| Patent | Date |
|---|
Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method
Grant 8,895,226 - Kim , et al. November 25, 2 | 2014-11-25 |
Coating Composition For Duv Filtering, Method Of Forming Photoresist Pattern Using The Same And Method Of Fabricating Semiconductor Device By Using The Method
App 20140205950 - KIM; HYUN-WOO ; et al. | 2014-07-24 |
Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method
Grant 8,715,911 - Kim , et al. May 6, 2 | 2014-05-06 |
Oligomer probe array and method of producing the same
Grant 8,551,759 - Hah , et al. October 8, 2 | 2013-10-08 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 8,278,221 - Koh , et al. October 2, 2 | 2012-10-02 |
Coating Composition For Duv Filtering, Method Of Forming Photoresist Pattern Using The Same And Method Of Fabricating Semiconductor Device By Using The Method
App 20120021355 - Kim; Hyun-woo ; et al. | 2012-01-26 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same
App 20110269294 - Koh; Cha-won ; et al. | 2011-11-03 |
Method of forming fine patterns of semiconductor device
Grant 8,026,044 - Lee , et al. September 27, 2 | 2011-09-27 |
Semiconductor memory devices including diagonal bit lines
Grant 8,013,375 - Goo , et al. September 6, 2 | 2011-09-06 |
Semiconductor memory devices including offset bit lines
Grant 8,013,374 - Goo , et al. September 6, 2 | 2011-09-06 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 8,003,543 - Koh , et al. August 23, 2 | 2011-08-23 |
Compensating Masks, Multi-Optical Systems Using the Masks, and Methods of Compensating for 3-D Mask Effect Using the Same
App 20110177437 - Suh; Sung-soo ; et al. | 2011-07-21 |
Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the same
Grant 7,940,373 - Suh , et al. May 10, 2 | 2011-05-10 |
System and method correcting optical proximity effect using pattern configuration dependent OPC models
Grant 7,900,170 - Suh , et al. March 1, 2 | 2011-03-01 |
Method of manufacturing a mask
Grant 7,873,935 - Jung , et al. January 18, 2 | 2011-01-18 |
Method of forming a semiconductor device
Grant 7,842,450 - Lee , et al. November 30, 2 | 2010-11-30 |
Flash Memory Device Using Double Patterning Technology and Method of Manufacturing the Same
App 20100290285 - Lee; Doo-youl ; et al. | 2010-11-18 |
Reflective photomask and method of fabricating the same
Grant 7,807,318 - Park , et al. October 5, 2 | 2010-10-05 |
Optical masks and methods for measuring aberration of a beam
Grant 7,799,490 - Hwang , et al. September 21, 2 | 2010-09-21 |
Semiconductor devices having Fin-type active areas and methods of manufacturing the same
Grant 7,795,099 - Kang , et al. September 14, 2 | 2010-09-14 |
Flash memory device using double patterning technology and method of manufacturing the same
Grant 7,787,301 - Lee , et al. August 31, 2 | 2010-08-31 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same
App 20100197139 - Koh; Cha-won ; et al. | 2010-08-05 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 7,732,341 - Koh , et al. June 8, 2 | 2010-06-08 |
Optical Masks And Methods For Measuring Aberration Of A Beam
App 20100112466 - Hwang; Chan ; et al. | 2010-05-06 |
Optical masks and methods for measuring aberration of a beam
Grant 7,670,725 - Hwang , et al. March 2, 2 | 2010-03-02 |
Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key
Grant 7,670,761 - Lee , et al. March 2, 2 | 2010-03-02 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
Grant 7,604,917 - Choi , et al. October 20, 2 | 2009-10-20 |
Photosensitive polymer and photoresist composition having the same
Grant 7,604,918 - Choi , et al. October 20, 2 | 2009-10-20 |
Semiconductor Memory Devices Including Diagonal Bit Lines
App 20090218610 - Goo; Don-Hoon ; et al. | 2009-09-03 |
Semiconductor Memory Devices Including Extended Memory Elements
App 20090218654 - Goo; Don-Hoon ; et al. | 2009-09-03 |
Semiconductor Memory Devices Including Offset Bit Lines
App 20090218609 - Goo; Doo-Hoon ; et al. | 2009-09-03 |
Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same
Grant 7,550,383 - Park , et al. June 23, 2 | 2009-06-23 |
Semiconductor memory devices including offset active regions
Grant 7,547,936 - Goo , et al. June 16, 2 | 2009-06-16 |
Method of manufacturing mask
Grant 7,539,970 - Jung , et al. May 26, 2 | 2009-05-26 |
Method Of Creating Mask Layout Image And Imaging System
App 20090013303 - Hwang; Chan ; et al. | 2009-01-08 |
Method of forming a mask structure and method of forming a minute pattern using the same
Grant 7,452,825 - Lee , et al. November 18, 2 | 2008-11-18 |
Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key
App 20080280381 - Lee; Doo-youl ; et al. | 2008-11-13 |
Method Of Forming Fine Patterns Of Semiconductor Device
App 20080206686 - LEE; Doo-youl ; et al. | 2008-08-28 |
Oligomer probe array chips, masks used to produce the same, and hybridization analysis methods using the same
App 20080176764 - Hah; Jung-hwan ; et al. | 2008-07-24 |
Photomask for measuring lens aberration, method of its manufacture, and method of its use
Grant 7,403,276 - Shin , et al. July 22, 2 | 2008-07-22 |
