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Substrate Support With Multiple Embedded Electrodes App 20210313213 - KRAUS; Philip Allan ;   et al. | 2021-10-07 |
Substrate Support Pedestal Having Plasma Confinement Features App 20210296144 - LIN; Xing ;   et al. | 2021-09-23 |
Sheath And Temperature Control Of A Process Kit In A Substrate Processing Chamber App 20210296098 - CHO; Jaeyong ;   et al. | 2021-09-23 |
Workpiece carrier for high power with enhanced edge sealing Grant 11,127,619 - Ramaswamy , et al. September 21, 2 | 2021-09-21 |
Semiconductor substrate supports with embedded RF shield Grant 11,049,755 - Benjaminson , et al. June 29, 2 | 2021-06-29 |
Substrate Support With Multiple Embedded Electrodes App 20210183681 - KRAUS; Philip Allan ;   et al. | 2021-06-17 |
Method for contents playback with continuity and electronic device therefor Grant 10,965,972 - Choi , et al. March 30, 2 | 2021-03-30 |
Substrate support with multiple embedded electrodes Grant 10,937,678 - Kraus , et al. March 2, 2 | 2021-03-02 |
Electrostatic chuck assembly having a dielectric filler Grant 10,930,540 - Ramaswamy , et al. February 23, 2 | 2021-02-23 |
Sheath And Temperature Control Of Process Kit App 20210035844 - CHO; Jaeyong ;   et al. | 2021-02-04 |
Substrate support with dual embedded electrodes Grant 10,811,296 - Cho , et al. October 20, 2 | 2020-10-20 |
Electrostatic Chuck For High Bias Radio Frequency (rf) Power Application In A Plasma Processing Chamber App 20200286717 - CHO; JAEYONG ;   et al. | 2020-09-10 |
High power electrostatic chuck with aperture-reducing plug in a gas hole Grant 10,770,270 - Cho , et al. Sep | 2020-09-08 |
System for coupling a voltage to portions of a substrate Grant 10,714,372 - Chua , et al. | 2020-07-14 |
Substrate Support With Multiple Embedded Electrodes App 20200118861 - KRAUS; Philip Allan ;   et al. | 2020-04-16 |
Semiconductor Substrate Supports With Embedded Rf Shield App 20200090972 - Benjaminson; David ;   et al. | 2020-03-19 |
Electrostatic Chuck Assembly Having A Dielectric Filler App 20200066566 - Ramaswamy; Kartik ;   et al. | 2020-02-27 |
Method For Contents Playback With Continuity And Electronic Device Therefor App 20200053399 - CHOI; Pilsik ;   et al. | 2020-02-13 |
Substrate support with multiple embedded electrodes Grant 10,510,575 - Kraus , et al. Dec | 2019-12-17 |
Electrostatic chuck assembly having a dielectric filler Grant 10,504,765 - Ramaswamy , et al. Dec | 2019-12-10 |
System For Coupling A Voltage To Portions Of A Substrate App 20190088521 - CHUA; Thai Cheng ;   et al. | 2019-03-21 |
Substrate Support With Multiple Embedded Electrodes App 20190088520 - KRAUS; Philip Allan ;   et al. | 2019-03-21 |
Substrate Support With Dual Embedded Electrodes App 20190088519 - CHO; Jaeyong ;   et al. | 2019-03-21 |
Electrostatic Chuck Assembly Having A Dielectric Filler App 20180308736 - Ramaswamy; Kartik ;   et al. | 2018-10-25 |
High Power Electrostatic Chuck Design With Radio Frequency Coupling App 20170352567 - Cho; Jaeyong ;   et al. | 2017-12-07 |
Workpiece Carrier For High Power With Enhanced Edge Sealing App 20170352566 - Ramaswamy; Kartik ;   et al. | 2017-12-07 |
Workpiece Carrier With Gas Pressure In Inner Cavities App 20170352565 - Zhang; Chunlei ;   et al. | 2017-12-07 |
High Power Electrostatic Chuck With Aperture-reducing Plug In A Gas Hole App 20170352568 - Cho; Jaeyong ;   et al. | 2017-12-07 |
Advanced Temperature Control For Wafer Carrier In Plasma Processing Chamber App 20170323813 - Silveira; Fernando M. ;   et al. | 2017-11-09 |
Substrate Support Pedestal Having Plasma Confinement Features App 20170306494 - LIN; Xing ;   et al. | 2017-10-26 |
Substrate supports for semiconductor applications Grant 8,619,406 - Cho , et al. December 31, 2 | 2013-12-31 |
Substrate supports for semiconductor applications Grant 08619406 - | 2013-12-31 |
Nano-hybrid Of Targetable Sirna-layered Inorganic Hydroxide, Manufacturing Method Thereof, And Pharmaceutical Composition For Treating Tumor Comprising The Nano-hybrid App 20120220647 - Choy; Jin-Ho ;   et al. | 2012-08-30 |
Substrate Supports For Semiconductor Applications App 20120141661 - Cho; Jaeyong ;   et al. | 2012-06-07 |