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Rinse And Method Of Use Thereof For Removing Edge Protection Layers And Residual Metal Hardmask Components
App 20220308455 - RAHMAN; M. Dalil ; et al. | 2022-09-29 |
Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer
Grant 11,421,128 - Rahman , et al. August 23, 2 | 2022-08-23 |
Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability
Grant 11,042,091 - Yao , et al. June 22, 2 | 2021-06-22 |
Spin-on Inorganic Oxide Containing Composition Useful As Hard Masks And Filling Materials With Improved Thermal Stability
App 20200356006 - YAO; Huirong ; et al. | 2020-11-12 |
Composition Of Spin-on Materials Containing Metal Oxide Nanoparticles And An Organic Polymer
App 20200087534 - RAHMAN; M. Dalil ; et al. | 2020-03-19 |
Lithographic Compositions And Methods Of Use Thereof
App 20200002568 - YAO; Huirong ; et al. | 2020-01-02 |
Materials containing metal oxides, processes for making same, and processes for using same
Grant 10,241,409 - Yao , et al. | 2019-03-26 |
Materials Containing Metal Oxides, Processes For Making Same, And Processes For Using Same
App 20170176860 - Yao; Huirong ; et al. | 2017-06-22 |
Metal hardmask composition and processes for forming fine patterns on semiconductor substrates
Grant 9,499,698 - Yao , et al. November 22, 2 | 2016-11-22 |
Polyoxometalate and heteropolyoxometalate compositions and methods for their use
Grant 9,418,836 - Chada , et al. August 16, 2 | 2016-08-16 |
Metal Hardmask Composition And Processes For Forming Fine Patterns On Semiconductor Substrates
App 20160230019 - YAO; Huirong ; et al. | 2016-08-11 |
Spin coatable metallic hard mask compositions and processes thereof
Grant 9,409,793 - Chada , et al. August 9, 2 | 2016-08-09 |
Stable metal compounds, their compositions and methods
Grant 9,315,636 - Yao , et al. April 19, 2 | 2016-04-19 |
Stable metal compounds as hardmasks and filling materials, their compositions and methods of use
Grant 9,296,922 - Yao , et al. March 29, 2 | 2016-03-29 |
Antireflective compositions and methods of using same
Grant 9,170,494 - Yao , et al. October 27, 2 | 2015-10-27 |
Bottom Antireflective Materials And Compositions
App 20150227043 - YAO; Huirong ; et al. | 2015-08-13 |
Polyoxometalate And Heteropolyoxometalate Compositions And Methods For Their Use
App 20150200091 - CHADA; Venkata Gopal Reddy ; et al. | 2015-07-16 |
Spin Coatable Metallic Hard Mask Compositions And Processes Thereof
App 20150200090 - CHADA; Venkata Gopal Reddy ; et al. | 2015-07-16 |
Stable Metal Compounds As Hardmasks And Filling Materials, Their Compositions And Methods Of Use
App 20150064904 - YAO; Huirong ; et al. | 2015-03-05 |
Antireflective coating composition and process thereof
Grant 8,906,590 - Rahman , et al. December 9, 2 | 2014-12-09 |
Antireflective coating composition and process thereof
Grant 8,906,592 - Rahman , et al. December 9, 2 | 2014-12-09 |
Bottom Antireflective Materials And Compositions
App 20140295349 - YAO; Huirong ; et al. | 2014-10-02 |
Stable Metal Compounds, Their Compositions And Methods
App 20140159278 - YAO; Huirong ; et al. | 2014-06-12 |
Antireflective Coating Composition And Process Thereof
App 20140038109 - RAHMAN; M. Dalil ; et al. | 2014-02-06 |
Antireflective Compositions And Methods Of Using Same
App 20130337379 - YAO; Huirong ; et al. | 2013-12-19 |
Antireflective compositions and methods of using same
Grant 8,507,192 - Yao , et al. August 13, 2 | 2013-08-13 |
Antireflective coating composition and process thereof
Grant 8,486,609 - Rahman , et al. July 16, 2 | 2013-07-16 |
Antireflective Coating Composition And Process Thereof
App 20120251956 - RAHMAN; M. Dalil ; et al. | 2012-10-04 |
Bottom Antireflective Coating Compositions
App 20110250544 - Liu; Weihong ; et al. | 2011-10-13 |
Antireflective Coating Composition and Process Thereof
App 20110151376 - Rahman; M. Dalil ; et al. | 2011-06-23 |
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