magnetic Induction Plasma Source For Semiconductor Processes And Equipment App 20190272999 - Cho; Tae Seung ;   et al. | 2019-09-05 |
Optical Emission Spectroscopy (oes) For Remote Plasma Monitoring App 20190259580 - Cho; Tae Seung ;   et al. | 2019-08-22 |
Optical emission spectroscopy (OES) for remote plasma monitoring Grant 10,319,649 - Cho , et al. | 2019-06-11 |
Apparatus And Method For Depositing A Coating On A Substrate At Atmospheric Pressure App 20190093229 - Ruzic; David N. ;   et al. | 2019-03-28 |
Apparatus and method for depositing a coating on a substrate at atmospheric pressure Grant 10,167,556 - Ruzic , et al. J | 2019-01-01 |
Plasma Health Determination In Semiconductor Substrate Processing Reactors App 20180366378 - Kim; Junghoon ;   et al. | 2018-12-20 |
Optical Emission Spectroscopy (oes) For Remote Plasma Monitoring App 20180294198 - Cho; Tae Seung ;   et al. | 2018-10-11 |
In-situ spatially resolved plasma monitoring by using optical emission spectroscopy Grant 9,874,524 - Cho , et al. January 23, 2 | 2018-01-23 |
High Temperature Chuck For Plasma Processing Systems App 20170309509 - Tran; Toan Q. ;   et al. | 2017-10-26 |
Dual discharge modes operation for remote plasma Grant 9,773,648 - Cho , et al. September 26, 2 | 2017-09-26 |
In-situ Spatially Resolved Plasma Monitoring By Using Optical Emission Spectroscopy App 20170254755 - CHO; Tae Seung ;   et al. | 2017-09-07 |
Low Temperature Chuck For Plasma Processing Systems App 20170229326 - Tran; Toan Q. ;   et al. | 2017-08-10 |
High temperature chuck for plasma processing systems Grant 9,728,437 - Tran , et al. August 8, 2 | 2017-08-08 |
Plasma uniformity control by arrays of unit cell plasmas Grant 9,528,185 - Nam , et al. December 27, 2 | 2016-12-27 |
High Temperature Chuck For Plasma Processing Systems App 20160225651 - Tran; Toan Q. ;   et al. | 2016-08-04 |
Low Temperature Chuck For Plasma Processing Systems App 20160225652 - Tran; Toan Q. ;   et al. | 2016-08-04 |
Plasma Uniformity Control By Arrays Of Unit Cell Plasmas App 20160053376 - NAM; Sang Ki ;   et al. | 2016-02-25 |
Apparatus And Method For Depositing A Coating On A Substrate At Atmospheric Pressure App 20150259802 - Ruzic; David N. ;   et al. | 2015-09-17 |
Polarity control for remote plasma Grant 9,117,855 - Cho , et al. August 25, 2 | 2015-08-25 |
Polarity Control For Remote Plasma App 20150155189 - Cho; Tae Seung ;   et al. | 2015-06-04 |
Dual Discharge Modes Operation For Remote Plasma App 20150060265 - Cho; Tae Seung ;   et al. | 2015-03-05 |
Plasma display panel and manufacturing method of the same Grant 7,646,150 - Cho , et al. January 12, 2 | 2010-01-12 |
Plasma Display Panel And Manufacturing Method Of The Same App 20090179569 - Cho; Tae-Seung ;   et al. | 2009-07-16 |
Display Panel App 20090039783 - Cho; Tae-Seung ;   et al. | 2009-02-12 |
Electrode Sheet For Plasma Display Panel And Plasma Display Panel Using The Same App 20080246386 - Chun; Byoung-Min ;   et al. | 2008-10-09 |
Plasma Display Panel And Method For Manufacturing The Same App 20080238827 - Choi; Jong-woo ;   et al. | 2008-10-02 |
Plasma display panel and method of manufacturing the same App 20080231187 - Hwang; Yong-Shik ;   et al. | 2008-09-25 |
Electrode Sheet For Plasma Display Panel And Plasma Display Panel Using The Same App 20080231185 - Cho; Tae-seung ;   et al. | 2008-09-25 |
Plasma Display Panel And Method For Manufacturing The Same App 20080231188 - Choi; Jong-woo ;   et al. | 2008-09-25 |
Plasma Display Panel App 20080224589 - Cho; Tae-Seung | 2008-09-18 |
Plasma Display Panel App 20080218441 - Cho; Tae-Seung ;   et al. | 2008-09-11 |
Plasma Display Panel App 20080211739 - Chun; Byoung-Min ;   et al. | 2008-09-04 |
Plasma Display Panel And Method Of Driving The Same App 20080165093 - Cho; Tae-seung ;   et al. | 2008-07-10 |
Plasma Display Panel And Method Of Manufacturing The Same App 20080158105 - Chun; Byoung-min ;   et al. | 2008-07-03 |
Plasma Display Panel App 20080116799 - Cho; Tae-Seung ;   et al. | 2008-05-22 |
Plasma Display Panel App 20080111486 - Chun; Byoung-Min ;   et al. | 2008-05-15 |
Plasma Display Panel And Method Of Manufacturing The Same App 20080084154 - Chun; Byoung-Min ;   et al. | 2008-04-10 |
Plasma display panel App 20080042933 - Shin; Hyea-Weon ;   et al. | 2008-02-21 |
Plasma display panel and manufacturing method of the same App 20080001853 - Cho; Tae-Seung ;   et al. | 2008-01-03 |
Plasma display panel App 20070132383 - Kim; Jeong-Nam ;   et al. | 2007-06-14 |
Plasma display panel (PDP) and its method of manufacture App 20070085479 - Hwang; Yong-Shik ;   et al. | 2007-04-19 |
Plasma display panel App 20070063643 - Cho; Tae-Seung ;   et al. | 2007-03-22 |