Semiconductor Device And Methods For Controlling Its Patterns
App 20080169862 - PARK; Joon-Soo ; et al. | 2008-07-17 |
Method of manufacturing mask for correcting optical proximity effect
Grant 7,378,196 - Kim , et al. May 27, 2 | 2008-05-27 |
Compensating Masks, Multi-Optical Systems Using the Masks, and Methods of Compensating for 3-D Mask Effect Using the Same
App 20080106719 - Suh; Sung-soo ; et al. | 2008-05-08 |
Semiconductor devices having Fin-type active areas and methods of manufacturing the same
App 20080105931 - Kang; Hyun-jae ; et al. | 2008-05-08 |
Method of manufacturing mask
App 20080097729 - Jung; Sung-Gon ; et al. | 2008-04-24 |
Barrier coating compositions containing silicon and methods of forming photoresist patterns using the same
Grant 7,361,612 - Choi , et al. April 22, 2 | 2008-04-22 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
App 20080090419 - Koh; Cha-won ; et al. | 2008-04-17 |
Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Layer Deposition
App 20080076070 - Koh; Cha-won ; et al. | 2008-03-27 |
Flash memory device using double patterning technology and method of manufacturing the same
App 20080067550 - Lee; Doo-youl ; et al. | 2008-03-20 |
Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device
Grant 7,344,999 - Mun , et al. March 18, 2 | 2008-03-18 |
Method of forming a mask structure and method of forming a minute pattern using the same
App 20080057610 - Lee; Doo-Youl ; et al. | 2008-03-06 |
Oligomer Probe Array and Method of Producing the Same
App 20080038732 - Hah; Jung-Hwan ; et al. | 2008-02-14 |
Method Of Manufacturing A Mask
App 20080010628 - Jung; Sung-gon ; et al. | 2008-01-10 |
Semiconductor device having vertical channel transistor
App 20070284623 - Kim; Sang-Jin ; et al. | 2007-12-13 |
Method of forming a semiconductor device
App 20070287299 - Lee; Doo-youl ; et al. | 2007-12-13 |
Method of forming trench in semiconductor device
Grant 7,259,065 - Goo , et al. August 21, 2 | 2007-08-21 |
Reflective photomask and method of fabricating the same
App 20070178393 - Park; Jin-Hong ; et al. | 2007-08-02 |
Photosensitive polymer and photoresist composition having the same
App 20070172760 - Choi; Sang-jun ; et al. | 2007-07-26 |
DRAM devices having an increased density layout
Grant 7,221,014 - Goo , et al. May 22, 2 | 2007-05-22 |
Optical proximity correction system and methods thereof
App 20070094635 - Suh; Sung-Soo ; et al. | 2007-04-26 |
Method for manufacturing semiconductor device with contact body extended in direction of bit line
Grant 7,205,241 - Park , et al. April 17, 2 | 2007-04-17 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same
App 20070082297 - Choi; Sang-Jun ; et al. | 2007-04-12 |
Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device
App 20070072431 - Mun; Chang-Sup ; et al. | 2007-03-29 |
Barrier coating compositions containing silicon and methods of forming photoresist patterns using the same
App 20070048672 - Choi; Sang-Jun ; et al. | 2007-03-01 |
Semiconductor structure with multiple bottom anti-reflective coating layer and method of forming photoresist pattern and pattern of semiconductor device using the same structure
App 20070023916 - Hah; Jung-hwan ; et al. | 2007-02-01 |
Optical masks and methods for measuring aberration of a beam
App 20060154155 - Hwang; Chan ; et al. | 2006-07-13 |
Double photolithography methods with reduced intermixing of solvents
App 20060127816 - Kang; Yool ; et al. | 2006-06-15 |
Focus monitoring masks having multiple phase shifter units and methods for fabricating the same
App 20060115746 - Choi; Sung-Won ; et al. | 2006-06-01 |
Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same
App 20060099538 - Park; Joon-Soo ; et al. | 2006-05-11 |
Methods for aligning patterns on a substrate based on optical properties of a mask layer and related devices
App 20060079067 - Shin; Jang-Ho ; et al. | 2006-04-13 |
Semiconductor memory devices including offset active regions
App 20060076599 - Goo; Doo-Hoon ; et al. | 2006-04-13 |
Dram devices having an increased density layout
App 20050269615 - Goo, Doo-hoon ; et al. | 2005-12-08 |
Method of forming trench in semiconductor device
App 20050266646 - Goo, Doo-hoon ; et al. | 2005-12-01 |
Resist reflow measurement key and method of forming a fine pattern of a semiconductor device using the same
App 20050089776 - Lee, Doo-youl ; et al. | 2005-04-28 |
Mask for correcting optical proximity effect and method of manufacturing the same
App 20050064304 - Kim, Byeong-Soo ; et al. | 2005-03-24 |
Mask for correcting optical proximity effect
Grant 6,841,801 - Kim , et al. January 11, 2 | 2005-01-11 |
Method for manufacturing semiconductor device with contact body extended in direction of bit line
App 20040127050 - Park, Chang-Min ; et al. | 2004-07-01 |
Mask for correcting optical proximity effect and method of manufacturing the same
App 20020151157 - Kim, Byeong-Soo ; et al. | 2002-10-17 |
Semiconductor memory device having storage node electrodes offset from each other
Grant 6,381,165 - Lee , et al. April 30, 2 | 2002-04-30 |
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